IP Library Granted Patent US 8,947,116
Granted Patent B2
US 8,947,116 · App. 13/223,319 · Granted Feb 3, 2015

System for testing an integrated circuit of a device and its method of use

Inventors: Scott E. Lindsey (Brentwood, CA); Junyje Yeh (Livermore, CA); Jovan Jovanovic (Santa Clara, CA); Seang P. Malathong (Newark, CA)
Assignee: Aehr Test Systems
G01R31/2887G01R31/2886G01R31/2863
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Quick Facts
Patent No.
US 8,947,116
App. No.
13/223,319
Granted
Feb 3, 2015
Kind
B2
Abstract

A method of testing an integrated circuit of a device is described. Air is allowed through a fluid line to modify a size of a volume defined between the first and second components of an actuator to move a contactor support structure relative to the apparatus and urge terminals on the contactor support structure against contacts on the device. Air is automatically released from the fluid line through a pressure relief valve when a pressure of the air in the fluid line reaches a predetermined value. The holder is moved relative to the apparatus frame to disengage the terminals from the contacts while maintaining the first and second components of the actuator in a substantially stationary relationship with one another. A connecting arrangement is provided including first and second connecting pieces with complementary interengaging formations that restricts movement of the contactor substrate relative to the distribution board substrate in a tangential direction.

Claims (23)

1. A method of testing an integrated circuit of a device, comprising:

locating a compensating piece against a first piece of a subassembly of a contactor board assembly, the compensating piece having a three-dimensional profiled surface to improve planarity of a three-dimensional profile of a surface of the subassembly other than the profiled surface of the compensating piece;

holding the device against a surface of a holder;

moving the contactor board assembly relative to the holder to bring terminals of the contactor board assembly into contact with contacts on the device; and

providing signals through the terminals and contacts to the integrated circuit.

2. The method of claim 1 , wherein the compensating piece is held between first and second pieces of the subassembly.

3. The method of claim 1 , wherein the three-dimensional profile of the compensating piece makes the three-dimensional profile of the surface of the subassembly substantially planar.

4. The method of claim 1 , further comprising:

actuating first and second components of an actuator to move a contactor support structure relative to an apparatus frame and urge terminals on the contactor support structure against contacts on the device.

5. The method of claim 4 , further comprising:

allowing air through a fluid line to modify a size of a volume defined between the first and second components of the actuator to move the contactor support structure relative to the apparatus frame.

6. The method of claim 1 , wherein a plurality of electrical components are mounted on the contactor board assembly.

7. The method of claim 6 , wherein the electrical components are mounted on a side on the contactor board assembly opposing the terminals held by the contactor board assembly.

8. The method of claim 6 , wherein the electrical components are located between a force distribution substrate and the contactor board assembly, further comprising:

transferring force from the contactor board assembly to the force distribution substrate through a stand-off component, the stand-off component being located between the compensating piece and the surface of the subassembly.

9. The method of claim 1 , wherein the contactor board assembly includes a distribution board substrate and a contactor substrate mounted to the distribution board substrate.

10. The method of claim 1 , further comprising:

removably mounting a cartridge frame of a cartridge to an apparatus frame, the contactor board assembly forming part of the cartridge; and

connecting a surface of a connector interface to a surface of a contactor interface forming part of the cartridge.

11. The method of claim 10 , wherein the cartridge includes a common subassembly and a first unique contactor subassembly, further comprising:

replacing the first unique contactor subassembly with a second unique contactor subassembly.

12. The method of claim 11 , further comprising:

reducing a pressure in an area between the common subassembly and the second unique contactor subassembly, the compensating piece compensating for at least a profile change of the surface due to said reduction in pressure.

Assignments (5)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 14, 2023
From: LINDSEY, SCOTT E.; YEH, JUNJYE; JOVANOVIC, JOVAN; MALATHONG, SEANG P.
To: AEHR TEST SYSTEMS
Reel/Frame 062693/0662 →
RELEASE OF SECURITY INTEREST Recorded Nov 5, 2019
From: QVT FUND LP; QUINTESSENCE FUND L.P.
To: AEHR TEST SYSTEMS
Reel/Frame 050928/0695 →
SECURITY INTEREST Recorded Apr 14, 2015
From: AEHR TEST SYSTEMS
To: QVT FUND LP; QUINTESSENCE FUND L.P.
Reel/Frame 035424/0783 →
RELEASE OF SECURITY INTEREST Recorded Apr 13, 2015
From: SILICON VALLEY BANK
To: AEHR TEST SYSTEMS
Reel/Frame 035420/0390 →
SECURITY AGREEMENT Recorded Sep 6, 2013
From: AEHR TEST SYSTEMS
To: SILICON VALLEY BANK
Reel/Frame 031171/0001 →
Continuity (2)
Division 12411233 · Mar 25, 2009
Related Publication 20110316577A1 · Dec 29, 2011