FinFET devices
A finFET structure and method of manufacture such structure is provided with lowered Ceff and enhanced stress. The finFET structure includes a plurality of finFET structures and a stress material forming part of a gate stack and in a space between adjacent ones of the plurality of finFET structures.
1. A finFET structure, comprising:
a plurality of finFET gate structures comprising a gate material deposited on a dielectric material;
an insulator stress material provided in a space between each of fin of the plurality of finFET gate structures and on sides of the fins; and
a conductive layer on the insulator stress material,
wherein:
the insulator stress material has a lattice constant different than that of the gate material used for the plurality of finFET gate structures;
the conductive layer is directly on a top planarized surface of the insulator stress material; and
the conductive liner spans across at least two fins of the plurality of finFET gate structures.
2. The finFET structure of claim 1 , wherein the plurality of finFET gate structures includes a gate stack comprising the conductive layer, the insulator stress material, the gate material, the dielectric material, in order.
3. The finFET structure of claim 1 , wherein the insulator stress material is a nitride material.
4. The finFET structure of claim 1 , wherein the gate material is one of metal material and poly material.
5. The finFET structure of claim 1 , wherein the insulator stress material is provided on both sides of the plurality of finFET gate structures.
6. The finFET structure of claim 1 , wherein the insulator stress material merges the plurality of finFET gate structures in source/drain areas.
7. The finFET structure of claim 1 , wherein the conductive layer is in contact with a top surface of the dielectric material and the gate material.