Auxiliary stage and method of utilizing auxiliary stage
View Patent ↗An auxiliary stage for holding an electron microscope specimen includes a bottom part and a supporting part. The bottom part includes a first top surface, and the supporting part includes a second top surface and a side surface. The supporting part is fixed on the first top surface, and the side surface of the supporting part is substantially perpendicular to the first top surface of the bottom part. Therefore, the auxiliary stage is in a shape of a reversed T. A slit is embedded in the second top surface of the supporting part. A specimen holder is mounted in the slit, and a specimen is fixed on the specimen holder.
1. An auxiliary stage, comprising:
a bottom part having a first top surface; and
a supporting part having a second top surface and a side surface, the supporting part fixed on the first top surface with an adhesive layer, and the side surface of the supporting part being substantially perpendicular to the first top surface of the bottom part, wherein a slit is disposed in the second top surface of the supporting part, a specimen holder is mounted in the slit, and a specimen is fixed on the specimen holder.
2. The auxiliary stage of claim 1 , wherein the bottom part and the supporting part are made of a silicon containing-material.
3. The auxiliary stage of claim 1 , wherein the supporting part comprises a first rectangular structure and a second rectangular structure, the first rectangular structure and the second rectangular structure are fixed together.
4. The auxiliary stage of claim 3 , wherein the slit is disposed between the first rectangular structure and the second rectangular structure.
5. The auxiliary stage of claim 1 , wherein the specimen holder is a half copper ring.
6. A method of utilizing an auxiliary stage, the method is performed by using a specimen preparation tool, the specimen preparation tool comprising a chamber, wherein the method comprises:
providing an auxiliary stage according to claim 1 ;
fixing a specimen holder in a slit on the supporting part, wherein a specimen is fixed on the specimen holder;
disposing the auxiliary stage, the specimen holder and the specimen into the chamber;
turning on the specimen preparation tool to cope with the specimen; and
removing the specimen holder along with the specimen from the auxiliary stage.
7. The method of utilizing an auxiliary stage of claim 6 , wherein the bottom part comprises a first top surface and the supporting part comprises a second top surface and a side surface.
8. The method of utilizing an auxiliary stage of claim 7 , wherein the supporting part is fixed on the first top surface, and the side surface of the supporting part is substantially perpendicular to the first top surface of the bottom part, and the slit is embedded in the second top surface.
9. The method of utilizing an auxiliary stage of claim 6 , wherein the auxiliary stage is made of a silicon containing-material.
10. The method of utilizing an auxiliary stage of claim 6 , wherein the specimen preparation tool comprises a reactive ion etcher, a plasma cleaner, or a platinum sputter.
11. The method of utilizing an auxiliary stage of claim 6 , wherein the specimen is an electron microscope specimen.
12. The method of utilizing an auxiliary stage of claim 11 , wherein the specimen comprises an SEM specimen or a TEM specimen.
13. The method of utilizing an auxiliary stage of claim 6 , wherein the specimen holder is a half copper ring.
14. The method of utilizing an auxiliary stage of claim 6 , further comprising after the specimen holder along with the specimen are removed from the auxiliary stage, the specimen holder and the specimen being disposed into a chamber of an electron microscope.