Semiconductor device having trench charge compensation regions and method

1. A semiconductor device comprising:

a region of semiconductor material having a first major surface;

a trench compensation region formed in the region of semiconductor material extending from the first major surface, wherein the trench compensation region comprises a plurality of opposite conductivity type semiconductor layers;

a body region formed in the region of semiconductor material;

a source region formed in the body region and laterally spaced apart from the trench compensation region;

a gate structure formed between the source region and trench compensation region, wherein the gate structure includes a conductive gate region configured to establish a channel region in the body region when the device is in operation;

a channel connecting region formed at an upper portion of the trench compensation region configured to electrically connect the channel region to the trench compensation region when the device is in operation; and

a doped region extending laterally from the trench compensation region into the region of semiconductor material and below the body region, wherein the doped region and body region comprise a first conductivity type, and wherein the channel connecting region comprises a second and opposite conductivity type.

2. The device of claim 1 wherein the region of semiconductor material and the body region comprise the same conductivity type.

3. The device of claim 1 wherein the region of semiconductor material and the body region comprise opposite conductivity types.

4. The device of claim 1 wherein the trench is filled with a plurality of single crystal epitaxial layers including:

a first layer of a first conductivity type formed overlying sidewalls and a lower surface of the trench; and

a second layer of a second and opposite conductivity type formed overlying the first layer.

5. The device of claim 4 further comprising a first buffer layer formed between the first and second layers, wherein the buffer layer has a lower dopant concentration than the first and second layers when deposited.

6. The device of claim 1 further comprising a lightly doped source region formed between the source region and conductive gate region.

7. The device of claim 1 further comprising a lightly doped drain region formed between the channel connecting region and the conductive gate region.

8. The device of claim 1 , wherein the region of semiconductor material comprises a semiconductor substrate and a semiconductor layer formed overlying the semiconductor substrate and having a lower dopant concentration than the semiconductor substrate.

9. The device of claim 8 , wherein the semiconductor substrate and the semiconductor layer have opposite conductivity types.

10. The device of claim 8 , wherein the semiconductor layer has a graded doping profile.

11. The device of claim 8 , wherein the trench compensation region extends through the semiconductor layer into the semiconductor substrate.

12. The device of claim 8 , wherein the trench compensation region terminates within the semiconductor layer, and wherein the device further comprises a doped region formed adjacent a lower surface of the trench compensation region and configured to electrically couple the trench compensation region to the semiconductor substrate when the device is in operation.

13. A method for forming a semiconductor device comprising the steps of:

providing a region of semiconductor material having a first major surface;

forming a trench in the region of semiconductor material extending from the first major surface;

forming a plurality of semiconductor layers within the trench including at least two opposite conductivity type semiconductor layers, and at least one buffer layer separating the at least two opposite conductivity type semiconductor layers to form a filled trench compensation region, wherein the buffer layer has a lower dopant concentration less than the at least two opposite conductivity type semiconductor layers at formation;

forming a control electrode overlying the first major surface and laterally separated from the filled trench compensation region, the control electrode configured to form a channel in the region of semiconductor material during operation;

forming a first doped region at least partially within the filled trench compensation region configured to electrically couple the channel region to the filled trench compensation region during operation; and

forming a second doped region extending laterally from the trench compensation region into the region of semiconductor material, wherein the second doped region comprises a first conductivity type, and wherein the first doped region comprises a second and opposite conductivity type.

14. The method of claim 13 , wherein the step of forming the plurality of semiconductor layers comprises the steps of:

forming a first layer of a first conductivity type overlying sidewall and lower surfaces of the trench;

forming a first buffer layer overlying the first layer;

forming a second layer of a second conductivity type overlying the buffer layer;

forming a second buffer layer overlying the second layer, wherein the first and second buffer layers have lower dopant concentrations than the first and second layers at formation; and

filling a remaining portion of the trench with a dielectric material.

15. The method of claim 14 further comprising the steps of:

forming a cap layer on the first layer before forming the first buffer layer;

diffusing dopant from the first layer into the region of semiconductor material to form a second doped region of the first conductivity type; and

removing the cap layer.

16. The method of claim 13 , wherein the step of providing the region of semiconductor material includes providing a semiconductor substrate of a first conductivity type and having a semiconductor layer formed overlying the semiconductor substrate, and wherein the method further includes the steps of:

forming a body region of a second conductivity type in the semiconductor layer; and

forming a source region of the first conductivity type in the body region and laterally spaced apart from the filled trench compensation region, and wherein the source region and first region are self-aligned to the control electrode.

17. The method of claim 16 further comprising the steps of:

forming a lightly doped source region adjoining the source region; and

forming a lightly doped drain region adjoining the first doped region.

18. A semiconductor superjunction device comprising:

a region of semiconductor material having a first major surface;

a trench compensation region extending into the region of semiconductor material from the first surface including a first layer of a first conductivity type overlying sidewalls and a lower surface of the trench compensation region and a second layer of a second conductivity type overlying the first layer;

a body region of the first conductivity type formed in the region of semiconductor material adjacent the trench compensation region;

a source region of the second conductivity type formed in the body region and laterally spaced apart from the trench compensation region so that the source region does not overlie the trench compensation region;

a gate structure formed overlying the first major surface and interposed between the source region and trench compensation region, wherein the gate structure is laterally spaced apart from the trench compensation region so that a portion of the body region is at the first major surface between the gate structure and trench compensation region, and wherein the gate structure is configured to form a channel in the body region when the device is in operation; and

a first doped region of the second conductivity type formed at least partially within the trench compensation region overlying the first and second layers and configured to electrically couple a drain end of the channel to the second layer when the device is in operation.

19. The device of claim 18 wherein the region of semiconductor material comprises a semiconductor substrate and a semiconductor layer formed overlying the semiconductor substrate, the device further comprising a second doped of the first conductivity type formed in the semiconductor layer and extending laterally from the trench compensation region.

20. The device of claim 19 , wherein the semiconductor layer comprises the first conductivity type.