IP Library Granted Patent US 7,786,551
Granted Patent B2
US 7,786,551 · App. 11/532,455 · Granted Aug 31, 2010

Integrated circuit system with wafer trimming

Assignee: STATS ChipPAC Ltd.
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Quick Facts
Patent No.
US 7,786,551
App. No.
11/532,455
Granted
Aug 31, 2010
Kind
B2
Abstract

An integrated circuit system includes an integrated circuit wafer, forming a trimmed edge on the integrated circuit wafer, and applying a thinning process on the integrated circuit wafer with the trimmed edge.

Claims (26)

1. A method of manufacturing an integrated circuit system comprising:

providing an integrated circuit wafer;

providing a full depth wafer notch recessed into an edge of the integrated circuit wafer; forming a first trimmed edge on the integrated circuit wafer; wherein forming the first trimmed edge on the integrated circuit wafer includes forming an inner cut on a wafer active surface;

forming a second trimmed edge on the wafer notch; and

applying a thinning process on the integrated circuit wafer.

2. The method as claimed in claim 1 wherein forming the first trimmed edge on the integrated circuit wafer includes applying a fill material.

3. The method as claimed in claim 1 wherein applying the thinning process includes backgrinding a wafer backside.

4. The method as claimed in claim 1 wherein applying the thinning process includes thinning the wafer notch.

5. A method of manufacturing an integrated circuit system comprising:

providing an integrated circuit wafer having a wafer active surface and a wafer backside; providing a full depth wafer notch recessed into an edge of the integrated circuit wafer; forming a first trimmed edge using a first process on the wafer active surface; wherein forming the first trimmed edge on the integrated circuit wafer includes forming an inner cut on the wafer active surface near a wafer edge;

forming a second trimmed edge using a different second process on the wafer notch; and applying a thinning process on the wafer backside.

6. The method system as claimed in claim 5 wherein forming the first trimmed edge on the integrated circuit wafer includes a fill material over an inner cut on the wafer active surface.

7. The method system as claimed in claim 5 wherein applying the thinning process includes backgrinding a wafer backside to form an edge trimmed wafer backside.

8. The method system as claimed in claim 5 wherein applying the thinning process includes applying a notch thinning process to the wafer notch.

9. An integrated circuit system comprising:

an integrated circuit wafer having a full depth wafer notch recessed into an edge thereof, the integrated circuit wafer having a first trimmed edge around the perimeter thereof and a second trimmed edge in the wafer notch, wherein the first trimmed edge on the integrated circuit wafer includes an inner cut on a wafer active surface, the integrated circuit wafer characterized by a thinning of the integrated circuit wafer.

10. The system as claimed in claim 9 wherein the first trimmed edge on the integrated circuit wafer includes the first trimmed edge characterized by thinning the integrated circuit wafer having a fill material.

11. The system as claimed in claim 9 wherein the integrated circuit wafer includes an edge trimmed wafer backside characterized by thinning the integrated circuit wafer having an inner cut.

12. The system as claimed in claim 9 wherein the integrated circuit wafer includes the wafer notch characterized by thinning the notch region with a notch trimming process.

13. The system as claimed in claim 9 wherein:

the integrated circuit wafer has a wafer backside back ground to a predetermined thickness; and

the first trimmed edge on a wafer active surface.

14. The system as claimed in claim 13 wherein the first trimmed edge on the integrated circuit wafer includes the inner cut on the wafer active surface near a wafer edge.

15. The system as claimed in claim 13 wherein the first trimmed edge on the integrated circuit wafer includes the first trimmed edge characterized by thinning the integrated circuit wafer having a fill material on the wafer active surface.

16. The system as claimed in claim 13 wherein the integrated circuit wafer includes an edge trimmed wafer backside characterized by thinning the integrated circuit wafer having an inner cut on the wafer active surface.

17. The system as claimed in claim 13 wherein the integrated circuit wafer includes the wafer notch characterized by thinning the notch region with a laser process or a micro water-jet process.

Assignments (6)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2025
From: STATS CHIPPAC PTE. LTD.
To: STATS CHIPPAC MANAGEMENT PTE. LTD.
Reel/Frame 072788/0917 →
CORRECTIVE ASSIGNMENT TO CORRECT THE THE ASSIGNEE'S NAME PREVIOUSLY RECORDED AT REEL: 038378 FRAME: 0309. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Sep 11, 2023
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTD.
Reel/Frame 065236/0767 →
RELEASE OF SECURITY INTEREST Recorded Jun 12, 2020
From: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
To: STATS CHIPPAC, INC.; STATS CHIPPAC PTE. LTD. FORMERLY KNOWN AS STATS CHIPPAC LTD.
Reel/Frame 052924/0007 →
CHANGE OF NAME Recorded Apr 7, 2016
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTE.
Reel/Frame 038378/0309 →
SECURITY INTEREST Recorded Aug 6, 2015
From: STATS CHIPPAC, INC.; STATS CHIPPAC LTD.
To: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
Reel/Frame 036288/0748 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 15, 2006
From: PARK, SEUNG WOOK; LEE, TAEWOO; LEE, SUNG YOON
To: STATS CHIPPAC LTD.
Reel/Frame 018263/0296 →
Continuity (2)
Provisional Application 6059633600 · Sep 16, 2005
Related Publication 20070108557A1 · May 17, 2007