Manufacturing method for FIN-FET having floating body

1. A manufacturing method for a fin field effect transistor having a floating body, comprising:

providing a substrate, forming a shallow trench isolation structure and a shallow trench isolation oxide/nitride, forming a plurality of grounded gates in the shallow trench isolation structure and the shallow trench isolation oxide/nitride, and forming a poly crystalline layer over the shallow trench isolation structure and the shallow trench isolation oxide/nitride and between the grounded gates, wherein each grounded gate has a nitride layer, a metal gate and a recessed access device region;

performing an etching process to form in the poly crystalline layer a plurality of openings which expose the corresponding grounded gates, wherein a bottom of each opening has a protrusion;

removing each grounded gate so that the openings extend downward, wherein the openings in the shallow trench isolation structure has a depth between the depths of the recessed access device region and the shallow trench isolation structure, and the openings in the shallow trench isolation oxide/nitride has a similar depth as the recessed access device region;

forming spacers on sidewalls of the openings;

forming an opening in the shallow trench isolation structure to the substrate;

performing an isotropic silicon etching to form isolation spaces at the bottoms of the openings; and

filling up gate oxide in the openings and the isolation spaces.

2. The manufacturing method of claim 1 , wherein the step of performing an etching process to form in the poly crystalline layer a plurality of openings which expose the corresponding grounded gates comprises:

forming an oxide hard mask and a mask layer in turns in the poly crystalline layer;

transferring patterns of an optical mask to the oxide hard mask and a mask layer; and

transferring patterns of the mask layer to the poly crystalline layer by etching to form the openings.

3. The manufacturing method of claim 2 , wherein at the step of forming an oxide hard mask and a mask layer in turns in the poly crystalline layer, the oxide hard mask is formed by depositing at a temperature higher than 725° C.

4. The manufacturing method of claim 1 , wherein the step of removing each grounded gate comprises:

removing the nitride layer of each grounded gate, leaving sidewalls of the nitride layer by using the protrusion of the poly crystalline layer;

removing the metal gate of each grounded gate; and

removing the recessed access device region of each grounded gate.

5. The manufacturing method of claim 4 , wherein at the step of removing the nitride layer of each grounded gate, an etching process selective to silicon and silicon oxide is used to remove the nitride layer of each grounded gate.

6. The manufacturing method of claim 4 , wherein at the step of removing the recessed access device region of each grounded gate, an anisotropically polymerizing etching process is used to remove the recessed access device region of each grounded gate.

7. The manufacturing method of claim 1 , wherein the step of forming spacers on sidewalls of the openings comprises:

depositing a nitride layer on sidewalls and a bottom of each opening; and

removing the part of the nitride layer on the bottom of each opening by etching.

8. The manufacturing method of claim 1 , wherein at the step of extending bottoms of the openings in the shallow trench isolation structure to the substrate, an anisotropic etching process for silicon is used to extend the bottoms of the openings to the substrate.

9. The manufacturing method of claim 1 , wherein at the step of performing an isotropic silicon etching, a horizontal etching process is used to partially remove the shallow trench isolation structure and the substrate as well to form the isolation spaces, the horizontal etching length being 30% to 110%.

10. The manufacturing method of claim 1 , after the step of filling up gate oxide in the openings and the isolation spaces, further comprising a step of performing a chemical mechanic polishing process.