Granted Patent B2

US 8,216,370 · App. 11/300,660 · Granted Jul 10, 2012

Abstract

Claims (27)

1. A method for removing one or more defects and/or relieving strain in a non-diamond crystal, the method comprising the steps of:

placing at least one non-diamond crystal in a sealable vessel or capsule;

adding a substance to the sealable vessel or capsule that is capable of transforming to a supercritical fluid under pre-determined process conditions;

sealing the sealable vessel or capsule;

heating the sealable vessel or capsule to pre-determined process conditions, including a temperature above about 550 degrees Celsius and a pressure between about 0.2 GPa and about 8 GPa, wherein the substance becomes a supercritical fluid at said pre-determined process conditions and surrounds the at least one non-diamond crystal, and maintaining the at least one non-diamond crystal at the pre-determined process conditions for a sufficient amount of time to remove one or more defects and/or relieve strain in the at least one non-diamond crystal; and

removing at least one improved non-diamond crystal from the sealable vessel or capsule.

2. The method of claim 1 further comprising the step of placing the sealed capsule in a high pressure apparatus, wherein the capsule is formed from a deformable material and is fluid impermeable and chemically inert with respect to the at least one non-diamond crystal and the supercritical fluid under the predetermined process conditions.

3. The method of claim 2 wherein the high pressure apparatus is selected from one of an autoclave, a piston cylinder press, a belt press, a multi-anvil press, a toroidal press, and a zero-stroke high pressure apparatus.

4. The method of claim 1 further comprising the step of embedding the at least one non-diamond crystal in a glass that is molten under the pre-determined process conditions, wherein the glass is chemically inert with respect to the at least one non-diamond crystal and the supercritical fluid under the predetermined process conditions.

5. The method of claim 4 , wherein the glass is selected to be one or more of Li 2 O, Na 2 O, K 2 O, MgO, CaO, SrO, BaO, B 2 O 3 , Al 2 O 3 , Ga 2 O 3 , In 2 O 3 , SiO 2 , GeO 2 , SnO x , PbO x , a phosphate glass, a fluoride glass, a nitride glass, and compounds or mixtures thereof.

6. The method of claim 1 wherein the substance comprises ammonia.

7. The method of claim 1 wherein the non-diamond crystal crystal is selected from one of a direct bandgap semiconductor material; an indirect bandgap semiconductor material; a wide bandgap semiconductor material; a scintillator material; a nonlinear optical material; a laser material, a relaxor ferroelectric material; and a piezoelectric material.

8. The method of claim 1 wherein the at least one non-diamond crystal is selected from among 6H—SiC, 4H—SiC, 15R—SiC, 3C—SiC, 8H—SiC, 2H—SiC, silicon (Si), germanium (Ge), cubic boron nitride (cBN), gallium antimonide (GaSb), aluminum nitride (AlN), bismuth antimonide (Bi x Sb 1-x ), gallium arsenide (GaAs), gallium phosphide (GaP), gallium indium phosphide (GaInP), aluminum indium phosphide (AlInP), indium aluminum arsenide (InAlAs), aluminum gallium antinomide (AlGaSb), indium aluminum gallium arsenide (InAlGaAs), aluminum indium gallium phosphide (AlInGaP), aluminum gallium arsenide (AlGaAs), indium gallium arsenide phosphide (InGaAsP), gallium selenide (GaSe), indium phosphide (InP), indium selenide (InSe and InSe 2 ), indium antimonide (InSb), cadmium phosphide (Cd 3 P 2 ), cadmium indium sulphide (CdIn 2 S 4 ), cadmium silicon arsenide (CdSiAs 2 ), cadmium tin phosphide (CdSnP 2 ), zinc oxide (ZnO), zinc selenide (ZnSe), zinc telluride (ZnTe), cadmium sulphide (CdS), cadmium zinc selenide (CdZnSe), beryllium zinc cadmium selenide (BeZnCdSe), zinc cadmium magnesium selenide (ZnCdMgSe), zinc sulphur selenide (ZnSSe), beryllium zinc selenide (BeZnSe), beryllium magnesium zinc selenide (BeMgZnSe), cadmium telluride (CdTe), cadmium zinc telluride (Cd x Zn 1-x Te), mercury cadmium telluride (HgCdTe), lead sulphide (PbS), lead telluride (PbTe), lead selenide (PbSe), lead tin telluride (PbSnTe), lead germanium telluride (PbGeTe), lead europium telluride (PbEuTe), lead europium selenide (PbEuSe), lead cadmium sulphide (PbCdS), lead europium selenium telluride (PbEuSeTe), lead sulphur selenide (PbSSe), lithium triborate (LiB 3 O 5 or LBO), yttrium orthovandate (YVO 4 ), potassium titanyl phosphate (KTiOPO 4 or KTP), potassium niobate (KnbO 3 or KN), cesium lithium borate (CsLiB 6 O 10 or CLBO), LiCaAlF 6 (LiCAF), LiSrAlF 6 (LiSAF), lead zirconate titanate (Pb(Zr x Ti 1-x )O 3 or PZT), lead magnesium niobate (Pb(Mg 1/3 Nb 2/3 )O 3 or PMN), lead zirconate niobate (Pb(Zr 1/3 Nb 2/3 )O 3 or PZN), bismuth silicon oxide (BSO), barium titanate (BTO), lead magnesium niobate titanate (Pb(Mg x/3 Nb 2x/3 Ti 1-x )O 3 or PMNT), lead zirconate niobate titanate (Pb(Zr x/3 Nb 2x/3 Ti 1-x )O 3 or PZNT), strontium hafnate (SrHfO 3 ) and barium hafnate (BaHfO 3 ), rare earth lanthanide-ion laser crystals with matrices of silica, silicates and fluorozirconates, lasers crystals based on matrices of KCl, RbCl, NaCl, CuCl, CsI, CaF 2 , ZnF 2 , MgF 2 , SrF 2 , MnF 2 , ZnS, ZnSe, CaF 2 , ErF 3 , KI, RbCaF 3 , LiNbO 3 , KMgF 3 , Ca 2 PO 4 Cl, CaGd 2 (SiO 4 ) 3 O, LaCl 3 , LiYF 4 , LaF 3 , Y 3 Al 5 O 12 , LiYF 4 , LuAlO 3 , YAlO 3 , Gd 3 Ga 5 O 12 , CaF 2 —ErF 3 , Er 3 Al 5 O 12 , Lu 3 Al 5 O 12 , BaYb 2 F 8 , NaF, LIF, sapphire, alexandrite, forsterite, BaF 2 , BaY 2 F 8 , BaEr 2 F 8 , RbBr, Li 2 GeO 3 , Y 2 O 3 , Er 2 O 3 , YVO 4 , GdAlO 3 , Y 3 Sc 2 Ga 3 O 12 , NaCaErF 6 , CaWO 4 , or CaMoO 4 .

9. The method of claim 1 wherein the at least one non-diamond crystal comprises GaN and the substance comprises ammonia.

10. The method of claim 1 , wherein the pressure in the pre-determined process conditions is at least 0.5 GPa.

11. The method of claim 1 , further comprising forming an epitaxial layer on the improved crystal.

12. The method of claim 1 , further comprising incorporating at least a portion of the improved crystal into a semiconductor device.

13. The method of claim 12 , wherein the semiconductor device comprises a light emitting diode (LED), a laser diode, a photodetector, a filter, a transistor, a rectifier, a thyristor, a light amplifier, an emitter, a detector, a diode, a switch, a solar cell, or an optically bistable device.

14. A method for removing one or more defects and/or relieving strain in an amorphous material, the method comprising the steps of:

placing an amorphous material selected from one of glass, plastic, or metal in a sealable vessel or capsule;

adding a substance to the sealable vessel or capsule that is capable of transforming to a supercritical fluid under pre-determined process conditions;

sealing the sealable vessel or capsule;

heating the sealable vessel or capsule to a temperature above about 550 degrees Celsius, wherein the substance becomes a supercritical fluid at a pressure between about 0.2 GPa and about 8 GPa and surrounds the at least one non-diamond crystal, and maintaining the at least one non-diamond crystal at this temperature for a sufficient amount of time to remove one or more defects and/or relieve strain in the amorphous material; and

removing an improved amorphous or crystalline material from the sealable vessel or capsule.

15. The method of claim 14 further comprising the step of placing the sealed capsule in a high pressure apparatus, wherein the capsule is formed from a deformable material and is fluid impermeable and chemically inert with respect to the amorphous material and the supercritical fluid under the predetermined process conditions.

16. The method of claim 15 wherein the high pressure apparatus is selected from one of an autoclave, a piston cylinder press, a belt press, a multi-anvil press, a toroidal press, and a zero-stroke high pressure apparatus.

17. The method of claim 14 wherein the substance comprises ammonia.

Assignments (26)