Homoepitaxial gallium-nitride-based light emitting device and method for producing
View Patent ↗A light emitting device comprised of a light emitting semiconductor active region disposed on a substrate comprised of GaN having a dislocation density less than 10 5 per cm 2 is provided.
1. A method for the preparation of a light emitting device comprising:
disposing a group III semiconductor active region on a substrate comprised of GaN having a dislocation density less than 10 5 cm −2 .
2. The method of claim 1 wherein deposition of said active region is carried out by metalorganic vapor phase epitaxy.
3. The method of claim 1 wherein deposition of said active region is carried out by molecular beam epitaxy.
4. The method of claim 1 wherein said substrate is annealed at temperatures greater than about 300° C.
5. The method of claim 1 further comprising the deposition of metallic contacts.
6. The method of claim 5 wherein said metallic contacts are chosen from the group consisting of Ni/Au, Ti/Al, Pd, Pt, Au, Ag, Cu, Al, Sn, In, Cr, Ti, Sc, Zr, Ta, W, Ni, Hf, a rare earth metal, and mixtures thereof.
7. The method of claim 1 further comprising the deposition of cladding layers chosen from the group consisting of n-GaN, n-Al w Ga (1-w) N, p-Al y Ga 1-y N, p-GaN, and mixtures thereof, wherein 0≦w,y≦1.
8. The method of claim 1 further comprising forming metallic contacts on a top (p-type) and bottom (n-type) surfaces and reflective surfaces along opposing edges to form a laser diode.
9. The method of claim 8 wherein a short dimension is parallel to a (10 {overscore (1)} 0) plane of the substrate and the reflective faces are formed by cleaving.
10. The method of claim 8 , further comprising deposition of a transparent, reflective layer on each facet.
11. A method for the preparation of a light emitting device comprising forming a group III semiconductor active region on a substrate comprised of GaN, wherein said substrate is cut from a boule that has been prepared from a GaN crystal formed by precipitation onto a gallium nitride crystal seed or boule.
12. The method of claim 11 wherein said boule is grown in a supercritical solvent at a temperature above about 550° C. at a pressure above about 5 kbar.
13. The method of claim 11 wherein said boule is grown from source gallium nitride selected from the group consisting of poorly-crystallized gallium nitride, well-crystallized gallium nitride, amorphous gallium nitride, gallium metal, polycrystalline gallium nitride, and mixtures thereof.
14. The method of claim 11 wherein said substrate is a single crystal.
15. The method of claim 11 wherein said boule is grown in nitrogen-containing solvent.
16. The method of claim 15 wherein said boule is grown in the pressure of a mineralizer.
17. The method of claim 11 further comprising the deposition of cladding layers chosen from the group consisting of n-GaN, n-Al w Ga (1-w) N, p-Al y Ga (1-y ) N, p-GaN, and mixtures thereof, wherein 0≦w,y≦1.
18. The method of claim 11 further comprising forming metallic contacts on top (p-type) and bottom (n-type) surfaces and reflective surfaces along opposing edges to form a laser diode.
19. The method of claim 18 wherein a short dimension is parallel to a (10 {overscore (1)} 0) plane of the substrate and the reflective faces are formed by cleaving.
20. The method of claim 18 , further comprising deposition of a transparent, reflective layer on each facet.
21. A method for forming a light emitting device comprising forming a light emitting region on a GaN substrate, said GaN substrate being formed by precipitating GaN onto a gallium nitride crystal seed.
22. The method of claim 21 wherein said substrate is a single crystal.
23. The method of claim 22 wherein said precipitating is conducted at a temperature above about 550° C.
24. The method of claim 23 wherein said precipitating is conducted at a pressure above about 5 kbar.
25. The method of claim 24 wherein said precipitating is conducted in a supercritical solvent.
26. The method of claim 21 further comprising the step of forming a boule as a result of said precipitating.
27. The method of claim 26 wherein said substrate is cut from said boule.
28. The method of claim 21 wherein said substrate has an absorption coefficient below about 100 cm −2 .
29. The method of claim 21 wherein said substrate has strain below about 0.005%.
30. The method of claim 21 wherein said substrate has a thickness between about 0.05 and 5 mm.
31. The method of claim 1 , wherein the GaN substrate has a dislocation density less than 100 cm −2 .
32. The method of claim 1 , wherein the GaN substrate has a carrier mobility above about 100 cm 2 /V-s.
33. The method of claim 1 , wherein the GaN substrate has a dislocation density less than 10 3 cm −2 .