Methods and apparatus for packaging integrated circuit devices
View Patent ↗An integrally packaged integrated circuit device including an integrated circuit die including a crystalline substrate having first and second generally planar surfaces and edge surfaces and semiconductor circuitry formed over the first generally planar surface, at least one chip scale packaging layer formed over the semiconductor circuitry and the first generally planar surface, an insulation layer formed over the second generally planar surface and the edge surfaces and at least one electrical conductor formed directly on the insulation layer overlying the second generally planar surface, the at least one electrical conductor being connected to the circuitry by at least one pad formed directly on the first generally planar surface.
1. A method of producing integrally packaged optronic integrated circuit devices comprising:
providing a plurality of integrated circuit dies formed on a wafer having first and second generally planar surfaces and optronic semiconductor circuitry formed over said first generally planar surface;
forming at least one chip scale packaging layer over said semiconductor circuitry and said first generally planar surface;
separating said integrated circuit dies from each other along dice lines defined in said second generally planar surface, so as to define edge surfaces of said dies while said dies remain attached to said packaging layer;
forming at least one electrical conductor overlying said second generally planar surface, said at least one electrical conductor being connected to said circuitry by at least one pad formed directly on said first generally planar surface, wherein the at least one pad comprises a projecting portion that extends beyond a corresponding one of the edge surfaces and wherein the at least one electrical conductor contacts the projecting portion; and
subsequently dicing said wafer to define a plurality of packaged optronic integrated circuit devices.
2. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 and wherein said at least one chip scale packaging layer is formed of at least one of glass, quartz and sapphire.
3. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 also comprising forming an insulation layer over said second generally planar surface and said edge surfaces and underlying said at least one electrical conductor.
4. A method of producing integrally packaged optronic integrated circuit devices according to claim 3 and wherein said insulation layer comprises a mechanically conforming layer.
5. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 wherein said forming at least one electrical conductor comprises forming a portion of said at least one electrical conductor generally parallel to and in touching electrical engagement with a planar surface of said at least one pad.
6. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 wherein said forming at least one electrical conductor comprises forming a portion of said at least one electrical conductor to be in touching electrical engagement with an edge of said at least one pad.
7. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 wherein said forming at least one chip scale packaging layer comprises adhering said at least one chip scale packaging layer to said first generally planar surface using a bonding layer.
8. A method of producing integrally packaged optronic integrated circuit devices according to claim 7 and wherein said bonding layer has spectral filter functionality.
9. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 and wherein said forming said chip scale packaging layer also comprises forming at least one spectral filter on at least a portion of a radiation transparent protective surface of said chip scale packaging layer.
10. A method of producing integrally packaged optronic integrated circuit devices according to claim 9 and wherein said radiation transparent protective surface comprises at least one of a top surface and an edge surface.
11. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 and wherein said forming said chip scale packaging layer also comprises forming color array filters on said chip scale packaging layer.
12. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 and wherein said forming said chip scale packaging layer also comprises integrally forming at least one lens on a radiation transparent protective surface of said chip scale packaging layer.
13. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 and wherein said forming at least one chip scale packaging layer comprises forming at least one lens.
14. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 and also comprising integrally forming at least one lens on a radiation transparent protective surface of said chip scale packaging layer.
15. A method of producing integrally packaged optronic integrated circuit devices according to claim 12 and wherein said forming said at least one lens comprises maintaining said at least one lens at a precisely fixed distance with respect to said optronic semiconductor circuitry.
16. A method of producing integrally packaged optronic integrated circuit devices according to claim 13 and wherein said forming said at least one lens comprises maintaining said at least one lens at a precisely fixed distance with respect to said optronic semiconductor circuitry.
17. A method of producing integrally packaged optronic integrated circuit devices according to claim 14 and wherein said forming said at least one lens comprises maintaining said at least one lens at a precisely fixed distance with respect to said optronic semiconductor circuitry.
18. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 and wherein said forming said chip scale packaging layer also comprises forming light coupling bumps on a radiation transparent protective surface of said chip scale packaging layer.
19. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 and wherein said forming said chip scale packaging layer also comprises forming a waveguide and other optical components on a radiation transparent protective surface of said chip scale packaging layer.
20. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 and wherein said forming said chip scale packaging layer also comprises forming an optical grating on a radiation transparent protective surface of said chip scale packaging layer.
21. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 and wherein said forming said chip scale packaging layer also comprises integrally forming a polarizer thereon.
22. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 and also comprising forming a trench between different elements on the integrated circuit die.
23. A method of producing integrally packaged optronic integrated circuit devices according to claim 1 and also comprising inserting a spacer element over said semiconductor circuitry and said first generally planar surface prior to said forming said chip scale packaging layer.