IP Library › Granted Patent US 6,756,314
Granted Patent Utility
US 6,756,314 · Confirmation No. 2856

METHOD FOR ETCHING A HARD MASK LAYER AND A METAL LAYER

Inventor: Ulrich Baier
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2004-07-09 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-05-17 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-13 NOA Notice of Allowance and Fees Due (PTOL-85) 5 View
2004-02-13 892 List of references cited by examiner 1 View
2004-02-13 1449 List of References cited by applicant and considered by examiner 1 View
2004-02-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-13 SRFW Search information including classification, databases and other search related notes 2 View
2004-02-13 FWCLM Index of Claims 1 View
2004-02-07 SRNT Examiner's search strategy and results 6 View
2003-09-22 OATH Oath or Declaration filed 3 View
2003-09-22 FRPR Certified Copy of Foreign Priority Application 20 View
2003-08-26 TRNA Transmittal of New Application 2 View
2003-08-26 SPEC Specification 14 View
2003-08-26 CLM Claims 2 View
2003-08-26 ABST Abstract 1 View
2003-08-26 DRW Drawings-only black and white line drawings 3 View
2003-08-26 OATH Oath or Declaration filed 2 View
2003-08-26 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-08-26 WFEE Fee Worksheet (SB06) 1 View
2003-08-26 WFEE Fee Worksheet (SB06) 1 View
2003-08-26 FOR Foreign Reference 30 View
2003-08-26 LET. Miscellaneous Incoming Letter 6 View
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Quick Facts
Patent No.
US 6,756,314
App. No.
10/647,614
Filed
2003-08-25
Granted
2004-06-29
Pub. No.
US20040038541A1
Art Unit
2823
PTA
-4 days