Method of making a gallium nitride crystalline composition having a low dislocation density
View Patent ↗A method for growing a crystalline composition, the first crystalline composition may include gallium and nitrogen. The crystalline composition may have an infrared absorption peak at about 3175 cm −1 , with an absorbance per unit thickness of greater than about 0.01 cm −1 . In one embodiment, the composition may have an amount of oxygen present in a concentration of less than about 3×10 18 per cubic centimeter, and may be free of two-dimensional planar boundary defects in a determined volume of the first crystalline composition.
1. A method of forming a crystal comprising gallium nitride, the method comprising providing a nucleation center, and the nucleation center comprises a gallium nitride crystal comprising up to 5 mole percent of at least one of aluminum or indium, and the gallium nitride crystal comprises at least one grain, wherein the at least one grain is greater than 2 millimeters in at least one dimension x or y, has a one-dimensional dislocation density of less than 10,000 per square centimeter, and is substantially free of tilt boundaries; and growing the crystal comprising gallium nitride on the nucleation center.
2. The method of claim 1 , wherein providing a nucleation center comprises patterning a substrate, the patterned substrate comprising at least one cutout.
3. The method of claim 1 , wherein growing the crystalline composition comprising gallium nitride comprises growing gallium nitride laterally from a boundary of the nucleation center.
4. The method of claim 1 , wherein the gallium nitride crystal has a dislocation density of less than 1,000 per square centimeter.
5. The method of claim 1 , wherein the gallium nitride crystal has a dislocation density of less than 100 per square centimeter.
6. The method of claim 1 , wherein the at least one grain is greater than 2 millimeters in both dimension x and y.
7. The method of claim 1 , wherein the at least one grain has a diameter greater than 2 millimeters.