IP Library Granted Patent US 7,888,753
Granted Patent B2
US 7,888,753 · App. 11/496,383 · Granted Feb 15, 2011

Ultra-sensitive detection techniques

Assignee: International Business Machines Corporation
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Quick Facts
Patent No.
US 7,888,753
App. No.
11/496,383
Granted
Feb 15, 2011
Kind
B2
Abstract

Techniques for ultra-sensitive detection are provided. In one aspect, a detection device is provided. The detection device comprises a source; a drain; a nanowire comprising a semiconductor material having a first end clamped to the source and a second end clamped to the drain and suspended freely therebetween; and a gate in close proximity to the nanowire.

Claims (51)

1. A detection device comprising:

a source;

a drain;

a nanowire comprising a semiconductor material having a first end clamped to the source and a second end clamped to the drain and suspended freely therebetween; and

a gate separated from the nanowire by a distance of up to about ten nanometers.

2. The device of claim 1 , wherein a length of the nanowire suspended between the source and the drain is between about 100 nanometers and about 200 nanometers.

3. The device of claim 1 , wherein the nanowire has a diameter of between about 15 nanometers and about 30 nanometers.

4. The device of claim 1 , wherein the gate has a width that is less than a length of the nanowire suspended between the source and the drain.

5. The device of claim 1 , further comprising a dielectric substrate between at least a portion of the gate and one or more of the source and the drain, wherein the dielectric substrate has a thickness of up to about ten nanometers and comprises one or more of silicon dioxide, hafnium oxide and air.

6. The device of claim 1 , wherein the nanowire comprises one or more of germanium, silicon, galliumarsenide, indiumphosphide, graphene, organic semiconductors and Pentacene.

7. The device of claim 1 , wherein at least a portion of a surface of the nanowire has at least one functional group thereon comprising one or more of an amine, a thiol and a carboxyl group.

8. The device of claim 1 , wherein at least a portion of a surface of the nanowire is charge-sensitized.

9. The device of claim 1 , wherein the nanowire is configured to actuate in response to a voltage being applied to the gate at a given frequency, wherein the given frequency equals a resonance frequency of the nanowire.

10. An integrated circuit comprising:

at least one detection device comprising:

a source;

a drain;

a nanowire comprising a semiconductor material having a first end clamped to the source and a second end clamped to the drain and suspended freely therebetween;

a gate in close proximity to the nanowire; and

at least one frequency modulation demodulator in circuit with the at least one detection device, wherein the at least one frequency modulation demodulator is configured to detect a source-drain current modulation in the at least one detection device.

11. The integrated circuit of claim 10 , further comprising:

at least one transimpedance amplifier electrically connected to the drain;

at least one bandpass filter electrically connected to the transimpedance amplifier; and

at least one automatic gain control circuit electrically connected to the bandpass filter.

12. The method of claim 10 , wherein the actuating step further comprises the steps of:

applying a voltage to the gate at a given frequency to induce a modulated electric field between the gate and the nanowire at the given frequency wherein the given frequency equals a resonance frequency of the nanowire; and

using the modulated electric field to exert a force on the nanowire at the given frequency.

13. The method of claim 10 , wherein the detecting step further comprises the steps of:

using a modulation in distance between the nanowire and the gate, brought about by actuating the nanowire, to induce a modulation of capacitance between the nanowire and the gate; and

using the modulation of capacitance between the nanowire and the gate to induce a source-drain current modulation at a given frequency, wherein the given frequency equals a resonance frequency of the nanowire.

14. A mass detection device comprising:

a source;

a drain;

a nanowire comprising a semiconductor material having a first end clamped to the source and a second end clamped to the drain and suspended freely therebetween; and

a gate separated from the nanowire by a distance of up to about ten nanometers, wherein the gate has a width that is less than a length of the nanowire suspended between the source and the drain, and wherein the nanowire is configured to actuate in response to a voltage being applied to the gate at a given frequency.

15. A molecular detection device comprising:

a source;

a drain;

a nanowire comprising a semiconductor material having a first end clamped to the source and a second end clamped to the drain, wherein at least a portion of a surface of the nanowire is charge-sensitized; and

a gate, at least a portion of which is separated from one or more of the source and the drain by a dielectric substrate, and wherein the gate is separated from the nanowire by a distance of up to about ten nanometers.

16. A method of operating a mass detection device comprising a source; a drain; a nanowire comprising a semiconductor material having a first end clamped to the source and a second end clamped to the drain and suspended freely therebetween; and a gate separated from the nanowire by a distance of up to about ten nanometers, wherein the gate has a width that is less than a length of the nanowire suspended between the source and the drain, the method comprising the steps of:

actuating the nanowire; and

detecting mechanical resonance of the nanowire.

17. A method of operating a molecular detection device comprising a source; a drain; a nanowire comprising a semiconductor material having a first end clamped to the source and a second end clamped to the drain, wherein at least a portion of a surface of the nanowire is charge-sensitized; and a gate, at least a portion of which is separated from one or more of the source and the drain by a dielectric substrate, the method comprising the steps of:

generating free electrical charge in the nanowire, rendering the nanowire conductive;

exposing the molecular detection device to an ambient containing at least one compound; and

detecting reactions between the charge-sensitized surface of the nanowire and the compound.

18. The method of claim 17 , wherein the generating step further comprises the step of:

applying a voltage to the gate to generate free electrical charge in the nanowire, wherein the voltage is greater than a threshold voltage of the nanowire.

19. The method of claim 17 , wherein the detecting step further comprises the steps of:

inducing a change in a source-drain current, the change in the source-drain current indicating the reactions between the charged-sensitized surface of the nanowire and the compound.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2015
From: GLOBALFOUNDRIES U.S. 2 LLC; GLOBALFOUNDRIES U.S. INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 036779/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2015
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 036550/0001 →
CONFIRMATORY LICENSE Recorded May 8, 2012
From: IBM CORPORATION
To: NAVY, UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE
Reel/Frame 028173/0598 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 29, 2006
From: AFZALI-ARDAKANI, ALI; GOWDA, SUDHIR; GUHA, SUPRATIK; HAMANN, HENDRIK F.; TUTUC, EMANUEL
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 018337/0171 →
Continuity (1)
Related Publication 20100330687A1 · Dec 30, 2010