Nanowire FET with trapezoid gate structure
View Patent ↗In one embodiment, a method of providing a nanowire semiconductor device is provided, in which the gate structure to the nanowire semiconductor device has a trapezoid shape. The method may include forming a trapezoid gate structure surrounding at least a portion of a circumference of a nanowire. The first portion of the trapezoid gate structure that is in direct contact with an upper surface of the nanowire has a first width and a second portion of the trapezoid gate structure that is in direct contact with a lower surface of the nanowire has a second width. The second width of the trapezoid gate structure is greater than the first width of the trapezoid gate structure. The exposed portions of the nanowire that are adjacent to the portion of the nanowire that the trapezoid gate structure is surrounding are then doped to provide source and drain regions.
1. A method of forming a semiconductor device comprising:
forming a nanowire comprised of a semiconductor material;
forming a trapezoid gate structure surrounding at least a portion of a circumference of the nanowire, wherein a first portion of the trapezoid gate structure that is in direct contact with an upper surface of the nanowire has a first width and a second portion of the trapezoid gate structure that is in direct contact with a lower surface of the nanowire has a second width, the second width being greater than the first width; and
doping an exposed portion of the nanowire adjacent the portion of the circumference of the nanowire that the trapezoid gate structure is surrounding, wherein the doping provides source and drain dopant regions.
2. The method of claim 1 , wherein the forming of the nanowire comprises:
providing a semiconductor layer on a dielectric layer;
etching the semiconductor layer to provide a nanostructure;
etching the dielectric layer to provide an undercut region under a portion of the nanostructure, wherein the nanostructure is suspended over the undercut region;
annealing the nanostructure to form an elliptical cross section, wherein the nanostructure having the elliptical cross section is the nanowire.
3. The method of claim 2 , wherein the semiconductor layer on the dielectric layer is provided by a semiconductor on insulator (SOI) substrate.
4. The method of claim 2 , wherein the nanostructure comprises pad sections on opposing sides of a portion of the nanostructure that provides the nanowire.
5. The method of claim 4 , wherein the doping of the exposed portion of the nanowire comprises epitaxially growing a semiconductor material on the pad sections adjacent to the nanowire, wherein the semiconductor material is doped with an p-type or n-type dopant, and diffusing the dopant from the semiconductor material into the pad sections and the exposed portion of the nanowire.
6. The method of claim 1 , wherein the trapezoid gate structure comprises an upper surface having a greater width than a base surface of the trapezoid gate structure, wherein sidewalls of the trapezoid gate structure are angled.
7. The method of claim 1 , wherein the forming of the trapezoid gate structure comprises forming at least one gate dielectric layer the portion of the circumference of the nanowire, forming at least one gate conductor layer on the at least one gate dielectric layer, and forming at least one dielectric cap layer on the at least one gate conductor layer to provide a gate stack; forming a first etch mask on the gate stack; etching the gate stack selective to the first etch mask.
8. The method of claim 1 , wherein the doping of the exposed portion of the nanowire comprises ion implantation of an n-type or p-type dopant.