Semiconductor device and method of forming a shielding layer over a semiconductor die disposed in a cavity of an interconnect structure and grounded through the die TSV

1. A method of manufacturing a semiconductor device, comprising:

forming an interconnect structure;

forming a cavity in a first surface partially through the interconnect structure;

providing a first semiconductor die;

forming a first through silicon via (TSV) through the first semiconductor die;

mounting the first semiconductor die in the cavity;

depositing an adhesive layer over a first surface of the first semiconductor die;

mounting a shielding layer over the first surface of the first semiconductor die, the shielding layer being secured to the first semiconductor die with the adhesive layer and grounded through the first TSV and interconnect structure to block electromagnetic interference; and

depositing an encapsulant over the shielding layer and interconnect structure.

2. The method of claim 1 , further including forming a slot in the shielding layer for the encapsulant to flow into the cavity and cover the first semiconductor die.

3. The method of claim 1 , further including:

mounting a second semiconductor die to the shielding layer prior to depositing the encapsulant; and

electrically connecting the second semiconductor die to the interconnect structure.

4. The method of claim 3 , further including forming a second TSV through the second semiconductor die.

5. The method of claim 3 , further including forming an adhesive layer over the shielding layer to attach the second semiconductor die.

6. The method of claim 1 , wherein forming the interconnect structure includes:

forming an insulating layer;

forming a conductive layer within the insulating layer; and

forming a bump over a second surface of the interconnect structure opposite the first surface of the interconnect structure.

7. The method of claim 1 , further including forming a bump over a second surface of the first semiconductor die opposite the first surface of the first semiconductor die.

8. A method of manufacturing a semiconductor device, comprising:

forming an interconnect structure;

forming a cavity in the interconnect structure;

providing a first semiconductor die or component;

forming a first conductive via through the first semiconductor die or component;

mounting the first semiconductor die or component in the cavity;

mounting a shielding layer over the first surface of the first semiconductor die or component, the shielding layer being grounded through the first conductive via and interconnect structure; and

depositing an encapsulant over the shielding layer and interconnect structure.

9. The method of claim 8 , further including forming a slot in the shielding layer for the encapsulant to flow into the cavity and cover the first semiconductor die or component.

10. The method of claim 8 , wherein the shielding layer blocks electromagnetic interference.

11. The method of claim 8 , further including:

mounting a second semiconductor die or component to the shielding layer prior to depositing the encapsulant; and

electrically connecting the second semiconductor die or component to the interconnect structure.

12. The method of claim 11 , further including forming a second conductive via through the second semiconductor die or component.

13. The method of claim 8 , further including forming a bump over a second surface of the first semiconductor die or component opposite the first surface of the first semiconductor die or component.

14. A method of making a semiconductor device, comprising:

forming an interconnect structure;

forming a cavity in the interconnect structure;

disposing a first semiconductor die or component in the cavity after forming the cavity in the interconnect structure;

forming a first conductive via through the first semiconductor die or component;

disposing a shielding layer over the first semiconductor die or component;

electrically connecting the shielding layer to the first conductive via and interconnect structure; and

depositing an encapsulant over the shielding layer and interconnect structure and further through an opening in the shielding layer around the semiconductor die.

15. The method of claim 14 , wherein the shielding layer blocks electromagnetic interference.

16. The method of claim 14 , further including:

disposing a second semiconductor die or component over the shielding layer prior to depositing the encapsulant; and

electrically connecting the second semiconductor die or component to the interconnect structure.

17. The method of claim 16 , further including forming a second conductive via through the second semiconductor die or component.

18. A method of making a semiconductor device, comprising:

forming an interconnect structure;

forming a cavity in the interconnect structure;

disposing a first semiconductor die or component in the cavity;

disposing a planar shielding layer over the first semiconductor die or component;

disposing a second semiconductor die or component over the first semiconductor die or component;

electrically connecting the second semiconductor die or component to the interconnect structure; and

depositing an encapsulant over the shielding layer, second semiconductor die, and interconnect structure.

19. The method of claim 18 , further including:

forming a first conductive via through the first semiconductor die or component; and

electrically connecting the shielding layer to the first conductive via and interconnect structure.

20. The method of claim 18 , further including forming a slot in the shielding layer for the encapsulant to flow into the cavity and cover the first semiconductor die or component.

21. The method of claim 18 , wherein the shielding layer blocks electromagnetic interference.

22. The method of claim 18 , further including forming a second conductive via through the second semiconductor die or component.