Granted Patent B2

US 7,511,294 · App. 11/346,571 · Granted Mar 31, 2009

Abstract

Claims (27)

1. A resistive memory element for reversibly switching between a high-resistance OFF state and a low-resistance ON state, the resistive memory element comprising:

a reactive electrode;

an inert electrode;

a solid electrolyte arranged between the reactive and inert electrodes; and

a nanoparticle structure arranged on the inert electrode, wherein the nanoparticle structure is formed of a plurality of nanoparticles that are arranged at a distance and are separated from each other so as to define openings within the nanoparticle structure between the nanoparticles through which the solid electrolyte makes contact with the inert electrode, and the openings within the nanoparticle structure have a defined average size.

2. The resistive memory element of claim 1 , wherein the average size of the openings in the nanoparticle structure is in the range of about 3 nm to about 15 nm.

3. The resistive memory element of claim 1 , wherein an average size of the nanoparticles equals the average size of the openings in the nanoparticle structure.

4. The resistive memory element of claim 1 , wherein the nanoparticle structure comprises an electrically insulating material.

5. The resistive memory element of claim 4 , wherein the nanoparticles comprise an oxide.

6. The resistive memory element of claim 1 , wherein the nanoparticle structure has a layer thickness in the range of about 2.5 nm to about 5 nm.

7. The resistive memory element of claim 1 , wherein the solid electrolyte comprises at least one alloy including at least one chalcogen selected from the group consisting of Ag—S, Ag—Se, Ni—S, Cr—S, Co—S, Te—S, Te—Se, Ge—S, GeSe, Cu—S and Cu—Se.

8. The resistive memory element of claim 1 , wherein the solid electrolyte comprises at least one porous metal oxide selected from the group consisting of Al—O x , WO x , and TiO x .

9. The resistive memory element of claim 1 , wherein the reactive electrode comprises at least one metal selected from the group consisting of Cu, Ag, Al, Au, Ni, Cr, V, Ti and Zn.

10. The resistive memory element of claim 1 , wherein the inert electrode comprises at least one material from the group consisting of W, Mo, Ti, Ta, TiN, doped Si and Pt.

11. The resistive memory element of claim 1 , wherein the solid electrolyte is doped with at least one metal.

12. The resistive memory element of claim 11 , wherein the metal used for doping the solid electrolyte is the same metal that forms the reactive electrode.

13. A method for fabricating a resistive memory element comprising:

applying a first inert electrode material to a substrate and patterning the inert electrode material to form an inert electrode;

applying a solution containing nanoparticles to the inert electrode and drying the solution to form a self-assembled nanoparticle structure on the inert electrode, wherein the nanoparticle structure is formed of a plurality of nanoparticles that are arranged at a distance and are separated from each other so as to define openings within the nanoparticle structure between the nanoparticles;

depositing a solid electrolyte on the nanoparticle structure and within the openings; and

depositing a reactive electrode material on the solid electrolyte and patterning the reactive electrode material to form a reactive electrode.

14. A memory cell arrangement including at least one memory cell comprising the resistive memory element of claim 1 .

15. The resistive memory element of claim 1 , wherein the nanoparticles comprise zinc.

16. The method of claim 13 , wherein the nanoparticles comprise zinc.

17. The method of claim 13 , wherein the solution containing nanoparticles which is applied to the inert electrode comprises a copolymer and a metal.

18. The method of claim 17 , wherein the metal comprises zinc.

19. The method of claim 17 , wherein the copolymer is formed from polynorborene.

Assignments (11)