Semiconductor wafer having through-hole vias on saw streets with backside redistribution layer
View Patent ↗A semiconductor wafer contains a plurality of die with contact pads disposed on a first surface of each die. Metal vias are formed in trenches in the saw street guides and are surrounded by organic material. Traces connect the contact pads and metal vias. The metal vias can be half-circle vias or full-circle vias. The metal vias are surrounded by organic material. Redistribution layers (RDL) are formed on a second surface of the die opposite the first surface. The RDL and THV provide expanded interconnect flexibility to adjacent die. Repassivation layers are formed between the RDL on the second surface of the die for electrical isolation. The die are stackable and can be placed in a semiconductor package with other die. The RDL provide electrical interconnect to the adjacent die. Bond wires and solder bumps also provide electrical connection to the semiconductor die.
1. A semiconductor wafer, comprising:
a plurality of semiconductor die each with a plurality of contact pads disposed on a first surface of the semiconductor;
a trench formed between the semiconductor die;
an organic material deposited in the trench;
a plurality of conductive vias formed through the organic material, wherein a width of the conductive vias is less than a width of the organic material in the trench;
a plurality of conductive traces formed over the first surface electrically connecting a first portion of the conductive vias to the contact pads, wherein a second portion of the conductive vias is electrically isolated from the conductive traces;
a plurality of redistribution layer (RDL) nodes formed over a second surface of the semiconductor die opposite the first surface, the RDL nodes extending across the second surface of the semiconductor die to route electrical signals to areas on the second surface including a central region of the semiconductor die for vertical electrical interconnect, wherein a first portion of the RDL nodes is electrically connected to the conductive vias and a second portion of the RDL nodes is electrically isolated from the conductive vias; and
a plurality of repassivation layers formed on the second surface of the semiconductor die for electrical isolation between the RDL nodes.
2. The semiconductor wafer of claim 1 , wherein a width of the trench is increased by creating additional space between the semiconductor die.
3. The semiconductor wafer of claim 1 , wherein the semiconductor wafer is singulated through the conductive vias to separate the semiconductor die.
4. The semiconductor wafer of claim 1 , further including a plurality of side-by-side conductive vias formed within the organic material.
5. The semiconductor wafer of claim 4 , wherein the semiconductor wafer is singulated between the side-by-side conductive vias to separate the semiconductor die.
6. The semiconductor wafer of claim 1 , further including a plurality of stacked semiconductor die electrically connected through the RDL nodes and conductive vias.
7. The semiconductor wafer of claim 1 , wherein the repassivation layer includes silicon nitride, silicon dioxide, silicon oxynitride, polyimide, benzocyclobutene, or polybenzoxazoles.
8. A semiconductor wafer, comprising:
a plurality of semiconductor die each with a plurality of contact pads disposed on a first surface of the semiconductor;
an organic material formed around the semiconductor die;
a plurality of conductive vias formed through the organic material;
a plurality of conductive traces formed over the first surface electrically connecting a first portion of the conductive vias to the contact pads, wherein a second portion of the conductive vias is electrically isolated from the conductive traces;
a plurality of redistribution layer (RDL) nodes formed over a second surface of the semiconductor die opposite the first surface, the RDL nodes extending across the second surface of the semiconductor die to route electrical signals to areas on the second surface including a central region of the semiconductor die for vertical electrical interconnect, wherein a first portion of the RDL nodes is electrically connected to the conductive vias and a second portion of the RDL nodes is electrically isolated from the conductive vias; and
a plurality of repassivation layers formed on the second surface of the semiconductor die for electrical isolation between the RDL nodes.
9. The semiconductor wafer of claim 8 , wherein the semiconductor wafer is singulated through the conductive vias to separate the semiconductor die.
10. The semiconductor wafer of claim 8 , further including a plurality of side-by-side conductive vias formed within the organic material.
11. The semiconductor wafer of claim 10 , wherein the semiconductor wafer is singulated between the side-by-side conductive vias to separate the semiconductor die.
12. The semiconductor wafer of claim 8 , further including a plurality of stacked semiconductor die electrically connected through the RDL nodes and conductive vias.
13. The semiconductor wafer of claim 8 , wherein the repassivation layer includes silicon nitride, silicon dioxide, silicon oxynitride, polyimide, benzocyclobutene, or polybenzoxazoles.
14. A semiconductor wafer, comprising:
a plurality of semiconductor die each with a plurality of contact pads disposed on a first surface of the semiconductor;
an organic material formed around the semiconductor die;
a plurality of conductive vias formed through the organic material;
a plurality of conductive traces formed over the first surface electrically connecting the conductive vias to the contact pads;
a plurality of redistribution layer (RDL) nodes formed over a second surface of the semiconductor die opposite the first surface, the RDL nodes extending across the second surface of the semiconductor die to route electrical signals to areas on the second surface including a central region of the semiconductor die for vertical electrical interconnect, wherein a first portion of the RDL nodes is electrically connected to the conductive vias and a second portion of the RDL nodes is electrically isolated from the conductive vias; and
a plurality of repassivation layers formed on the second surface of the semiconductor die for electrical isolation between the RDL nodes.
15. The semiconductor wafer of claim 14 , wherein the semiconductor wafer is singulated through the conductive vias to separate the semiconductor die.
16. The semiconductor wafer of claim 14 , further including a plurality of side-by-side conductive vias formed within the organic material.
17. The semiconductor wafer of claim 16 , wherein the semiconductor wafer is singulated between the side-by-side conductive vias to separate the semiconductor die.
18. The semiconductor wafer of claim 14 , further including a plurality of stacked semiconductor die electrically connected through the RDL nodes and conductive vias.
19. The semiconductor wafer of claim 14 , wherein the repassivation layer includes silicon nitride, silicon dioxide, silicon oxynitride, polyimide, benzocyclobutene, or polybenzoxazoles.
20. A semiconductor wafer, comprising:
a plurality of semiconductor die each with a plurality of contact pads disposed on a first surface of the semiconductor;
an organic material formed around the semiconductor die;
a plurality of conductive vias formed through the organic material;
a plurality of conductive traces formed over the first surface electrically connecting the conductive vias to the contact pads;
a plurality of redistribution layer (RDL) nodes formed over a second surface of the semiconductor die opposite the first surface, the RDL nodes extending across the second surface of the semiconductor die to route electrical signals to areas on the second surface of the semiconductor die including a central region of the semiconductor die for vertical electrical interconnect; and
a plurality of repassivation layers formed on the second surface of the semiconductor die for electrical isolation between the RDL nodes.
21. The semiconductor wafer of claim 20 , wherein the semiconductor wafer is singulated through the conductive vias to separate the semiconductor die.
22. The semiconductor wafer of claim 20 , further including a plurality of side-by-side conductive vias formed within the organic material.
23. The semiconductor wafer of claim 22 , wherein the semiconductor wafer is singulated between the side-by-side conductive vias to separate the semiconductor die.
24. The semiconductor wafer of claim 20 , further including a plurality of stacked semiconductor die electrically connected through the RDL nodes and conductive vias.
25. The semiconductor wafer of claim 20 , wherein the repassivation layer includes silicon nitride, silicon dioxide, silicon oxynitride, polyimide, benzocyclobutene, or polybenzoxazoles.