Circuit structure of integrated circuit
View Patent ↗A circuit structure of an integrated circuit is provided. The circuit structure is adapted for a circuit layout of a wafer. The circuit structure at least includes a first array cell and a second array cell. The second array cell and the first array cell are connected to each other and have a connecting area, wherein the second array cell is shifted a distance along the connecting area. Therefore, the result of yield enhancement is achieved.
1. A process testing method of a chip, a circuit layout of the chip at least having a first array cell, a second array cell, and a third array cell, the first array cell, the second array cell, and the third array cell are arranged in an axis, the method comprising:
shifting the second array cell to a first predetermined distance along a connecting area formed between the first array cell and the second array cell;
shifting the third array cell to a second predetermined distance along a connecting area formed between the second array cell and the third array cell, wherein the second predetermined distance is greater than the first predetermined distance; and
comparing electrical characteristics of the first array cell, the second array cell and the third array cell to obtain a compared result for indicating a state of a process window and determining whether the first predetermined distance and second predetermined distance are adjusted, so as to evaluate a yield of the chip based on the compared result.
2. The process testing method of a chip as claimed in claim 1 , wherein the step of comparing electrical characteristics of the first array cell, the second array cell and the third array cell further comprises testing the electrical characteristics of the first array cell, the second array cell and the third array cell.
3. The process testing method of a chip as claimed in claim 1 , wherein the first predetermined distance is 5 nm.
4. The process testing method of a chip as claimed in claim 1 , wherein the circuit layout of the chip is applied to a 90 nm process.
5. The process testing method of a chip as claimed in claim 1 , wherein the circuit layout of the chip is applied to a critical dimension (CD) of a photolithographic process.
6. A process testing method of a wafer, a circuit layout of the wafer having a plurality of chips, and each chip having a first part of array cells, a second part of array cells and a third part of array cells arranged in an axis, the method comprising:
shifting the second part of array cells to a first predetermined distance along connecting areas formed between the first part of array cells and the third part of the array cells;
shifting the third part of array cells to a second predetermined distance along connecting areas formed between the second part of array cells and the third part of array cells, wherein the second predetermined distance is greater than the first predetermined distance; and
comparing electrical characteristics of the first part of array cells, the second part of array cells and the third part of array cells to obtain a compared result for indicating a state of a process window and determining whether the first predetermined distance and second predetermined distance are adjusted, so as to evaluate a yield of the wafer based on the compared result.
7. The process testing method of a wafer as claimed in claim 6 , wherein the step of comparing electrical characteristics of the first part of array cells, the second part of array cells and the third part of array cells comprises testing the electrical characteristics of the first part of array cells, the second part of array cells and the third part of array cells.
8. The process testing method of a wafer as claimed in claim 6 , wherein the array cells are arranged in an array.
9. The process testing method of a wafer as claimed in claim 6 , wherein the first predetermined distance is 5 nm.
10. The process testing method of a wafer as claimed in claim 6 , wherein the circuit layout of the wafer is applied to a 90 nm process.
11. The process testing method of a wafer as claimed in claim 6 , wherein the circuit layout of the wafer is applied to a CD of a photolithographic process.