Semiconductor device and manufacturing method therefor
A semiconductor device is provided that includes a semiconductor chip and a resin section that molds the semiconductor chip and has a first through-hole. A through electrode that is electrically coupled to the semiconductor chip, extends through the resin section, and extends between a top edge and a bottom edge of an inner surface of the first through-hole. A cavity which extends between planes corresponding to an upper surface and a lower surface of the resin section is formed inside the first through-hole.
1. A semiconductor device comprising:
a semiconductor chip;
a resin section that encases the semiconductor chip, and has a first through-hole; and
a through electrode that is electrically coupled to the semiconductor chip, and extends through the resin section and through a top edge and a bottom edge of an inner surface of the first through-hole, wherein a cavity which extends between planes corresponding to an upper surface and a lower surface of the resin section is formed inside the first through-hole and wherein the through electrode is formed so that the first through-hole is closed above the plane corresponding to the upper surface of the resin section and the semiconductor device is one of a stack of more than one semiconductor devices and comprises a conductive pin that penetrates a cavity provided in each of the semiconductor devices and directly contacts the through electrode, so as to be electrically coupled with the through electrode.
2. The semiconductor device according to claim 1 , wherein an upper surface of the through electrode is coplanar with the upper surface of the resin section.
3. The semiconductor device according to claim 1 , wherein the semiconductor device is one of a stack of more than one semiconductor devices wherein a through electrode of each of the semiconductor devices of the stack contacts the other.
4. The semiconductor device according to claim 2 wherein the semiconductor device is one of a stack of more than one semiconductor devices, and comprises a conductive pin that penetrates through the cavity provided in each of the semiconductor devices, so as to be electrically coupled with the semiconductor devices.