Method for manufacturing a semiconductor device
View Patent ↗A method for manufacturing a semiconductor device is disclosed. As a part of the method, one surface of a substrate is molded with resin where the substrate and the resin are heated in a first heating process and maintained in a flat condition. The substrate and the resin are returned to room temperature while being maintained in the flat condition after the first heating process. The resin is cut after the substrate and the resin are returned to room temperature from a surface of the resin that is opposite the surface of the resin where the substrate contacts the resin. The substrate is left intact when the resin is cut. Thereafter, the substrate is separated.
1. A method for manufacturing a semiconductor device, the method comprising:
molding one surface of a substrate with resin;
heating the substrate and the resin in a first heating process while maintaining the substrate and the resin in a flat condition;
returning the substrate and the resin to room temperature while the substrate and the resin is being maintained in the flat condition after the first heating process;
cutting the resin after returning the substrate and the resin to room temperature from a surface of the resin that is opposite the surface of the resin where the substrate contacts the resin wherein the substrate is left intact; and
separating the substrate.
2. The method for manufacturing a semiconductor device according to claim 1 , further comprising heating the substrate after cutting the resin and before separating the substrate in the second heating process.
3. The method for manufacturing a semiconductor device according to claim 1 , wherein a plurality of cutting plane lines associated with cutting the resin overlaps with at least one of a plurality of cutting plane lines associated with separating the substrate.
4. The method for manufacturing a semiconductor device according to claim 1 , wherein a cutting plane line associated with separating the substrate includes a cutting plane line associated with cutting the resin.
5. The method for manufacturing a semiconductor device according to claim 1 , wherein the cutting the resin is in a width direction.
6. The method for manufacturing a semiconductor device according to claim 1 , wherein the cutting the resin is in a lattice shape.
7. The method for manufacturing a semiconductor device according to claim 1 , wherein the molding of the surface of the substrate with the resin includes heating the substrate and the resin in a third heating process.
8. The method for manufacturing a semiconductor device according to claim 2 , wherein the second heating process is included in a process for providing terminals on the substrate.
9. A method for manufacturing a semiconductor device, the method comprising:
forming a square shaped substrate;
molding one surface of the square substrate with a square shaped resin layer;
heating the square shaped substrate and the square shaped resin layer in a first heating process while maintaining the square shaped substrate and the square shaped resin layer in a flat condition;
returning the square shaped substrate and the square shaped resin layer to room temperature while the square shaped substrate and the square shaped resin layer is being maintained in the flat condition after the first heating process;
cutting the square shaped resin layer in a lattice pattern after returning the square shaped substrate and the square shaped resin layer to room temperature from a surface of the square shaped resin layer that is opposite a surface of the square shaped resin layer wherein the square shaped resin layer contacts the square shaped substrate;
separating the square shaped substrate; and
heating the square shaped substrate after the cutting of the square shaped resin and before the separating of the square shaped substrate in a second heating process.
10. The method for manufacturing a semiconductor device according to claim 9 , wherein a plurality of cutting plane lines associated with cutting the resin overlaps with at least one of a plurality of cutting plane lines associated with separating the substrate.
11. The method for manufacturing a semiconductor device according to claim 9 , wherein a cutting plane line associated with separating the substrate includes a cutting plane line associated with cutting the resin.
12. The method for manufacturing a semiconductor device according to claim 9 , wherein the cutting the resin is in a width and a length direction.
13. The method for manufacturing a semiconductor device according to claim 9 , wherein the cutting the resin is in a lattice shape that leaves the substrate intact.
14. The method for manufacturing a semiconductor device according to claim 9 , wherein the molding of the surface of the substrate with the resin includes heating the substrate and the resin in a third heating process.
15. The method for manufacturing a semiconductor device according to claim 9 , wherein the second heating process is included in a process for providing terminals on the substrate.
16. A method for manufacturing a semiconductor device package, the method comprising:
forming a substrate;
performing die bonding on the substrate;
performing wire bonding of the die on the substrate;
molding a surface of the substrate with resin;
heating the substrate and the resin in a first heating process while maintaining the substrate and the resin in a flat condition;
returning the substrate and the resin to room temperature while the substrate and the resin is being maintained in the flat condition after the first heating process;
cutting the resin after returning the substrate and the resin to room temperature from a surface of the resin that is opposite the surface of the resin where the substrate contacts the resin wherein the substrate is left intact; and
separating the substrate.
17. The method for manufacturing a semiconductor device package according to claim 16 , wherein a plurality of cutting plane lines associated with cutting the resin overlaps with at least one of a plurality of cutting plane lines associated with separating the substrate.
18. The method for manufacturing a semiconductor device package according to claim 16 , wherein a cutting plane line associated with separating the substrate includes a cutting plane line associated with cutting the resin.
19. The method for manufacturing a semiconductor device package according to claim 16 , wherein the cutting the resin is in a width direction.
20. The method for manufacturing a semiconductor device package according to claim 16 , wherein the cutting the resin is in a lattice shape.