Granted Patent B1

US 7,129,732 · App. 11/281,456 · Granted Oct 31, 2006

Abstract

Claims (25)

1. An apparatus for testing at least one substrate, said apparatus comprising:

a housing including first and second chambers, said second chamber located above said first chamber and adapted for having cooling fluid pass there-through;

at least one test fixture positioned substantially within said first chamber and adapted for holding at least one test substrate having a plurality of conductive thru-holes therein within said first chamber, said at least one test fixture adapted for being electrically coupled to said at least one test substrate within said first chamber;

cooling structure for directing said cooling fluid from said second chamber onto said at least one test fixture and said at least one test substrate when said at least one test fixture is holding said at least one test substrate so as to cool said at least one substrate to a first test temperature lower than normal ambient room temperature within said first chamber, said cooling structure including a fan located within said first chamber for drawing said cooling fluid from said second chamber and onto said at least one test fixture and said at least one test substrate;

electrical supply means for supplying electrical current to said test fixture and said plurality of thru-holes within said at least one test substrate to heat said test substrate to a second test temperature greater than said first test temperature; and

a test system for testing said at least one test substrate within said at least one test fixture when said electrical supply means supplies said electrical current to said at least one test fixture and said plurality of thru-holes within said at least one test substrate.

2. The apparatus of claim 1 wherein said test fixture includes first and second grip portions for gripping said at least one test substrate there-between, said second grip portion being electrically coupled to said at least one test substrate.

3. The apparatus of claim 2 wherein said second grip portion includes a plurality of spring contacts as part thereof, said spring contacts adapted for being electrically coupled to respective ones of said plurality of said thru-holes of said at least one test substrate.

4. The apparatus of claim 1 wherein said housing includes a panel, said apparatus further including a movable cover member adapted for substantially covering said at least one test substrate when said fan of said cooling structure directs said cooling fluid onto said test fixture and said at least one test substrate, said movable cover concentrating said cooling fluid in an area between said movable cover and said panel of said housing.

5. The apparatus of claim 1 wherein said electrical supply means for supplying electrical current to said test fixture and said plurality of thru-holes within said at least one test substrate to heat said test substrate comprises a power supply.

6. The apparatus of claim 1 wherein said test system comprises said electrical supply means for supplying electrical current to said at least one test fixture and said plurality of thru-holes within said at least one test substrate to heat said at least one test substrate, voltage sensing devices for measuring the voltage across said at least one test substrate when said electrical supply means supplies said electrical current to said at least one test substrate, a computer, and software for said computer adapted for being programmed according to established test substrate temperatures, test substrate voltage readings and other information relating to said test substrates.

7. The apparatus of claim 1 wherein said first test temperature is within the range of from about −65 degrees Celsius to about 150 degrees Celsius.

8. The apparatus of claim 1 further including at least one thermocouple adapted for being positioned on or near said at least one test substrate to measure the temperature of said at least one test substrate when said electrical supply means supplies said electrical current to said test fixture and said plurality of thru-holes within said at least one test substrate to heat said at least one test substrate.

9. The apparatus of claim 1 wherein said cooling structure for directing cooling fluid onto said at least one test fixture when said at least one test fixture is holding said at least one test substrate so as to cool said substrate to a first test temperature lower than said normal ambient room temperature within said first chamber further comprises refrigeration tubing located substantially within said second chamber of said housing for cooling said cooling fluid when said cooling fluid passes through said second chamber.

10. A method of testing at least one substrate, said method comprising:

positioning at least one test substrate having a plurality of conductive thru-holes therein within a test fixture positioned substantially within a first chamber of a housing including first and second chambers wherein said second chamber is located above said first chamber and is adapted for having cooling fluid pass therethrough;

electrically coupling said plurality of conductive thru-holes within said at least one test substrate to said test fixture within said first chamber of said housing;

directing said cooling fluid from said second chamber onto said at least one test fixture and said at least one test substrate within said first chamber when said at least one test substrate is positioned within said at least one test fixture so as to cool said at least one test substrate to a first test temperature lower than normal ambient room temperature within said first chamber of said housing;

supplying electrical current to said test fixture and said plurality of thru-holes within said at least one test substrate to heat said test substrate to a second test temperature greater than said first test temperature; and

testing said at least one test substrate within said at least one test fixture when said electrical supply means supplies said electrical current to said at least one test fixture and said plurality of thru-holes within said at least one test substrate.

11. The method of claim 10 wherein said electrically coupling of said plurality of conductive thru-holes within said at least one test substrate to said at least one test fixture within said first chamber of said housing is accomplished using a plurality of spring contacts.

12. The method of claim 10 wherein said directing of said cooling fluid onto said test fixture and onto said at least one test substrate when said at least one test substrate is positioned within said test fixture so as to cool said at least one test substrate to a first test temperature lower than the ambient temperature surrounding said housing is accomplished using a fan positioned within said first chamber.

13. The method of claim 12 wherein said directing of said cooling fluid onto said test fixture and onto said at least one test substrate when said at least one test substrate is positioned within said at least one test fixture so as to cool said at least one test substrate to a first test temperature lower than said normal ambient room temperature within said first chamber is further accomplished using refrigeration tubing located substantially within said second chamber of said housing for cooling said cooling fluid when said cooling fluid passes through said second chamber.

14. The method of claim 10 wherein said supplying of said electrical current to said at least one test fixture and said plurality of thru-holes within said at least one test substrate to heat said at least one test substrate is accomplished using a power supply.

15. The method of claim 10 wherein said testing said at least one test substrate includes measuring the voltage across said at least one test substrate when said electrical supply means supplies said electrical current to said at least one test substrate.

Assignments (14)