IP Library Granted Patent US 8,052,833
Granted Patent B2
US 8,052,833 · App. 12/401,856 · Granted Nov 8, 2011

Chemical treatment apparatus

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Quick Facts
Patent No.
US 8,052,833
App. No.
12/401,856
Granted
Nov 8, 2011
Kind
B2
Abstract

A chemical treatment apparatus includes an outer bath; an inner bath, located inside the outer bath; a circulation system, connecting the outer bath to the inner bath; and a draining system, having a first draining pipe and a connecting pipe, wherein the connecting pipe connects the first draining pipe to the circulation system. The suction force generated by a pump of the circulation system is thereby transferred to the first draining pipe. Therefore when the chemical solution is to be drained out from the inner bath, the draining of the chemical solution into the first draining pipe can be quickly done with the aid of the suction force.

Claims (59)

1. A chemical treatment apparatus comprising

an inner bath ( 20 ) having an intake port and a discharge port;

an outer bath ( 10 ) having a discharge port, configured to receive overflowing liquid from the inner bath ( 20 );

a circulation system ( 30 ), including

a treatment module ( 31 ) having a pump ( 311 ),

a first transport pipe ( 32 ) connecting the discharge port of the outer bath ( 10 ) and the pump ( 311 ) of the treatment module ( 31 ), and

a second transport pipe ( 33 ) connecting the intake port of the inner bath ( 20 ) and the pump of the treatment module ( 31 ); and

a draining system ( 40 ), having

a first draining pipe ( 41 ) in connection with the discharge port of the inner bath ( 20 ),

a second draining pipe in connection with the treatment module ( 31 ), and

a connecting pipe ( 43 ) connecting the first transport pipe ( 32 ) and the first draining pipe ( 41 );

wherein the first and the second transport pipes selectively establish a circulation path,

wherein the first transport pipe and the connection pipe selectively establish a discharge path with the first and the second draining pipes;

wherein both the circulation and the discharge paths are pressurizable by the pump of the treatment module.

2. The chemical treatment apparatus of claim 1 , wherein the connecting pipe has at least one connecting pipe control valve.

3. The chemical treatment apparatus of claim 1 , wherein the first draining pipe has a first draining pipe control valve and the second draining pipe has a second draining pipe control valve.

4. The chemical treatment apparatus of claim 1 , wherein the treatment module has a main control valve.

5. The chemical treatment apparatus of claim 1 , wherein the draining system further has a storage container, wherein the second draining pipe has a second end connecting to the storage container and the first draining pipe has a second end connecting to the storage container.

6. The chemical treatment apparatus of claim 5 , wherein the draining system has a third draining pipe connecting the first transport pipe to the storage container.

7. The chemical treatment apparatus of claim 6 , wherein the third draining pipe further has a third draining pipe control valve.

8. The chemical treatment apparatus of claim 1 , wherein the pump has a first end connecting to the first transport pipe and a second end connecting to the second draining pipe.

9. The chemical treatment apparatus of claim 8 , wherein the treatment module has a heater and a first intermediate transport pipe, the first intermediate transport pipe connecting the heater to the pump.

10. The chemical treatment apparatus of claim 9 , wherein the intermediate transport pipe has a control valve.

11. The chemical treatment apparatus of claim 9 , wherein the treatment module has a filter and a second intermediate transport pipe, the second intermediate transport pipe connecting the heater to the filter, the filter further connects to the second transport pipe.

12. The chemical treatment apparatus of claim 1 , wherein the first draining pipe further has a level sensor.

13. The chemical treatment apparatus of claim 1 , wherein the draining system further has a water transport pipe connecting to the second transport pipe.

14. A chemical treatment apparatus comprising

an inner bath having an intake port and a discharge port;

an outer bath having a discharge port, configured to receive overflowing liquid from the inner bath;

a circulation system, including

a treatment module having a pump,

a first transport pipe connecting the discharge port of the outer bath and the pump of the treatment module,

a second transport pipe connecting the intake port of the inner bath and the pump of the treatment module; and

a draining system, having

a first draining pipe in connection with the discharge port of the inner bath,

a second draining pipe in connection with the second transport pipe, and

a connecting pipe connecting the first transport pipe and the first draining pipe;

wherein the first and the second transport pipes selectively establish a circulation path,

wherein the first transport pipe and the connection pipe selectively establish a discharge path with the first and the second draining pipes;

wherein both the circulation and the discharge paths are pressurizable by the pump of the treatment module.

15. The chemical treatment apparatus of claim 14 , wherein the connecting pipe has at least one connecting pipe control valve.

16. The chemical treatment apparatus of claim 14 , wherein the first draining pipe has a first draining pipe control valve and the second draining pipe has a second draining pipe control valve.

17. The chemical treatment apparatus of claim 14 , wherein the treatment module has a main control valve.

18. The chemical treatment apparatus of claim 14 , wherein the draining system further has a storage container, wherein the second draining pipe has a second end connecting to the storage container and the first draining pipe has a second end connecting to the storage container.

19. A chemical treatment apparatus comprising

an inner bath ( 20 ) having an intake port and a discharge port;

an outer bath ( 10 ) having a discharge port, configured to receive overflowing liquid from the inner bath ( 20 );

a circulation system ( 30 ), including

a treatment module ( 31 ) having a pump ( 311 ),

a first transport pipe ( 32 ) connecting the discharge port of the outer bath ( 10 ) and the pump ( 311 ) of the treatment module ( 31 ), and

a second transport pipe ( 33 ) connecting the intake port of the inner bath ( 20 ) and the pump of the treatment module ( 31 ); and

a draining system ( 40 ), having

a first draining pipe ( 41 ) in connection with the discharge port of the inner bath ( 20 ),

a second draining pipe arranged between the first and the second transport pipes, and

a connecting pipe ( 43 ) connecting the first transport pipe ( 32 ) and the first draining pipe ( 41 );

wherein the first and the second transport pipes selectively establish a circulation path,

wherein the first transport pipe and the connection pipe selectively establish a discharge path with the first and the second draining pipes;

wherein both the circulation and the discharge paths are pressurizable by the pump of the treatment module.

20. The chemical treatment apparatus of claim 19 , wherein the intake port of the inner bath is used as the discharge port, and wherein the circulating path and the discharge path through the intake port of the inner bath is selectively controlled by a control valve ( 411 ).

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050695/0825 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 27, 2017
From: INOTERA MEMORIES, INC.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 041820/0815 →
SUPPLEMENT NO. 3 TO PATENT SECURITY AGREEMENT Recorded Feb 10, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041675/0105 →