Semiconductor memory device and manufacturing method thereof
View Patent ↗A polysilicon film and the like are patterned to form n − diffusion layers on a silicon substrate. Subsequently, an outer edge of an Al 2 O 3 film is made retreat to be smaller than that of a gate electrode by performing isotropic etching of the Al 2 O 3 film, using a solution of sulfuric acid with hydrogen peroxide. A silicon oxide film, a silicon nitride film, the polysilicon film and the like are hardly removed although the solution of sulfuric acid with hydrogen peroxide exhibits higher etching rate to the Al 2 O 3 film, enabling almost exclusive etching of the Al 2 O 3 film at a high selectivity ratio. Subsequently, another polysilicon film is formed so as to fill spaces formed after the retreat of the Al 2 O 3 film under the silicon oxide film. Subsequently, a sidewall insulating film is formed by remaining portions of the later polysilicon film in the spaces by performing RIE, oxidation, or the like of the later polysilicon film.
1. A manufacturing method of a semiconductor memory device comprising the steps of:
forming a tunnel insulating film on a semiconductor substrate;
forming sequentially an Al 2 O 3 film, an insulating film, and a material film of a gate electrode on the tunnel insulating film;
forming a gate electrode by processing the material film of the gate electrode, the insulating film, and the Al 2 O 3 film into a planar shape of the gate electrode;
making a retreat of an outer edge of the Al 2 O 3 film to be smaller than an outer edge of the gate electrode by performing isotropic etching to the Al 2 O 3 film so as to form a pair of spaces under the insulating film;
forming charge storage layers respectively in the pair of spaces; and
forming a source region and a drain region sandwiching the gate electrode in plain view, as a pair, on a surface of the semiconductor substrate.
2. The manufacturing method of the semiconductor memory device according to claim 1 , wherein
isotropic etching of the Al 2 O 3 film is performed using a solution of sulfuric acid with hydrogen peroxide during the step of performing isotropic etching to the Al 2 O 3 film.
3. The manufacturing method of the semiconductor memory device according to claim 1 , wherein
a polycrystalline silicon film is formed as the charge storage layers.
4. The manufacturing method of the semiconductor memory device according to claim 1 , wherein
said step of forming the charge storage layers comprises the steps of:
forming a polycrystalline silicon film all over surface; and
making the polycrystalline silicon film remain in the spaces and forming a sidewall composed of the polycrystalline silicon film over side surfaces of the gate electrode and the insulating film by performing anisotropic etching to the polycrystalline silicon film.
5. The manufacturing method of the semiconductor memory device according to claim 4 , wherein
said step of forming the charge storage layers comprises a step of oxidizing the sidewall after the step of performing anisotropic etching to the polycrystalline silicon film.
6. The manufacturing method of the semiconductor memory device according to claim 1 , wherein
said step of forming the charge storage layers comprises the steps of:
forming a polycrystalline silicon film all over surface; and
making the polycrystalline silicon film remain only in the spaces by performing anisotropic etching to the polycrystalline silicon film.
7. The manufacturing method of the semiconductor memory device according to claim 6 , wherein
said step of forming the charge storage layers comprises the steps of:
forming an insulating film for a sidewall all over surface; and
forming a sidewall insulating film over side surfaces of the gate electrode and the insulating film by etching back the insulating film for the sidewall, after the step of performing anisotropic etching to the polycrystalline silicon film.
8. The manufacturing method of the semiconductor memory device according to claim 1 , wherein
the tunnel insulating film has a thickness of 3 nm to 9 nm.
9. The manufacturing method of the semiconductor memory device according to claim 1 , wherein
the Al 2 O 3 film and the pair of charge storage layers have a thickness of 5 nm to 15 nm.
10. The manufacturing method of the semiconductor memory device according to claim 2 , wherein
the tunnel insulating film has a thickness of 3 nm to 9 nm.
11. The manufacturing method of the semiconductor memory device according to claim 2 , wherein
the Al 2 O 3 film and a pair of charge storage layers have a thickness of 5 nm to 15 nm.