Vertical transistor for random-access memory and manufacturing method thereof
View Patent ↗A manufacturing method for a vertical transistor of random-access memory, having the steps of: defining an active region on a semiconductor substrate; forming a shallow trench isolation structure outside of the active region; etching the active region and forming a gate dielectric layer and a positioning gate thereon, forming a word line perpendicular to the positioning gate; forming spacing layers on the outer surfaces of the word line; implanting ions to the formed structure in forming an n-type and a p-type region on opposite sides of the word line with the active region; forming an n-type and a p-type floating body respectively on the n-type and p-type region; forming a source line perpendicular to the word line and connecting to the n-type floating body; forming a bit line perpendicular to the source line and connecting to the p-type floating body. Hence, a vertical transistor with steady threshold voltage is achieved.
1. A manufacturing method of vertical transistor for random-access memory, comprising:
defining an active region on a semiconductor substrate;
forming a shallow trench isolation structure around the active region;
etching the central portion of the active region;
forming a gate dielectric layer and a positioning gate on the etched portion of the active region;
forming a word line in contact with the positioning gate and substantially perpendicular thereto in the etching direction;
forming spacing layers on the outer surfaces of the word line;
respectively forming an n-type region and a p-type region for the active region on opposite sides of the word line by ion implantation;
coveringly disposing an insulating layer on the formed structure with an insulating layer;
removing the insulating layer partially to form a source line pattern by a self-align contact (SAC) process;
forming two floating bodies by epitaxial deposition and implanting with ions to form an n-type floating body on the n-type region of the active region and a p-type floating body on the p-type region of the active region; covering the formed structure with an insulating layer;
removing the insulating layer corresponding to the n-type floating body by the self-align contact process; forming a source line perpendicular to the word line and connecting to the n-type floating body;
covering the formed structure with an insulating layer and removing the insulating layer corresponding to the p-type floating body by the self-align contact process; and
forming a bit line perpendicular to the source line and connecting to the p-type floating body.
2. The manufacturing method of vertical transistor for random-access memory of claim 1 , wherein after the shallow trench isolation structure is formed, chemical-mechanical polishing (CMP) technique is used to smooth the surface of the semiconductor substrate and the shallow trench isolation structure, and wherein ions are implanted to form an n-type region for the lower portion of the semiconductor substrate and a p-type region for the upper portion of the semiconductor substrate.
3. The manufacturing method of vertical transistor for random-access memory of claim 1 , further comprising the step of forming a protective layer on the word line.
4. The manufacturing method of vertical transistor for random-access memory of claim 3 , wherein after disposing the insulating layer and prior to forming the source line pattern, chemical-mechanical polishing (CMP) technique is applied to smooth and level the upper portion of the insulating layer and the protective layer.
5. The manufacturing method of vertical transistor for random-access memory of claim 1 , wherein self-align contact (SAC) technique is applied to remove the insulating layer above the active region and adjacent to the spacing layers to form the source line pattern.
6. The manufacturing method of vertical transistor for random-access memory of claim 1 , wherein prior to forming the source line, polysilicon is deposited on the n-type floating body to form a source line contact end for connecting to the source line.
7. The manufacturing method of vertical transistor for random-access memory of claim 1 , wherein prior to forming the bit line, polysilicon is deposited on the source line corresponding to the p-type floating body to form a bit line contact end for connecting to the bit line.
8. The manufacturing method of vertical transistor for random-access memory of claim 7 , wherein the bit line contact end is an n-type.
9. The manufacturing method of vertical transistor for random-access memory of claim 1 , wherein after forming the word line, a planar transistor is further formed on one side of the word line.
10. A vertical transistor for random-access memory fabricated by the manufacturing method of vertical transistor for random-access memory of claim 1 .