Probe station with low inductance path
View Patent ↗A probe assembly suitable for making test measurements using test signals having high currents. The disclosed probe assembly provides for a test signal exhibiting relatively low inductance when compared to existing probe assemblies by preferably reducing the electrical path distance between the test instrumentation and the electrical device being tested.
1. A probe assembly for probing an electrical device, said probe assembly comprising:
(a) a chuck having a first conductive member with a support surface suitable for supporting an electrical device; and
(b) a second conductive member having a substantially planar surface spaced apart from, and opposed to, said support surface of said chuck, wherein said support surface is electrically interconnected to said second conductive member;
(c) wherein said second conductive member is electrically interconnected to a test signal of said electrical device.
2. The probe assembly of claim 1 wherein said first conductive member comprises a first plate, said second conductive member comprises a second plate, and wherein said second conductive member is spaced further distant from said electrical device than said first conductive member.
3. The probe assembly of claim 1 wherein said second conductive member comprises a second plate and is vertically spaced apart from said first conductive member.
4. The probe assembly of claim 1 wherein said second conductive member is electrically interconnected to said support surface completely within an environmental chamber.
5. The probe assembly of claim 1 wherein said second conductive member is free from being supported by said chuck.
6. The probe assembly of claim 1 wherein said first conductive member is electrically interconnected to a first probe, wherein said second conductive member is electrically interconnected to a second probe.
7. The probe assembly of claim 1 wherein said first conductive member and said second conductive member are electrically interconnected to a first probe.
8. The probe assembly of claim 1 wherein said first conductive member is electrically interconnected to a first probe and wherein said first probe is electrically interconnected to test instrumentation using a conductive element having a length, at least 50% of said length comprising a twisted pair of wires.
9. The probe assembly of claim 1 further comprising a detachable substantially closed loop member engageable with said first conductive member and said second conductive member, where said loop member includes a flexible member interconnecting said first conductive member and said second conductive member.