Package-in-package using through-hole via die on saw streets
A semiconductor device includes a first die having top, bottom, and peripheral surfaces. A bond pad is formed over the top surface. An organic material is connected to the first die and disposed around the peripheral surface. A via hole is formed in the organic material. A metal trace connects the via hole to the bond pad. A conductive material is deposited in the via hole. A redistribution layer (RDL) has an interconnection pad disposed over the top surface of the first die.
1. A method of making a semiconductor device, comprising:
providing a first semiconductor die having top, bottom, and peripheral side surfaces;
providing a bond pad formed over the top surface;
providing an organic material disposed around the peripheral side surface and extending from the top surface to the bottom surface of the first semiconductor die;
after providing the organic material, forming a via through the organic material from the top surface to the bottom surface of the first semiconductor die;
after forming the via, providing a conductive material deposited in the via to form a conductive through hole via (THV) extending from the top surface to the bottom surface of the first semiconductor die;
providing a metal trace electrically connecting the conductive THV to the bond pad;
providing a redistribution layer (RDL) having an interconnection pad disposed over the top surface of the first semiconductor die;
mounting a second semiconductor die to the first semiconductor die; and
depositing an encapsulant over the first and second semiconductor die to form a package-in-package (PiP) semiconductor device.
2. The method of claim 1 , further including electrically connecting the second semiconductor die to the first semiconductor die using a bond wire.
3. The method of claim 2 , further including providing an underfill material disposed between the first and second semiconductor die.
4. The method of claim 3 , further including providing a third semiconductor die attached to the second semiconductor die and wire-bonded to the conductive material.
5. A method of making a semiconductor device, comprising:
providing a first semiconductor die incorporating an organic material formed around a peripheral region of the first semiconductor die that extends from a top surface to a bottom surface of the first semiconductor die and a conductive through-hole via (THV) formed through the organic material, the first semiconductor die disposed over a substrate;
providing a second semiconductor die electrically connected to the conductive THV of the first semiconductor die; and
providing an encapsulant formed over the first and second semiconductor die to form a package-in-package (PiP) semiconductor device.
6. The method of claim 5 , wherein the second semiconductor die is a wire-bond die, which is wire-bonded to the conductive THV.
7. The method of claim 5 , wherein the second semiconductor die is wire-bonded to a bond pad which is coupled to the conductive THV.
8. The method of claim 5 , further including providing a redistribution layer (RDL) incorporating an interconnection pad formed over the top surface of the first semiconductor die, wherein the first and second semiconductor die are electrically connected through a bump coupled to the interconnection pad.
9. The method of claim 5 , further including providing an underfill material disposed between the first and second semiconductor die.
10. The method of claim 5 , further including providing a third semiconductor die, coupled to the second semiconductor die, and wire-bonded to the conductive THV.
11. The method of claim 5 , wherein the second semiconductor die is integrated into a leadframe package mounted to the first semiconductor die.
12. The method of claim 5 , wherein the second semiconductor die is integrated into an array package mounted to the first semiconductor die.
13. The method of claim 5 , wherein the second semiconductor die is integrated into an inverted top package mounted to the first semiconductor die.
14. The method of claim 13 , further including mounting a third semiconductor die to the inverted top package.
15. The method of claim 5 , wherein the second semiconductor die is integrated into an inverted bottom package disposed between the first semiconductor die and the substrate.
16. The method of claim 15 , further including providing a third semiconductor die incorporating a conductive THV disposed along a peripheral surface of the third semiconductor die, wherein the third semiconductor die is disposed adjacent to the first semiconductor die.
17. The method of claim 16 , further including providing an integrated passive device coupled to the conductive THV.
18. The method of claim 5 , further including:
providing a bond pad formed over the top surface;
providing a metal trace electrically connecting the conductive THV to the bond pad; and
providing a redistribution layer (RDL) including an interconnection pad disposed over the top surface of the first semiconductor die.
19. The method of claim 18 , further including electrically connecting the second semiconductor die to the first semiconductor die using a bump.
20. The method of claim 19 , further including providing an underfill material disposed between the first semiconductor die and the second semiconductor die.
21. The method of claim 20 , further including providing a third semiconductor die attached to the second semiconductor die and wire-bonded to the conductive material.
22. A method of making a semiconductor device, comprising:
providing a first semiconductor die;
forming a bond pad over a first surface of the first semiconductor die;
forming an organic material around a peripheral region of the first semiconductor die and extending from the first surface to a second surface of the first semiconductor die opposite the first surface;
forming a via through the organic material from the first surface to the second surface of the first semiconductor die;
forming a conductive material in the via to provide a conductive through hole via (THV) extending from the first surface to the second surface of the first semiconductor die;
forming a conductive trace over the first surface of the first semiconductor die electrically connected between the conductive THV and the bond pad;
mounting a second semiconductor die to the first semiconductor die; and
depositing a first encapsulant over the first and second semiconductor die to form a package-in-package (PiP) semiconductor device.
23. The method of claim 22 , further including forming a redistribution layer over the first surface of the first semiconductor die.
24. The method of claim 22 , further including electrically connecting the second semiconductor die to the first semiconductor die using a bond wire.
25. The method of claim 22 , further including depositing an underfill material between the first semiconductor die and the second semiconductor die.
26. The method of claim 22 , further including:
mounting a third semiconductor die to the second semiconductor die; and
electrically connecting the third semiconductor die to the first semiconductor die.
27. The method of claim 26 , wherein the third semiconductor die overhangs the second semiconductor die.
28. The method of claim 26 , further including depositing a second encapsulant over the third semiconductor die prior to depositing the first encapsulant.
29. The method of claim 22 , further including:
mounting a third semiconductor die to the first semiconductor die; and
electrically connecting the third semiconductor die to the first semiconductor die.
30. A method of making a semiconductor device, comprising:
providing a first semiconductor die;
forming an organic material around a peripheral region of the first semiconductor die, the organic material extending from a first surface of the first semiconductor die to a second surface of the first semiconductor die opposite the first surface;
forming a conductive via through the organic material;
mounting a second semiconductor die to the first semiconductor die; and
depositing a first encapsulant over the first and second semiconductor die to form a package-in-package (PiP) semiconductor device.
31. The method of claim 30 , further including:
forming a bond pad over the first surface of the first semiconductor die; and
forming a conductive trace over the first surface of the first semiconductor die electrically connected between the conductive via and the bond pad.
32. The method of claim 30 , further including forming a redistribution layer over the first surface of the first semiconductor die.
33. The method of claim 30 , further including electrically connecting the second semiconductor die to the first semiconductor die using a bump.
34. The method of claim 30 , further including depositing an underfill material between the first semiconductor die and the second semiconductor die.
35. The method of claim 30 , further including:
mounting a third semiconductor die to the second semiconductor die; and
electrically connecting the third semiconductor die to the second semiconductor die.
36. The method of claim 35 , wherein the third semiconductor die overhangs the second semiconductor die.
37. The method of claim 35 , further including depositing a second encapsulant over the third semiconductor die prior to depositing the first encapsulant.
38. The method of claim 30 , further including:
mounting a third semiconductor die to the first semiconductor die; and
electrically connecting the third semiconductor die to the second semiconductor die.