A light emitting device, a wafer for making the same, and method for fabricating the same are disclosed. The device and wafer include a first layer of a first conductivity type, an active layer, and a layer of a second conductivity type. The active layer overlies the first layer, the active layer generating light. The second layer overlies the active layer, the second layer having a first surface in contact adjacent to the active layer and a second surface having a surface that includes features that scatter light striking the second surface. A layer of transparent electrically conducting material is adjacent to the second surface and covered by a first layer of a dielectric material that is transparent to the light generated by the active layer. A mirror layer that has a reflectivity greater than 90 percent is deposited on the first layer of dielectric material.
1. A device comprising:
a first layer comprising a material of a first conductivity type;
an active layer overlying said first layer, said active layer generating light when holes and electrons recombine therein;
a second layer comprising a material of a second conductivity type, said second layer having a first surface overlying said active layer and a rough surface opposite to said first surface comprising features that scatter light striking said rough surface;
a layer of transparent electrically conducting material deposited on said rough second surface;
a first layer of a dielectric material that is transparent to said light generated by said active layer, said first layer having a first surface in contact with said layer of transparent electrically conducting material and a second surface; and
a reflective layer deposited on said second surface of said first dielectric layer, wherein said reflective layer has a reflectivity greater than 90%, and wherein said reflective layer would have a reflectivity less than 70% if deposited directly on said layer of transparent electrically conducting material;
further comprising a second layer of a dielectric material overlying said reflective layer, said reflective layer being encapsulated by said first and second layers of dielectric material.
2. A device comprising:
a first layer comprising a material of a first conductivity type;
an active layer overlying said first layer, said active layer generating light when holes and electrons recombine therein;
a second layer comprising a material of a second conductivity type, said second layer having a first surface overlying said active layer and a rough surface opposite to said first surface comprising features that scatter light striking said rough surface;
a layer of transparent electrically conducting material deposited on said rough second surface;
a first layer of a dielectric material that is transparent to said light generated by said active layer, said first layer having a first surface in contact with said layer of transparent electrically conducting material and a second surface; and
a reflective layer deposited on said second surface of said first dielectric layer, wherein said reflective layer has a reflectivity greater than 90%, and wherein said reflective layer would have a reflectivity less than 70% if deposited directly on said layer of transparent electrically conducting material;
wherein said reflective layer is connected to one of said first layer and said second layer by an electrically conducting via;
further comprising a contact layer overlying said reflective layer, said contact layer being connected to the other of said first layer and said second layer by an electrically conducting via;
wherein said electrically conducting via connecting said contact layer to the other of said first and second layers passes through an opening in said reflective layer.