Reduction of silicide formation temperature on SiGe containing substrates
View Patent ↗A method that solves the increased nucleation temperature that is exhibited during the formation of cobalt disilicides in the presence of Ge atoms is provided. The reduction in silicide formation temperature is achieved by first providing a structure including a Co layer including at least Ni, as an additive element, on top of a SiGe containing substrate. Next, the structure is subjected to a self-aligned silicide process which includes a first anneal, a selective etching step and a second anneal to form a solid solution of (Co, Ni) disilicide on the SiGe containing substrate. The Co layer including at least Ni can comprise an alloy layer of Co and Ni, a stack of Ni/Co or a stack of Co/Ni. A semiconductor structure including the solid solution of (Co, Ni) disilicide on the SiGe containing substrate is also provided.
1. A semiconductor structure comprising:
a SiGe containing substrate comprising 0.1% to 50% Ge; and
a solid solution of (Co, Ni) disilicide located on a surface of said SiGe containing substrate, the solid solution of (Co, Ni) disilicide comprising 0.3% to 15% Ni, 0.1% to 20% of an additive selected from the group consisting of Al, Si, Sc, Mn, Fe, Cu, Y, Zr, Nb, Rh, In, Sn, La, Hf, Re, Pt, Ce, Pt, Nd, Sm, Eu, Gd, Tb, Dy, So, Er, Tm, Yb, L and combinations there, and a remainder of Si.
2. The structure of claim 1 wherein the SiGe containing substrate comprises a single crystalline material or a polycrystalline material.
3. The structure of claim 1 wherein the SiGe containing substrate is selected from the group consisting of poly-SiGe, a SiGe alloy, SiGeC, a SiGe alloy-on-insulator, a SiGeC-on-insulator and Si-on-SiGe.
4. The structure of claim 1 wherein said (Co, Ni) disilicide contains from about 2 to about 10 atomic percent Ni.
5. The structure of claim 1 wherein the additive is present in the (Co, Ni) disilicide in an amount of from about 0.03 to about 15 atomic percent.
6. The structure of claim 1 wherein the SiGe containing substrate is a single crystalline SiGe containing substrate, said single crystalline SiGe containing substrate including source/drain regions.
7. The structure of claim 1 wherein SiGe containing substrate is a polycrystalline SiGe containing substrate, said polycrystalline SiGe containing substrate is formed atop a gate of a transistor.