Semiconductor device and method of forming cavity in build-up interconnect structure for short signal path between die
In a semiconductor device, a first semiconductor die is mounted with its active surface oriented to a temporary carrier. An encapsulant is deposited over the first semiconductor die and temporary carrier. The temporary carrier is removed to expose a first side of the encapsulant and active surface of the first semiconductor die. A masking layer is formed over the active surface of the first semiconductor die. A first interconnect structure is formed over the first side of the encapsulant. The masking layer blocks formation of the first interconnect structure over the active surface of the first semiconductor die. The masking layer is removed to form a cavity over the active surface of the first semiconductor die. A second semiconductor die is mounted in the cavity. The second semiconductor die is electrically connected to the active surface of the first semiconductor die with a short signal path.
1. A method of making a semiconductor device, comprising:
providing a temporary carrier;
mounting a first semiconductor die with its active surface oriented to the temporary carrier;
depositing an encapsulant over the first semiconductor die and temporary carrier;
removing the temporary carrier to expose a first side of the encapsulant and active surface of the first semiconductor die;
forming a masking layer over the active surface of the first semiconductor die;
forming a first interconnect structure over the first side of the encapsulant, the masking layer blocking formation of the first interconnect structure over the active surface of the first semiconductor die;
removing the masking layer to form a cavity over the active surface of the first semiconductor die; and
mounting a second semiconductor die in the cavity, the second semiconductor die being electrically connected to the active surface of the first semiconductor die.
2. The method of claim 1 , further including forming a conductive through silicon via through the first semiconductor die.
3. The method of claim 1 , further including forming a shielding layer over the second semiconductor die.
4. The method of claim 1 , further including:
forming a second interconnect structure over a back surface of the first semiconductor die opposite the active surface of the first semiconductor die; and
mounting a third semiconductor die to the second interconnect structure.
5. The method of claim 1 , further including forming a bump between the first semiconductor die and the second semiconductor die to electrically connect the first semiconductor die to the second semiconductor die.
6. A method of making a semiconductor device, comprising:
providing a first semiconductor die;
depositing an encapsulant over the first semiconductor die forming a masking layer over an active surface of the first semiconductor die;
forming a first interconnect structure over the encapsulant and the first semiconductor die; and
removing the masking layer to form a cavity extending through the first interconnect structure to expose the active surface of the first semiconductor die.
7. The method of claim 6 , further including:
forming the first interconnect structure over the encapsulant with the masking layer blocking formation of the first interconnect structure over a portion of the active surface of the first semiconductor die; and
removing the masking layer to form the cavity over the portion of the active surface of the first semiconductor die.
8. The method of claim 6 , further including forming a conductive through silicon via through the first semiconductor die.
9. The method of claim 6 , further including mounting a heat spreader to the active surface of the first semiconductor die.
10. The method of claim 6 , further including mounting a heat sink to a back surface of the first semiconductor die opposite the active surface of the first semiconductor die.
11. The method of claim 6 , further including:
forming a second interconnect structure over a back surface of the first semiconductor die opposite the active surface of the first semiconductor die; and
mounting a second semiconductor die to the second interconnect structure.
12. The method of claim 6 , further including removing a portion of the encapsulant opposite the first interconnect structure to expose a back surface of the semiconductor die.
13. The method of claim 6 , further including:
providing a temporary carrier;
mounting the semiconductor die with the active surface of the first semiconductor die oriented towards the temporary carrier; and
removing the temporary carrier to expose the encapsulant.
14. The method of claim 13 , further including:
forming a dam wall over the temporary carrier;
mounting the first semiconductor die to the temporary carrier so that a portion of the active surface resides within the dam wall;
depositing the encapsulant over the first semiconductor die and temporary carrier, the dam wall preventing spreading of the encapsulant to the portion of the active surface of the first semiconductor die;
removing the temporary carrier; and
forming the first interconnect structure over the encapsulant, the masking layer blocking formation of the first interconnect structure over the active surface of the first semiconductor die.
15. The method of claim 6 , further including mounting a semiconductor component within the cavity over the semiconductor die with the semiconductor component being electrically connected to the semiconductor die.
16. The method of claim 15 , wherein the semiconductor component is a second semiconductor die or discrete semiconductor device.
17. The method of claim 15 , further including depositing a second encapsulant around the semiconductor component.
18. The method of claim 15 , further including forming a shielding layer over the semiconductor component.
19. The method of claim 15 , further including depositing an underfill material between the semiconductor die and the semiconductor component.
20. The method of claim 15 , further including forming a bump between the first semiconductor die and the semiconductor component to electrically connect the semiconductor die to the semiconductor component.
21. A method of making a semiconductor device, comprising:
providing a first semiconductor die;
depositing an encapsulant over the first semiconductor die;
forming a masking layer over an active surface of the first semiconductor die; and
forming a first interconnect structure over the encapsulant and around the masking layer without covering a portion of the active surface of the first semiconductor die with the first interconnect structure.
22. The method of claim 21 , further including:
forming the first interconnect structure over the encapsulant and first semiconductor die with the masking layer blocking formation of the first interconnect structure over the portion of the active surface of the first semiconductor die; and
removing the masking layer to form a cavity over the active surface of the first semiconductor die.
23. The method of claim 21 , further including:
forming a dam wall around the portion of the active surface of the first semiconductor die;
depositing the encapsulant over the first semiconductor die, the dam wall preventing spreading of the encapsulant to the portion of the active surface of the first semiconductor die;
forming the first interconnect structure over the encapsulant with the masking layer blocking formation of the first interconnect structure over the portion of the active surface of the first semiconductor die; and
removing the masking layer to form a cavity over the active surface of the first semiconductor die.
24. The method of claim 21 , further including forming a conductive through silicon via through the first semiconductor die.
25. The method of claim 21 , further including:
forming a second interconnect structure over a back surface of the first semiconductor die opposite the active surface of the first semiconductor die; and
mounting a second semiconductor die to the second interconnect structure.
26. The method of claim 21 , further including removing a portion of the encapsulant opposite the first interconnect structure to expose a back surface of the first semiconductor die.
27. The method of claim 21 , further including mounting a semiconductor component over the active surface of the first semiconductor die between portions of the first interconnect structure with the semiconductor component being electrically connected to the active surface of the first semiconductor die.
28. The method of claim 27 , wherein the semiconductor component is a second semiconductor die or discrete semiconductor device.
29. The method of claim 27 , further including depositing an underfill material between the first semiconductor die and the semiconductor component.
30. The method of claim 27 , further including forming a bump between the first semiconductor die and the semiconductor component to electrically connect the first semiconductor die to the semiconductor component.
31. A method of making a semiconductor device, comprising:
providing a semiconductor die;
depositing an encapsulant over the semiconductor die;
forming a masking layer over a first surface of the semiconductor die; and
forming an interconnect structure over the encapsulant and the semiconductor die with the masking layer blocking formation of the interconnect structure over a portion of the first surface of the semiconductor die.
32. The method of claim 31 , further including removing the masking layer to form a cavity over the portion of the first surface of the semiconductor die.
33. The method of claim 31 , further including mounting a semiconductor component over the first surface of the semiconductor die.
34. The method of claim 33 , further including depositing an underfill material between the semiconductor die and the semiconductor component.
35. The method of claim 31 , further including forming a conductive through silicon via through the semiconductor die.
36. The method of claim 31 , further including removing a portion of the encapsulant opposite the interconnect structure to expose a second surface of the semiconductor die.