Pattern component analysis and manipulation
View Patent ↗A method for determining component patterns of a raw substrate map. A subset of substrate patterns is selected from a set of substrate patterns, and combined into a composite substrate map. The substrate patterns are weighted. The composite substrate map is compared to the raw substrate map, and a degree of correlation between the composite substrate map and the raw substrate map is determined. The steps are iteratively repeated until the degree of correlation is at least a desired degree, and the weighted subset of substrate patterns is output as the component patterns of the raw substrate map.
1. A method for determining component patterns of a raw substrate map, the method comprising the steps of:
a) selecting a subset of substrate patterns from a set of substrate patterns,
b) combining the subset of substrate patterns into a composite substrate map,
c) weighting the substrate patterns in the subset of substrate patterns,
d) comparing the composite substrate map to the raw substrate map,
e) determining a degree of correlation between the composite substrate map and the raw substrate map,
f) iteratively repeating steps a through e until the degree of correlation is at least a desired value, and
g) outputting the weighted subset of substrate patterns as the component patterns of the raw substrate map.
2. The method of claim 1 , wherein the set of substrate patterns includes at least one of cross exposure field, radial dependency, donut, edge ring, center spot, right to left gradient, top to bottom gradient, angled top to bottom gradient, and angled bottom to top gradient.
3. The method of claim 1 , wherein the comparison between the composite substrate map and the raw substrate map is a manual visual comparison.
4. The method of claim 1 , wherein the comparison between the composite substrate map and the raw substrate map is an automated mathematical comparison.
5. The method of claim 1 , wherein the method is performed without user intervention on a computer.
6. The method of claim 1 , wherein the raw substrate map is created by:
collecting sets of substrate data,
normalizing a value scale of the sets of substrate data,
normalizing a location scale of the sets of substrate data, and
combining the normalized sets of substrate data into the raw substrate map.
7. The method of claim 6 , wherein the location scale comprises x-y coordinates on the substrate.
8. The method of claim 1 , further comprising the step of ranking the component patterns according to their degree of influence.
9. The method of claim 8 , wherein the degree of influence of each of the component patterns is based at least in part on the weighting used for each of the component patterns.
10. The method of claim 1 , further comprising the step of associating the component patterns to processing problems.
11. The method of claim 10 , further comprising the step of correcting the processing problems associated with the component patterns.
12. A method for ranking degrees of influence of component patterns on a raw substrate map, the method comprising the steps of:
a) collecting sets of substrate data,
b) normalizing a value scale of the sets of substrate data,
c) normalizing a location scale of the sets of substrate data,
d) combining the normalized sets of substrate data into the raw substrate map,
e) selecting a subset of substrate patterns from a set of substrate patterns,
f) combining the subset of substrate patterns into a composite substrate map,
g) weighting the substrate patterns in the subset of substrate patterns,
h) comparing the composite substrate map to the raw substrate map,
i) determining a degree of correlation between the composite substrate map and the raw substrate map,
j) iteratively repeating steps e through i until the degree of correlation is at least a desired degree,
k) outputting the weighted subset of substrate patterns as the component patterns of the raw substrate map, and
l) ranking the component patterns according to their degrees of influence.
13. The method of claim 12 , wherein the location scale comprises x-y coordinates on the substrate.
14. The method of claim 12 , further comprising the step of ranking the component patterns according to their degree of influence.
15. The method of claim 12 , wherein the degree of influence of each of the component patterns is based at least in part on the weighting used for each of the component patterns.
16. The method of claim 12 , further comprising the step of associating the component patterns to processing problems.
17. The method of claim 16 , further comprising the step of correcting the processing problems associated with the component patterns.
18. The method of claim 12 , wherein the set of substrate patterns includes at least one of cross exposure field, radial dependency, donut, edge ring, center spot, right to left gradient, top to bottom gradient, angled top to bottom gradient, and angled bottom to top gradient.
19. The method of claim 12 , wherein the comparison between the composite substrate map and the raw substrate map is an automated mathematical comparison.
20. A method for constructing a synthetic substrate map without using actual substrate processing data, the method comprising the steps of:
a) selecting a subset of substrate patterns from a set of substrate patterns,
b) combining the subset of substrate patterns into a composite substrate map,
c) weighting the substrate patterns in the subset of substrate patterns,
d) selectively adding noise to the composite substrate map, and
e) outputting the weighted subset of substrate patterns as the synthetic substrate map.