Process for producing single crystal of compound semiconductor and crystal growing apparatus
View Patent ↗In a production method for producing a compound semiconductor single crystal by LEC method using a crystal growth apparatus with a double crucible structure, it was made to grow up a crystal by covering the second crucible with a plate-like member having a pass-through slot for being capable of introducing a crystal pulling-up shaft having a seed crystal holding part at a tip into the second crucible and creating a state where an atmosphere within the second crucible scarcely changes (a semi-sealed structure).
1. A method for producing a compound semiconductor single crystal, comprising:
providing semiconductor raw materials and an encapsulating material in a raw material melt housing comprising a closed-bottomed cylindrically-shaped first crucible and a second crucible having an open top portion and an opening in a bottom portion thereof communicating with the interior of said first crucible and said second crucible being disposed within the first crucible;
covering said open top portion of the second crucible with a cover having an opening therein,
heating the raw material housing to melt the raw materials, lowering a shaft through said opening in said cover of said second crucible to bring a seed crystal attached thereto into contact with the raw material melt in said first crucible, said second crucible being substantially sealed during said contacting by said cover; and
growing a crystal while raising said shaft from said raw material melt, wherein the cover is fixed to said shaft, and said cover is supported at a top end of a side wall of the second crucible when the crystal pulling-up shaft is lowered.
2. A crystal growth apparatus comprising:
an outer vessel which is sealable;
a closed-bottomed cylindrical-shaped first crucible disposed within the outer vessel;
a second crucible having an opening in a bottom portion thereof permitting communication between an interior of said second crucible and an interior of said first crucible, said second crucible being disposed within said first crucible,
a shaft having a seed crystal holding means at an end portion thereof; and
a cover for covering the top of said second crucible and having an opening therein adapted to permit said shaft to pass through said opening in said cover,
wherein said shaft includes means to engage said cover to prevent said shaft from being pulled completely from said opening in said cover.
3. The crystal growth apparatus as claimed in claim 2 , wherein the cover is a quartz glass plate.
4. The crystal growth apparatus as claimed in claim 2 , wherein a difference between the diameter of said opening in said cover and the diameter of said shaft is 1 mm or less.
5. The crystal growth apparatus as claimed in claim 3 , wherein a difference between a diameter of said opening in said cover and the diameter of shaft is 1 mm or less.