Flat response device structures for bipolar junction transistors
View Patent ↗Bipolar transistors with tailored response curves, as well as fabrication methods for bipolar transistors and design structures for BiCMOS integrated circuits. The bipolar transistor includes a first section of a collector region implanted with a first dopant concentration and a second section of the collector region implanted with a second dopant concentration that is higher than the first dopant concentration. A first emitter is formed in vertical alignment with the first section of the collector region. A second emitter is formed in vertical alignment with the second section of the collector region.
1. A method for fabricating a device structure, the method comprising:
implanting a semiconductor layer to form a first section of a collector region with a first dopant concentration;
implanting the semiconductor layer to form a second section of the collector region with a second dopant concentration higher than the first dopant concentration;
forming a first emitter in vertical alignment with the first section of the collector region; and
forming a second emitter in vertical alignment with the second section of the collector region.
2. The method of claim 1 further comprising:
selecting a width of the first emitter and the first section of the collector to be different than a width of the second emitter and the second section of the collector region.
3. The method of claim 1 further comprising:
selecting a length of the first emitter and the first section of the collector to be different than a length of the second emitter and the second section of the collector region.
4. The method of claim 1 further comprising:
adjusting a width and a length of the first and second emitters and the first and second sections of the collector region to tailor a response curve of cut-off frequency as a function of collector current.
5. The method of claim 1 wherein the collector region includes a third section with a third dopant concentration, and further comprising:
forming a third emitter in vertical alignment with the third section of the collector region.
6. The method of claim 1 wherein the first section of the collector region and the second section of the collector region have a juxtaposed arrangement within the collector region.
7. The method of claim 1 wherein the collector region is formed beneath a top surface of a substrate, and further comprising:
forming a first layer for an intrinsic base on the top surface of the substrate;
forming a second layer for an extrinsic base on the first layer; and
forming a first opening that extends through the first layer and the second layer to the top surface,
wherein the first section of the collector region is implanted through the first opening, and the first emitter is positioned in the first opening.
8. The method of claim 7 further comprising:
forming a second opening that extends through the first layer and the second layer to the top surface,
wherein the second section of the collector region is implanted through the second opening, and the second emitter is positioned in the second opening.
9. The method of claim 1 wherein the second dopant concentration is at least an order of magnitude higher than the first dopant concentration.
10. The method of claim 1 wherein the first emitter has a first length and the second emitter has a second length, and the first emitter and second emitter are arranged such that the first length is aligned parallel to the second length.
11. The method of claim 1 wherein the first emitter has a first length and the second emitter has a second length, and the first emitter and second emitter are arranged such that the first length is aligned collinear with the second length.
12. The method of claim 1 wherein the collector region is formed beneath a top surface of a substrate, and further comprising:
forming a layer for an intrinsic base on the top surface of the substrate; and
forming a first opening that extends through the layer to the top surface,
wherein the first section of the collector region is implanted through the first opening, and the first emitter is positioned in the first opening.
13. The method of claim 12 further comprising:
forming a second opening that extends through the layer to the top surface,
wherein the second section of the collector region is implanted through the second opening, and the second emitter is positioned in the second opening.
14. The method of claim 12 further comprising:
before implanting the first section of the collector region through the first opening, forming spacers inside the first opening.
15. The method of claim 7 further comprising:
before implanting the first section of the collector region through the first opening, forming spacers inside the first opening.
16. The method of claim 1 further comprising:
forming a third emitter in vertical alignment with the first section of the collector region.
17. The method of claim 1 further comprising:
forming a third emitter in vertical alignment with the second section of the collector region.