Semiconductor device having structure with fractional dimension of the minimum dimension of a lithography system

1. A method for forming a semiconductor device comprising:

processing a wafer having a spacer layer and a structure layer formed over a device layer, the spacer layer being a topmost layer having an exposed top surface in said wafer and disposed directly on a top surface of the structure layer, and the structure layer disposed directly on a top surface of the device layer, wherein no intermediate layer exists between the spacer layer and the structure layer and between the structure layer and the device layer;

depositing first sidewall spacers adjacent to and against parallel sides of the spacer layer, said first sidewall spacers being isolated parallel strips deposited directly on the top surface of said structure layer with no intermediate layer between the first sidewall spacers and the structure layer, each of said first sidewall spacers having a width of a tenth to a quarter of a minimum pitch capability of a lithography system utilized to manufacture said semiconductor device, said minimum pitch being a distance between said first sidewall spacers;

forming structure strips from the structure layer directly below the first sidewall spacers;

forming a filler around the structure strips;

planarizing the structure strips and the filler so that the structure strips and the filler have a coplanar top surface;

forming a masking structure having second sidewall spacers directly on the coplanar top surface of the filler and the structure strips, and intersecting the structure strips, wherein no intermediate layer exists between the second sidewall spacers and the structure strips;

forming vertical posts from the structure strips directly below intersections of the second sidewall spacers and the structure strips, the vertical posts having a pitch in a range about said minimum pitch to said quarter of the minimum pitch capability of said lithography system utilized to manufacture said semiconductor device;

wherein at least one of the vertical posts comprises electrically conductive material.

2. The method as claimed in claim 1 further comprising forming an electronic system or a subsystem with the semiconductor device.

3. A method for forming a semiconductor device comprising:

processing a wafer having a spacer layer and a structure layer formed over a device layer, the spacer layer having an exposed top surface in the wafer and being disposed directly on a top surface of the structure layer, and the structure layer disposed directly on a top surface of the device layer, wherein no intermediate layer exists between the spacer layer and the structure layer and between the structure layer and the device layer;

depositing first sidewall spacers adjacent to and against parallel sides of the spacer layer, said first sidewall spacers being isolated parallel strips deposited directly on the top surface of said structure layer with no intermediate layer between the first sidewall spacers and the structure layer, each of said first sidewall spacers having a width of a tenth to a quarter of a minimum pitch capability of a lithography system utilized to manufacture said semiconductor device, said minimum pitch being a distance between said first sidewall spacers;

removing the spacer layer remaining between the first sidewall spacers;

depositing second sidewall spacers adjacent to and against the sides of first sidewall spacers;

removing the first sidewall spacers;

forming structure strips from the structure layer directly below the second sidewall spacers;

forming a filler around the structure strips;

planarizing the structure strips and the filler so that the structure strips and the filler have a coplanar top surface;

forming parallel structures directly on the coplanar top surface of the filler and the structure strips, and intersecting the structure strips, wherein no intermediate layer exists between the parallel structures and the structure strips;

forming vertical posts from the structure strips directly below intersections of the parallel structures and the structure strips, the vertical posts having a pitch in a range about said minimum pitch to said quarter of the minimum pitch capability of said lithography system utilized to manufacture said semiconductor device;

wherein at least one of the vertical posts comprises electrically conductive material.

4. The method as claimed in claim 3 wherein forming the structure strips from the structure layer below the second sidewall spacers includes etching the structure layer not covered by the second sidewall spacers.

5. The method as claimed in claim 3 wherein forming the vertical posts from the structure strips below the parallel structures includes etching the structure strips not covered by the parallel structures.

6. The method as claimed in claim 3 wherein forming the vertical posts includes:

etching the structure strips not covered by the parallel structures; and

removing the filler and the parallel structures.