Method for forming conductive line of semiconductor device
View Patent ↗A method for conductive line of semiconductor device is disclosed. A cobalt silicide layer is formed on an impurity junction region exposed through a contact hole. The cobalt silicide layer stabilizes a contact resistance so that the contact resistance of the impurity junction region does not vary in subsequent thermal processes.
1. A method for forming conductive line of semiconductor device, comprising the steps of:
forming a lower insulating film on a semiconductor substrate including a gate electrode and an impurity junction region;
etching the lower insulating film to form a first contact hole exposing a top surface of the gate electrode and a second contact hole exposing the impurity junction region;
forming a cobalt silicide layer on the impurity junction region exposed through the second contact hole;
forming a stacked structure of a Ti film and a TiN film on the semiconductor substrate including the first and the second contact holes;
forming a conductive layer on the lower insulating film including the first and the second contact holes; and patterning the conductive layer to form a conductive line pattern.
2. The method according to claim 1 , wherein the step of forming the cobalt silicide layer comprises:
forming a cobalt film on the semiconductor substrate including the first and the second contact holes;
performing a rapid thermal process to react the cobalt film with a surface of the impurity junction region; and removing an unreacted portion of the cobalt film.
3. The method according to claim 2 , wherein the cobalt film is formed by a PVD method and has a thickness ranging from 50 to 150 Å.
4. The method according to claim 2 , wherein the rapid thermal process comprises:
a first rapid thermal process performed at a temperature ranging from 650 to 750° C. for 10 to 30 seconds; and
a second rapid thermal process performed at a temperature ranging from 800 to 880° C. for 10 to 30 seconds.
5. The method according to claim 2 , wherein the unreacted portion of the cobalt film is removed using SC- 1 solution.
6. The method according to claim 1 , wherein the step of forming a stacked structure of a Ti film and a TiN film comprises:
forming the Ti film having a thickness ranging from 100 to 200 Å via a first PVD process; and
forming the TiN film having a thickness ranging from 100 to 400 Å via a second PVD process.
7. The method according to claim 1 , wherein the conductive line pattern is a bit line pattern or a metal wiring.