Semiconductor automation buffer storage identification system and method
View Patent ↗A system for reading substrate carriers that includes at least one overhead transport vehicle (OHT) utilizing at least one device for at least one of sensing and/or reading a substrate carrier, and/or wafers arranged therein, when the substrate carrier is proximate the at least one overhead transport vehicle. A method of sensing or reading a substrate carrier includes sensing and/or reading a substrate carrier and/or wafers arranged therein with the overhead transport vehicle.
1. A system for sensing or reading substrate carriers comprising:
at least one overhead transport vehicle (OHT), mounted to an overhead track and structured and arranged for movement along the overhead track; and
at least one overhead buffer storage system arranged adjacent the overhead track,
wherein the OHT includes at least one device for:
sensing a substrate carrier positioned in the at least one overhead buffer storage system while moving along the overhead track;
reading a substrate carrier positioned in the at least one overhead buffer storage system while moving along the overhead track; and
reading wafers arranged in a substrate carrier positioned in the at least one overhead buffer storage system when the substrate carrier is proximate the at least one OHT while moving along the overhead track.
2. The system of claim 1 , wherein the at least one OHT comprises a mechanism for picking-up the substrate carrier.
3. The system of claim 1 , wherein the at least one OHT is structured and arranged to transfer the substrate carrier between a storage location and a processing tool.
4. The system of claim 1 , wherein the at least one device comprises a RFID reader.
5. The system of claim 1 , wherein the at least one device comprises a barcode reader.
6. The system of claim 1 , wherein the substrate carrier comprises one of an RFID tag and a barcode.
7. The system of claim 1 , wherein the at least one device is integrally connected to a portion of the OHT.
8. The system of claim 1 , wherein the at least one device is removably connected to a portion of the OHT.
9. The system of claim 1 , wherein the at least one device is arranged on a dummy substrate carrier arranged in the OHT.
10. The system of claim 1 , wherein the at least one device is arranged on a removable dummy substrate carrier arranged in the OHT.
11. The system of claim 1 , further comprising two overhead buffer storage systems arranged adjacent the overhead track, wherein the at least one OHT is movably mounted to the overhead track between the two overhead buffer storage systems.
12. The system of claim 1 , wherein the at least one OHT is structured and arranged to pick-up and remove the substrate carrier from the at least one overhead buffer storage system.
13. A system for reading substrate carriers, comprising:
at least one overhead transport vehicle (OHT) mounted to an overhead track; and
at least one overhead buffer storage system arranged adjacent the overhead track,
wherein the at least one OHT includes at least one reader for (i) reading a substrate carrier when the substrate carrier is moving and proximate the at least one OHT, (ii) reading wafers arranged in the substrate carrier positioned in the at least one overhead buffer storage system when the substrate carrier is proximate the at least one OHT, and (iii) sensing the substrate carrier positioned in the at least one overhead buffer storage system while the OHT is moving along the overhead track.
14. The system of claim 13 , wherein the at least one OHT comprises a mechanism for picking-up the substrate carrier.
15. The system of claim 13 , wherein the at least one device for reading a substrate carrier comprises a RFID reader and the substrate carrier comprises an RFID tag.
16. The system of claim 13 , wherein the at least one reader is at least one of:
integrally connected to a portion of the OHT;
removably connected to a portion of the OHT;
arranged on a dummy substrate carrier arranged in the OHT; and
arranged on a removable dummy substrate carrier arranged in the OHT.
17. A method of sensing or reading a substrate carrier with an overhead transport vehicle (OHT) mounted to an overhead track and structured and arranged for movement along the overhead track, the method comprising:
sensing a substrate carrier positioned in at least one overhead buffer storage system with the OHT while moving along the overhead track;
reading a substrate carrier positioned in the at least one overhead buffer storage system with the OHT while moving along the overhead track; and
reading wafers arranged within a substrate carrier positioned in the at least one overhead buffer storage system with the OHT while moving along the overhead track.
18. The method of claim 17 , further comprising at least one of:
moving the OHT on the overhead track; and
moving the OHT on the overhead track during the reading.