Semiconductor device and method of using leadframe bodies to form openings through encapsulant for vertical interconnect of semiconductor die
View Patent ↗A semiconductor device has a leadframe with a plurality of bodies extending from the base plate. A first semiconductor die is mounted to the base plate of the leadframe between the bodies. An encapsulant is deposited over the first semiconductor die and base plate and around the bodies of the leadframe. A portion of the encapsulant over the bodies of the leadframe is removed to form first openings in the encapsulant that expose the bodies. An interconnect structure is formed over the encapsulant and extending into the first openings to the bodies of the leadframe. The leadframe and bodies are removed to form second openings in the encapsulant corresponding to space previously occupied by the bodies to expose the interconnect structure. A second semiconductor die is mounted over the first semiconductor die with bumps extending into the second openings of the encapsulant to electrically connect to the interconnect structure.
1. A method of making a semiconductor device, comprising:
providing a leadframe having a base plate and a plurality of bodies integrated with and extending from the base plate;
mounting a first semiconductor die to the base plate of the leadframe between the bodies;
depositing an encapsulant over the first semiconductor die and base plate and around the bodies of the leadframe;
removing a portion of the encapsulant over the bodies of the leadframe to form first openings in the encapsulant that expose the bodies;
forming an interconnect structure over the encapsulant and extending into the first openings to the bodies of the leadframe; and
removing the leadframe and bodies to form second openings in the encapsulant corresponding to space previously occupied by the bodies to expose the interconnect structure.
2. The method of claim 1 , further including planarizing the encapsulant to expose the first semiconductor die.
3. The method of claim 1 , wherein forming an interconnect structure over the encapsulant includes:
forming a first conductive layer over the encapsulant and extending into the first openings; and
forming a first insulating layer over the encapsulant and first conductive layer.
4. The method of claim 1 , further including:
providing a second semiconductor die having a plurality of bumps formed over a surface of the second semiconductor die; and
mounting the second semiconductor die over the first semiconductor die with the bumps extending into the second openings of the encapsulant to electrically connect to the interconnect structure.
5. The method of claim 1 , further including forming a plurality of conductive vias through the first semiconductor die.
6. The method of claim 1 , further including:
providing a second semiconductor die;
mounting the second semiconductor die over the first semiconductor die;
providing a third semiconductor die having a plurality of bumps formed over a surface of the second semiconductor die; and
mounting the third semiconductor die over the first and second semiconductor die with the bumps extending into the second openings of the encapsulant to electrically connect to the interconnect structure.
7. A method of making a semiconductor device, comprising:
providing a carrier having a plurality of bodies extending from the carrier;
mounting a first semiconductor die to the carrier between the bodies;
depositing an encapsulant over the first semiconductor die and carrier and around the bodies of the carrier;
removing a portion of the encapsulant over the bodies of the carrier to form first openings in the encapsulant that expose the bodies;
forming an interconnect structure over the encapsulant and extending into the first openings to the bodies of the carrier; and
removing the carrier and bodies to form second openings in the encapsulant corresponding to space previously occupied by the bodies to expose the interconnect structure.
8. The method of claim 7 , wherein the carrier includes a leadframe having a base plate and a plurality of bodies integrated with and extending from the base plate.
9. The method of claim 7 , wherein forming an interconnect structure over the encapsulant includes:
forming a first conductive layer over the encapsulant and extending into the first openings; and
forming a first insulating layer over the encapsulant and first conductive layer.
10. The method of claim 7 , further including:
providing a second semiconductor die having a plurality of bumps formed over a surface of the second semiconductor die; and
mounting the second semiconductor die over the first semiconductor die with the bumps extending into the second openings of the encapsulant to electrically connect to the interconnect structure.
11. The method of claim 7 , further including forming a plurality of conductive vias through the first semiconductor die.
12. The method of claim 7 , further including:
providing a second semiconductor die;
mounting the second semiconductor die over the first semiconductor die;
providing a third semiconductor die having a plurality of bumps formed over a surface of the second semiconductor die; and
mounting the third semiconductor die over the first and second semiconductor die with the bumps extending into the second openings of the encapsulant to electrically connect to the interconnect structure.
13. The method of claim 7 , further including forming a heat spreader or shielding layer over the first semiconductor die.
14. A method of making a semiconductor device, comprising:
providing a carrier having a plurality of bodies extending from the carrier;
mounting a first semiconductor die to the carrier between the bodies;
depositing an encapsulant over the first semiconductor die and carrier and around the bodies of the carrier;
forming an interconnect structure over the encapsulant and extending to the bodies of the carrier; and
removing the carrier and bodies to form first openings in the encapsulant corresponding to space previously occupied by the bodies to expose the interconnect structure.
15. The method of claim 14 , wherein the carrier includes a leadframe having a base plate and a plurality of bodies integrated with and extending from the base plate.
16. The method of claim 14 , further including removing a portion of the encapsulant over the bodies of the carrier to form second openings in the encapsulant that expose the bodies of the carrier.
17. The method of claim 14 , further including:
providing a second semiconductor die having a plurality of bumps formed over a surface of the second semiconductor die; and
mounting the second semiconductor die over the first semiconductor die with the bumps extending into the first openings of the encapsulant to electrically connect to the interconnect structure.
18. The method of claim 14 , further including forming a plurality of conductive vias through the first semiconductor die.
19. The method of claim 14 , further including:
providing a second semiconductor die;
mounting the second semiconductor die over the first semiconductor die;
providing a third semiconductor die having a plurality of bumps formed over a surface of the second semiconductor die; and
mounting the third semiconductor die over the first and second semiconductor die with the bumps extending into the first openings of the encapsulant to electrically connect to the interconnect structure.
20. The method of claim 14 , further including forming a plurality of bumps over the first semiconductor die.