System for testing semiconductors
View Patent ↗A semiconductor testing system that includes an plural imaging devices for capturing plural video sequences from a single optical path and concurrently displaying the video sequences for effectively positioning a probe for testing a semiconductor wafer.
1. A probing system for a device under test comprising:
(a) an objective lens, light illuminating said device under test traversing a single optical path extending through said objective lens;
(b) a first imaging device sensing a first video sequence of said device under test at a first magnification from said single optical path;
(c) a second imaging device sensing a second video sequence of said device under test at a second magnification from said single optical path;
(d) a third imaging device sensing a third video sequence of said device under test at a third magnification from said single optical path;
(e) providing a video signal to a display that simultaneously presents said first video sequence, said second video sequence, and said third video sequence to a monitor.
2. The probing system of claim 1 wherein said first video sequence is presented in a first window, said second video sequence is presented in a second window, and said third video sequence is presented in a third window.
3. A probing system for a device under test comprising:
(a) an objective lens, light illuminating said device under test traversing a single optical path extending through said objective lens;
(b) a first imaging device sensing a first video sequence of said device under test at a first selectable magnification from said single optical path;
(c) a second imaging device sensing a second video sequence of said device under test at a second selectable magnification from said single optical path;
(d) simultaneously providing said first video sequence, and said second video sequence, to a display.
4. The probing system of claim 3 wherein said magnification of said first video sequence includes a range of at least 5% of the total range of magnification that is not selectable by a user.
5. A probing system for a device under test comprising:
(a) an objective lens, light illuminating said device under test traversing a single optical path extending through said objective lens;
(b) an imaging device sensing a video sequence of said device under test at a first magnification from said single optical path; and
(c) a display displaying the video sequence in a first window; said display concurrently displaying a region of said first video sequence in a second window.
6. The probing system of claim 1 wherein said video displayed in said second window is from another imaging device at a second magnification from said single optical path.
7. A method for displaying video for a probing system comprising:
(a) receiving a video sequence of a device under test, said video sequence comprising a plurality of frames sequentially presented at a frame rate, a frame comprising an image of a portion of said device under test;
(b) presenting said video sequence in a first window on a display;
(c) concurrently presenting a first portion of said video sequence in a second window on a portion of said display, said first portion of said video sequence comprising first portions of a plurality of said sequentially presented images, said first portions being selectable; and
(d) concurrently presenting a second portion of said video sequence in a third window on a portion of said display, said second portion of said video sequence comprising second portions of a plurality of said sequentially presented images, said second portions being selectable.
8. The method of claim 7 further comprising presenting a third portion of said video sequence in a fourth window, a fourth portion of said video sequence in a fifth window, a fifth portion of said video sequence in a sixth window, a fifth portion of said video sequence in a sixth window, and a sixth portion of said video sequence in a seventh window.
9. The method of claim 8 wherein said second, third, fourth, fifth, sixth, and seventh windows are arranged in a 2×3 format.
10. The method of claim 8 wherein said second, third, fourth, fifth, sixth, and seventh windows are arranged in a 3×2 format.
11. The method of claim 8 wherein said second, third, fourth, fifth, sixth, and seventh windows are arranged in a 1×3 format.
12. The method of claim 8 wherein said second, third, fourth, fifth, sixth, and seventh windows are arranged in a 3×1 format.