IP Library › Granted Patent US 6,811,662
Granted Patent Utility
US 6,811,662 · Confirmation No. 1856

[SPUTTERING APPARATUS AND MANUFACTURING METHOD OF METAL LAYER/METAL COMPOUND LAYER BY USING THEREOF]

Inventor: Yu-Cheng Liu
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2005-09-12 PET.DEC.PUBS Petition decision routed to the publications branch to act on the decision or continue prosecution. 1 View
2005-07-05 PET.STATUS Petition for review/processing depending on status 4 View
2005-07-05 IMIS Miscellaneous Internal Document 1 View
2005-07-01 PET.OP Petition for review by the Office of Petitions 4 View
2005-07-01 WFEE Fee Worksheet (SB06) 2 View
2004-09-22 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-09-22 TRNA Transmittal of New Application 2 View
2004-07-14 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-14 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-07-14 892 List of references cited by examiner 2 View
2004-07-14 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-07-14 FWCLM Index of Claims 1 View
2004-07-14 SRFW Search information including classification, databases and other search related notes 2 View
2004-06-24 SRNT Examiner's search strategy and results 1 View
2004-04-14 ELC. Response to Election / Restriction Filed 4 View
2004-04-09 ELC. Response to Election / Restriction Filed 3 View
2004-03-19 CTRS Requirement for Restriction/Election 4 View
2004-03-19 FWCLM Index of Claims 1 View
2003-08-22 ADS Application Data Sheet 2 View
2003-08-22 WFEE Fee Worksheet (SB06) 1 View
2003-08-22 TRNA Transmittal of New Application 2 View
2003-08-22 SPEC Specification 17 View
2003-08-22 CLM Claims 5 View
2003-08-22 DRW Drawings-only black and white line drawings 1 View
2003-08-22 ABST Abstract 1 View
2003-08-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2003-08-22 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,811,662
App. No.
10/604,857
Filed
2003-08-22
Granted
2004-11-02
Art Unit
2822
PTA
0 days