Re-performable spin-on process
View Patent ↗First, a spin-on process is performed for forming a first dielectric layer over a plurality of metal interconnecting wires that are located on a semiconductor wafer. Then, an examining step is performed on the first dielectric layer, and the first dielectric layer is made to conform to a predetermined condition. Thereafter, an etching process is performed for completely removing the first dielectric layer. Subsequently, the semiconductor wafer is cleaned through use of a wet scrubber, and is dried. Finally, the spin-on process is re-performed for forming a second dielectric layer on the semiconductor wafer.
1. A re-performable spin-on process comprising:
performing a spin-on process for forming a first dielectric layer on a semiconductor wafer, the first dielectric layer being composed of a spin-on glass (SOG) material;
performing an examining stop on the first dielectric layer, the first dielectric layer conforming to a predetermined condition;
performing an etching process for completely removing the first dielectric layer;
cleaning the semiconductor wafer through use of a wet scrubber;
drying the semiconductor wafer; and
re-performing the spin-on process for forming a second dielectric layer on the semiconductor wafer, the second dielectric layer being composed of an SOG material;
wherein the semiconductor wafer comprises a plurality of metal interconnecting wires and the first dielectric layer is formed over the metal interconnecting wires.
2. The process of claim 1 wherein the examining step is a measurement of a film thickness and the predetermined condition indicates poor thickness uniformity of the first dielectric layer.
3. The process of claim 1 wherein the examining step is a cleanness inspection and the predetermined condition indicates that the first dielectric layer is contaminated by chemical solution or particles.
4. The process of claim 1 wherein the first dielectric layer and the second dielectric layer are both composed of a dielectric material having a low dielectric constant.
5. The process of claim 1 wherein the etching process is a dry etching process.
6. The process of claim 1 further comprising forming a barrier layer between the metal interconnecting wires and the first dielectric layer.
7. The process of claim 6 wherein the barrier layer is a silicon oxide layer that is formed through performing a chemical vapor deposition (CVD).
8. The process of claim 1 wherein the etching process is a wet etching process.
9. The process of claim 8 wherein the wet etching process utilizes buffered hydrofluoric (BHF) as an etching solution.
10. A re-performable spin-on process comprising:
performing a chemical vapor deposition (CVD) process for forming a silicon oxide layer on a semiconductor wafer;
performing a spin-on process for forming a first dielectric layer on the silicon oxide layer, the first dielectric layer being composed of a spin-on glass (SOG) material;
performing an examining step on the first dielectric layer, the first dielectric layer conforming to a predetermined condition;
performing an etching process for completely removing the first dielectric layer;
cleaning the semiconductor wafer through use of a wet scrubber;
drying the semiconductor wafer; and
re-performing the spin-on process for forming a second dielectric layer on the semiconductor wafer, the second dielectric layer being composed of an SOG material;
wherein the semiconductor wafer comprises a plurality of metal interconnecting wires and the silicon oxide layer is formed over the metal interconnecting wires.
11. The process of claim 10 wherein the examining step is a measurement of a film thickness and the predetermined condition indicates poor thickness uniformity of the first dielectric layer.
12. The process of claim 10 wherein the examining step is a cleanness inspection and the predetermined condition indicates that the first dielectric layer is contaminated by chemical solution or particles.
13. The process of claim 10 wherein the first dielectric layer and the second dielectric layer are both composed of a dielectric material having a low dielectric constant.
14. The process of claim 10 wherein the etching process is a wet etching process.
15. The process of claim 14 wherein the wet etching process utilizes buffered hydrofluoric (BHF) as an etching solution.