High dielectric constant materials
View Patent ↗A capacitor ( 10 ) includes a substrate ( 12 ) and two metal electrodes ( 14, 18 ). A dielectric layer ( 16 ) is formed between the electrodes. Preferably, the dielectric layer has a dielectric constant greater than 25 and an adequate conduction band offset with silicon. Exemplary embodiments proposed use the following material systems: Hf u Ti v Ta w O x N y , Hf u Ti v O x N y , Ti u Sr v O x N y , Ti u Al v O x N y and Hf u Sr v O x N y (where u, v, w, x, and y are the atomic proportions of the elements in the dielectric stack).
1. A capacitor comprising:
a first capacitor plate;
a second capacitor plate; and
a capacitor dielectric between the first capacitor plate and the second capacitor plate, the capacitor dielectric including a combination of materials, the combination selected from the group consisting of:
(a) Hf u Ti v O x N y , wherein 0<u<60, 0<v<60, 0<x<50, 0<y<50, and u+v+x+y is essentially 100;
(b) Hf u Ti v Ta w O x N y , wherein 0<u<60, 0<v<60, 0<w<60, 0<x<50, 0<y<50, and u+v+w+x+y is essentially 100;
(c) Ti u Sr v O x N y , wherein 0<u<60, 0<v<60, 0<x<50, 0<y<50, and u+v+x+y is essentially 100;
(d) Ti u Al v O x N y , wherein 0<u<60, 0<v<60, 0<x<50, 0<y<50, and u+v+x+y is essentially 100; and
(e) Hf u Sr v O x N y , wherein 0<u<60, 0<v<60, 0<x<50, 0<y<50, and u+v+x+y is essentially 100.
2. The capacitor of claim 1 wherein the first capacitor plate comprises a semiconductor material.
3. The capacitor of claim 2 wherein the first capacitor plate further comprises a metal.
4. The capacitor of claim 3 wherein the first capacitor plate comprises titanium silicide.
5. The capacitor of claim 1 wherein the first capacitor plate comprises a metal and the second capacitor plate comprises a metal.
6. The capacitor of claim 1 wherein the capacitor dielectric includes Hf, Ti, O and N.
7. The capacitor of claim 6 wherein the capacitor dielectric further includes Ta.
8. The capacitor of claim 1 wherein the capacitor dielectric includes Ti, Sr, O and N.
9. The capacitor of claim 1 wherein the capacitor dielectric includes Ti, Al, O and N.
10. The capacitor of claim 1 wherein the capacitor dielectric includes Hf, Sr, O and N.
11. A method of forming a semiconductor device, the method comprising:
providing a semiconductor substrate;
forming a first layer of a first material to a thickness of less than 10 nm over the semiconductor substrate, the first material having a dielectric constant greater than 30, wherein the first material comprises TiO 2 ;
forming a second layer of a second material to a thickness of less than 10 nm over the semiconductor substrate, the second material having a conduction band offset to silicon greater than 1.5 eV;
forming a third layer of the first material to a thickness of less than 10 nm over the semiconductor substrate;
forming a fourth layer of the second material to a thickness of less than 10 nm over the semiconductor substrate, wherein the first, second, third and fourth layers are formed to create a dielectric from alternating layer of the first material and the second material, and wherein the second material comprises HfO 2 ; and
forming a layer of a third material adjacent a layer of the first material or a layer of the second material, the third material comprising Hf 3 N 4 .
12. The method of claim 11 and further comprising forming a layer of a fourth material adjacent a layer of the first material or a layer of the second material, the fourth material comprising Ta 2 O 5 .
13. The method of claim 11 wherein the first layer of the first material is formed over a first conductor.
14. The method of claim 13 wherein the first layer of the first material is formed over a metal electrode that overlies the semiconductor substrate.
15. The method of claim 13 and further comprising forming a second conductor over the second layer of the second material, such that the first conductor forms a first plate of a capacitor and the second conductor forms a second plate of the capacitor.
16. The method of claim 11 wherein the first layer is formed before the second layer, the second layer is formed before the third layer, and the third layer is formed before the fourth layer.
17. The method of claim 11 further comprising annealing the first layer of first material, the third layer of first material, the second layer of second material and the second layer of second material.
18. The method of claim 17 wherein the anneal forms a mixed compound of the first material and the second material.
19. A method of forming a semiconductor device, the method comprising:
providing a semiconductor substrate;
forming a first layer of a first material to a thickness of less than 10 nm over the semiconductor substrate, the first material having a dielectric constant greater than 30, wherein the first material comprises TiO 2 ;
forming a second layer of a second material to a thickness of less than 10 nm over the semiconductor substrate, the second material having a conduction band offset to silicon greater than 1.5 eV; wherein the second material comprises Hf 3 N 4 ;
forming a third layer of the first material to a thickness of less than 10 nm over the semiconductor substrate; and
forming a fourth layer of the second material to a thickness of less than 10 nm over the semiconductor substrate, and
wherein the first, second, third and fourth layers are formed to create a dielectric from alternating layers of the first material and the second material.
20. The method of claim 19 further comprising forming a layer of a fourth material adjacent a layer of the first material or a layer of the second material, the fourth material comprising Ta 2 O 5 .
21. A method of forming a semiconductor device, the method comprising:
providing a semiconductor substrate;
forming a first layer of a first material to a thickness of less than 10 nm over the semiconductor substrate, the first material having a dielectric constant greater than 30, wherein the first material comprises TiO 2 ;
forming a second layer of a second material to a thickness of less than 10 nm over the semiconductor substrate, the second material having a conduction band offset to silicon greater than 1.5 eV;
forming a third layer of the first material to a thickness of less than 10 nm over the semiconductor substrate;
forming a fourth layer of the second material to a thickness of less than 10 nm over the semiconductor substrate, wherein the first, second, third and fourth layers are formed to create a dielectric from alternating layers of the first material and the second material; and
forming a layer of a third material adjacent a layer of the first material or a layer of the second material, the third material comprising Hf 3 N 4 .
22. The method of claim 21 wherein the second material comprises SrO.
23. The method of claim 21 wherein the second material comprises Al 2 O 3 .
24. The method of claim 21 wherein the second material comprises HfO 2 .