Semiconductor device and method of forming a fan-out structure with integrated passive device and discrete component
View Patent ↗A semiconductor device is made by providing a temporary carrier for supporting the semiconductor device. An integrated passive device (IPD) is mounted to the temporary carrier using an adhesive. The IPD includes a capacitor and a resistor and has a plurality of through-silicon vias (TSVs). A discrete component is mounted to the temporary carrier using the adhesive. The discrete component includes a capacitor. The IPD and the discrete component are encapsulated using a molding compound. A first metal layer is formed over the molding compound. The first metal layer is connected to the TSVs of the IPD and forms an inductor. The temporary carrier and the adhesive are removed, and a second metal layer is formed over the IPD and the discrete component. The second metal layer interconnects the IPD and the discrete component and forms an inductor. An optional interconnect structure is formed over the second metal layer.
1. A method of making a semiconductor device, comprising:
providing a temporary carrier for supporting the semiconductor device;
mounting an integrated passive device (IPD) to the temporary carrier using an adhesive, the IPD including a capacitor and a resistor and having a plurality of through-silicon vias (TSVs);
mounting a discrete component to the temporary carrier using the adhesive, the discrete component including a capacitor;
encapsulating the IPD and the discrete component using a molding compound;
forming a first metal layer over the molding compound, the first metal layer being connected to the TSVs of the IPD and forming an inductor;
removing the temporary carrier and the adhesive;
forming a second metal layer over the IPD and the discrete component, the second metal layer interconnecting the IPD and the discrete component and forming an inductor, wherein the second metal layer forms an electrode of the capacitor of the IPD; and
forming an interconnect structure over the second metal layer.
2. The method of claim 1 , including:
depositing photoresist over the temporary carrier; and
forming a seal ring between the photoresist and a surface of the IPD.
3. The method of claim 1 , wherein the adhesive includes a light, heat or mechanically releasable material.
4. The method of claim 1 , wherein the interconnect structure includes a plurality of solder bumps.
5. The method of claim 1 , further including backgrinding the IPD to expose the TSVs of the IPD, the step of backgrinding the IPD including chemical-mechanical polishing (CMP), wet etching, or plasma etching.
6. The method of claim 1 , wherein the temporary carrier includes a glass wafer having a laser-releasable layer.
7. A method of making a semiconductor device, comprising:
providing an integrated passive device (IPD), the IPD including a capacitor and a resistor and having a plurality of conductive vias;
providing a discrete component disposed proximate to the IPD, the discrete component including a capacitor;
encapsulating the IPD and the discrete component using a molding compound;
forming a first metal layer over the molding compound, the first metal layer being connected to the conductive vias of the IPD and forming an inductor;
forming a second metal layer over the IPD and the discrete component, the second metal layer interconnecting the IPD and the discrete component, wherein the second metal layer forms an electrode of the capacitor of the IPD; and
forming an interconnect structure over the second metal layer.
8. The method of claim 7 , wherein the second metal layer forms an inductor.
9. The method of claim 7 , wherein the discrete component has a capacitance greater than 100 picofarads (pF).
10. The method of claim 7 , wherein the interconnect structure includes a plurality of solder bumps.
11. The method of claim 7 , further including backgrinding the IPD to expose the TSVs of the IPD, the step of backgrinding the IPD including chemical-mechanical polishing (CMP), wet etching, or plasma etching.
12. A method of making a semiconductor device, comprising:
providing an integrated passive device (IPD), the IPD including a plurality of conductive vias;
providing a discrete component disposed proximate to the IPD;
forming a metal layer over the IPD and the discrete component, the metal layer interconnecting the IPD and the discrete component, wherein the metal layer forms an electrode of a capacitor formed within the IPD; and
forming an interconnect structure over the metal layer.
13. The method of claim 12 , wherein the metal layer forms an inductor.
14. The method of claim 12 , wherein the discrete component includes a capacitor and has a capacitance greater than 100 picofarads (pF).
15. The method of claim 12 , wherein the interconnect structure includes a resistor.
16. The method of claim 12 , further including backgrinding the IPD to expose a TSV formed within the IPD, the step of backgrinding the IPD including chemical-mechanical polishing (CMP), wet etching, or plasma etching.