IP Library Granted Patent US 6,987,300
Granted Patent B2
US 6,987,300 · App. 10/809,659 · Granted Jan 17, 2006

High voltage ESD-protection structure

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Quick Facts
Patent No.
US 6,987,300
App. No.
10/809,659
Granted
Jan 17, 2006
Kind
B2
Abstract

A high voltage ESD-protection structure is used to protect delicate transistor circuits connected to an input or output of an integrated circuit bond pad from destructive high voltage ESD events by conducting at a controlled breakdown voltage that is less than a voltage that may cause destructive breakdown of the input and/or output circuits. The ESD-protection structure is able to absorb high current from these ESD events without snapback that would compromise operation of the higher voltage inputs and/or outputs of the integrated circuit. The ESD-protection structure will conduct when an ESD event occurs at a voltage above a controlled breakdown voltage of an electronic device, e.g., diode, in the ESD protection structure. Conduction of current from an ESD event having a voltage above the electronic device controlled breakdown voltage may be through another electronic device, e.g., transistor, having high current conduction capabilities, in the ESD-protection structure that may be controlled (triggered) by the device (e.g., diode) determining the controlled breakdown voltage (at which the ESD voltage is clamped to a desired value). The high voltage ESD-protection structure may be located substantially under the bond pad and may also include a low capacitance forward diode structure between the bond pad and the ESD clamp circuit.

Claims (41)

1. An ESD-protection structure, comprising:

an integrated circuit having a lighter doped p-silicon well (P-well);

a first lighter doped n-silicon well (first N-well) in the P-well;

a plurality of first heavier doped p-silicon diffusions (first P+ diffusions) in the first N-well;

a first heavier doped n-silicon diffusion (first N+ diffusion) in the first N-well, wherein the first N+ diffusion surrounds the plurality of first P+ diffusions;

a second lighter doped n-silicon well (second N-well) in the P-well, the second N-well adjacent to the first N-well;

a second heavier doped n-silicon diffusion (second N+ diffusion) in the second N-well, the second N+ diffusion is connected to the first N+ diffusion;

a second heavier doped p-silicon diffusion (second P+ diffusion) in the second N-well;

a third heavier doped p-silicon diffusion (third P+ diffusion) in the P-well, the third P+ diffusion is connected to the second P+ diffusion, wherein the third P+ diffusion surrounds the first N+ diffusion, the plurality of first P+ diffusions, the second N+ diffusion and the second P+ diffusion;

a bond pad connected to the plurality of first P+ diffusions.

2. The ESD-protection structure of claim 1 , wherein the P-well is the integrated circuit substrate.

3. The ESD-protection structure of claim 1 , further comprising a lighter doped n-silicon substrate (N-substrate) of the integrated circuit, wherein the P-well is in the N-substrate.

4. The ESD-protection structure of claim 1 , wherein the plurality of first P+ diffusions are rectangular shaped.

5. The ESD-protection structure of claim 1 , wherein the plurality of P+ diffusions are square shaped.

6. The ESD-protection structure of claim 1 , wherein the plurality of P+ diffusions are stripe shaped.

7. The ESD-protection structure of claim 1 , wherein the bond pad is connected to the plurality of first P+ diffusions with a first plurality of conductive vias.

8. The ESD-protection structure of claim 1 , wherein the connection between the first and second N+ diffusions is with a second plurality of conductive vias.

9. The ESD-protection structure of claim 1 , wherein the connection between the second and third P+ diffusions is with a third plurality of conductive vias.

10. The ESD-protection structure of claim 7 , wherein the first plurality of conductive vias are metal.

11. The ESD-protection structure of claim 7 , wherein the first plurality of conductive vias comprise conductive semiconductor silicon.

12. The ESD-protection structure of claim 8 , wherein the second plurality of conductive vias are metal.

13. The ESD-protection structure of claim 8 , wherein the second plurality of conductive vias comprise conductive silicon.

14. The ESD-protection structure of claim 9 , wherein the third plurality of conductive vias are metal.

15. The ESD-protection structure of claim 9 , wherein the third plurality of conductive vias comprise conductive silicon.

16. The ESD-protection structure of claim 1 , further comprising a second connection to the first N+ diffusion with a fourth plurality of conductive vias.

17. The ESD-protection structure of claim 1 , wherein the P-well is coupled to ground.

18. The ESD-protection structure of claim 1 , wherein the P-well is coupled to a common power supply rail.

19. The ESD-protection structure of claim 1 , wherein the third P+ diffusion is coupled to ground.

20. The ESD-protection structure of claim 1 , wherein the third P+ diffusion is coupled to a common power supply rail.

21. The ESD-protection structure of claim 1 , wherein the plurality of first P+ diffusions are located substantially under the bond pad.

22. A system for protecting an integrated circuit from ESD damage, said system comprising:

an ESD-protection structure for at least one of a plurality of input and output connections of an integrated circuit, wherein the ESD-protection structure comprises:

an integrated circuit having a lighter doped p-silicon well (P-well);

a first lighter doped n-silicon well (first N-well) in the P-well;

a plurality of first heavier doped p-silicon diffusions (first P+ diffusions) in the first N-well;

a first heavier doped n-silicon diffusion (first N+ diffusion) in the first N-well, wherein the first N+ diffusion surrounds the plurality of first P+ diffusions;

a second lighter doped n-silicon well (second N-well) in the P-well, the second N-well adjacent to the first N-well;

a second heavier doped n-silicon diffusion (second N+ diffusion) in the second N-well, the second N+ diffusion is connected to the first N+ diffusion;

a second heavier doped p-silicon well (second P+ diffusion) in the second N-well;

a third heavier doped p-silicon diffusion (third P+ diffusion) in the P-well, the third P+ diffusion is connected to the second P+ diffusion, wherein the third P+ diffusion surrounds the first N+ diffusion, the plurality of first P+ diffusions, the second N+ diffusion and the second P+ diffusion;

a bond pad connected to the plurality of first P+ diffusions.

Assignments (17)
RELEASE OF SECURITY INTEREST Recorded Mar 14, 2022
From: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
To: MICROCHIP TECHNOLOGY INCORPORATED; SILICON STORAGE TECHNOLOGY, INC.; ATMEL CORPORATION; MICROSEMI CORPORATION; MICROSEMI STORAGE SOLUTIONS, INC.
Reel/Frame 060894/0437 →
RELEASE OF SECURITY INTEREST Recorded Mar 11, 2022
From: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
To: MICROCHIP TECHNOLOGY INCORPORATED; SILICON STORAGE TECHNOLOGY, INC.; ATMEL CORPORATION; MICROSEMI CORPORATION; MICROSEMI STORAGE SOLUTIONS, INC.
Reel/Frame 059363/0001 →
RELEASE OF SECURITY INTEREST Recorded Mar 10, 2022
From: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
To: MICROCHIP TECHNOLOGY INCORPORATED; SILICON STORAGE TECHNOLOGY, INC.; ATMEL CORPORATION; MICROSEMI CORPORATION; MICROSEMI STORAGE SOLUTIONS, INC.
Reel/Frame 059863/0400 →
RELEASE OF SECURITY INTEREST Recorded Mar 9, 2022
From: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
To: MICROCHIP TECHNOLOGY INCORPORATED; SILICON STORAGE TECHNOLOGY, INC.; ATMEL CORPORATION; MICROSEMI CORPORATION; MICROSEMI STORAGE SOLUTIONS, INC.
Reel/Frame 059358/0001 →
RELEASE OF SECURITY INTEREST Recorded Feb 28, 2022
From: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
To: MICROCHIP TECHNOLOGY INCORPORATED
Reel/Frame 059666/0545 →
RELEASE OF SECURITY INTEREST Recorded Feb 25, 2022
From: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
To: MICROCHIP TECHNOLOGY INCORPORATED; SILICON STORAGE TECHNOLOGY, INC.; ATMEL CORPORATION; MICROSEMI CORPORATION; MICROSEMI STORAGE SOLUTIONS, INC.
Reel/Frame 059333/0222 →
SECURITY INTEREST Recorded Jun 4, 2021
From: MICROCHIP TECHNOLOGY INCORPORATED; SILICON STORAGE TECHNOLOGY, INC.; ATMEL CORPORATION; MICROSEMI CORPORATION; MICROSEMI STORAGE SOLUTIONS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
Reel/Frame 057935/0474 →
SECURITY INTEREST Recorded Dec 24, 2020
From: MICROCHIP TECHNOLOGY INCORPORATED; SILICON STORAGE TECHNOLOGY, INC.; ATMEL CORPORATION; MICROSEMI CORPORATION; MICROSEMI STORAGE SOLUTIONS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 055671/0612 →
SECURITY INTEREST Recorded Jun 5, 2020
From: MICROCHIP TECHNOLOGY INC.; SILICON STORAGE TECHNOLOGY, INC.; ATMEL CORPORATION; MICROSEMI CORPORATION; MICROSEMI STORAGE SOLUTIONS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION
Reel/Frame 053468/0705 →
RELEASE OF SECURITY INTEREST Recorded May 30, 2020
From: JPMORGAN CHASE BANK, N.A, AS ADMINISTRATIVE AGENT
To: MICROCHIP TECHNOLOGY INC.; SILICON STORAGE TECHNOLOGY, INC.; ATMEL CORPORATION; MICROSEMI CORPORATION; MICROSEMI STORAGE SOLUTIONS, INC.
Reel/Frame 053466/0011 →
SECURITY INTEREST Recorded Apr 24, 2020
From: MICROCHIP TECHNOLOGY INC.; SILICON STORAGE TECHNOLOGY, INC.; ATMEL CORPORATION; MICROSEMI CORPORATION; MICROSEMI STORAGE SOLUTIONS, INC.
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 053311/0305 →
SECURITY INTEREST Recorded Sep 18, 2018
From: MICROCHIP TECHNOLOGY INCORPORATED; SILICON STORAGE TECHNOLOGY, INC.; ATMEL CORPORATION; MICROSEMI CORPORATION; MICROSEMI STORAGE SOLUTIONS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
Reel/Frame 047103/0206 →
SECURITY INTEREST Recorded Jun 25, 2018
From: MICROCHIP TECHNOLOGY INCORPORATED; SILICON STORAGE TECHNOLOGY, INC.; ATMEL CORPORATION; MICROSEMI CORPORATION; MICROSEMI STORAGE SOLUTIONS, INC.
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 046426/0001 →
SECURITY INTEREST Recorded Feb 10, 2017
From: MICROCHIP TECHNOLOGY INCORPORATED
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 041675/0617 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 18, 2005
From: YACH, RANDY L.; DIX, GREG
To: MICROCHIP TECHNOLOGY INCORPORATED
Reel/Frame 016787/0938 →
CORRECTIVE ASSIGNMENT TO CORRECT THE SECOND ASSIGNOR'S NAME, PREVIOUSLY RECORDED AT REEL 015154 FRAME 0148. Recorded Dec 10, 2004
From: YACH, RANDY L.; DIX, GREG
To: MICROCHIP TECHNOLOGY INCORPORATED
Reel/Frame 016062/0335 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 25, 2004
From: YACH, RANDY L.; DIX, GREG
To: MICROCHIP TECHNOLOGY INCORPORATED
Reel/Frame 015154/0148 →