Interlevel conductive light shield
View Patent ↗A CMOS image sensor pixel includes a conductive light shield, which is located between a first dielectric layer and a second dielectric layer. At least one via extends from a top surface of the second dielectric layer to a bottom surface of the first dielectric layer is formed in the metal interconnect structure. The conductive light shield may be formed within a contact level between a top surface of a semiconductor substrate and a first metal line level, or may be formed in any metal interconnect via level between two metal line levels. The inventive CMOS image sensor pixel enables reduction of noise in the signal stored in the floating drain.
1. A semiconductor structure comprising:
a first semiconductor device located on a top surface of a semiconductor substrate;
a conductive light shield located over said first semiconductor device and disjoined from at least one node of said first semiconductor device, wherein said conductive light shield comprises a downward-protruding via portion abutting a node of a second semiconductor device;
at least one metal line located above a top surface of said conductive light shield; and
a contact via abutting a bottom surface of said at least one metal line and a top surface of said second semiconductor device.
2. The semiconductor structure of claim 1 , wherein said contact via is of integral construction without any physically manifested interface therein.
3. The semiconductor structure of claim 1 , further comprising:
a dielectric substrate-capping layer abutting a top surface of said semiconductor substrate and located underneath a portion of said conductive light shield; and
a middle-of-line (MOL) dielectric layer located over said dielectric substrate-capping layer and located underneath said at least one metal line.
4. The semiconductor structure of claim 3 , wherein an entirety of said conductive light shield including said downward-protruding via portion is of a same composition and of integral construction without any physically manifested interface therein, and wherein said first and second-downward-protruding via portions are laterally surrounded by said dielectric substrate-capping layer.
5. The semiconductor structure of claim 3 , wherein a bottom surface of said conductive light shield is non-planar and abuts a top surface of said dielectric substrate-capping layer.
6. The semiconductor structure of claim 3 , further comprising a middle-of-line (MOL) dielectric liner abutting a planar bottom surface of said MOL dielectric layer, a top surface of said dielectric substrate-capping layer, and a non-planar bottom surface of said conductive light shield.
7. The semiconductor structure of claim 3 , wherein said contact via has a top surface that is coplanar with a top surface of said MOL dielectric layer and a bottom surface that is coplanar with a bottom surface of said dielectric substrate-capping layer.
8. The semiconductor structure of claim 3 , wherein said conductive light shield includes at least two bottom surface portions separated from said semiconductor substrate by different distances, and wherein said conductive light shield has a non-planar top surface located beneath a bottom surface of said at least one metal line.
9. The semiconductor structure of claim 3 , wherein said MOL dielectric layer is of integral construction without a physically manifested interface therein and abuts a bottom surface of said at least one metal line and directly adjoins a peripheral edge of a bottom surface of said conductive light shield.
10. The semiconductor structure of claim 3 , wherein said conductive light shield includes at least two portions having different thicknesses, and wherein an entirety of said conductive light shield has a flat top surface separated from said semiconductor substrate by a constant distance.
11. The semiconductor structure of claim 3 , wherein said MOL dielectric layer comprises:
a lower middle-of-line (MOL) dielectric layer directly adjoining a bottom surface of said conductive light shield, wherein a top surface of said lower MOL dielectric layer is coplanar with a top surface of said conductive light shield; and
an upper middle-of-line (MOL) dielectric layer abutting a bottom surface of said at least one metal line and abutting a top surface of said lower middle-of-line (MOL) dielectric layer.
12. The semiconductor structure of claim 3 , further comprising at least another contact via abutting a top surface of said conductive light shield and another bottom surface of said at least one metal line.
13. The semiconductor structure of claim 1 , wherein said conductive light shield further comprises another downward-protruding via portion abutting a node of a third semiconductor device.