Granted Patent B2

US 9,224,828 · App. 13/270,606 · Granted Dec 29, 2015

Abstract

Claims (52)

1. A method for fabricating edge termination structures in gallium nitride (GaN) materials, the method comprising:

providing a n-type GaN substrate having a first surface and a second surface;

forming an n-type GaN epitaxial layer coupled to the first surface of the n-type GaN substrate;

adding a p-type dopant into the n-type GaN epitaxial layer to form a p-type GaN epitaxial layer, wherein the doping concentration of the p-type GaN epitaxial layer is less than 5×10 18 cm −3 ;

removing at least a portion of the p-type GaN epitaxial layer to:

form at least one p-type gate region of a vertical junction field-effect transistor (JFET) using a remaining portion of the p-type GaN epitaxial layer;

form an exposed portion of the n-type GaN epitaxial layer; and

form a plurality of edge termination structures;

forming a first metallic structure electrically coupled to the second surface of the n-type GaN substrate;

forming an n-type GaN channel region coupled to the at least one p-type gate region, wherein the n-type GaN channel region overlaps the gate region;

forming an n-type GaN source region coupled with the n-type GaN channel region, wherein the n-type GaN source region overlaps the gate region; and

forming first and second ohmic metal contacts coupled to the at least one p-type gate region and the n-type GaN source region, respectively, wherein the second ohmic metal contact overlaps the gate region; and

providing a dielectric between the edge termination structures.

2. The method of claim 1 wherein the n-type GaN substrate is characterized by a first n-type dopant concentration and the n-type GaN epitaxial layer is characterized by a second n-type dopant concentration less than the first n-type dopant concentration.

3. The method of claim 1 further comprising forming a second metallic structure electrically coupled to the at least one p-type gate region.

4. The method of claim 1 further comprising forming a metallic field plate coupled to at least one edge termination structure.

5. The method of claim 1 wherein at least one edge termination structure circumscribes a device structure.

6. The method of claim 1 wherein forming the first metallic structure is performed after forming the edge termination structures.

7. A method of fabricating an epitaxial structure, the method comprising:

providing a III-nitride substrate of a first conductivity type characterized by a first dopant concentration;

forming a first III-nitride epitaxial layer of the first conductivity type coupled to a first surface of the III-nitride substrate;

adding a dopant into the first III-nitride epitaxial layer to form a second III-nitride epitaxial layer, wherein the second III-nitride epitaxial layer has the second conductivity type, and wherein the doping concentration of the second III-nitride epitaxial layer is less than 5×10 18 cm −3 ; and

removing at least a portion of the second III-nitride epitaxial layer to:

form an exposed portion of the first III-nitride epitaxial layer;

form a plurality of edge termination structures; and

form a p-type gate region of a vertical junction field-effect transistor (JFET);

forming an n-type GaN channel region coupled to the p-type gate region, wherein the n-type GaN channel region overlaps the p-type gate region;

forming an n-type GaN source region coupled with the n-type GaN channel region, wherein the n-type GaN source region overlaps the p-type gate region;

forming first and second ohmic metal contacts coupled to the p-type gate region and the n-type GaN source region, respectively, wherein the second ohmic metal contact overlaps the p-type gate region; and

providing a dielectric between the edge termination structures.

8. The method of claim 7 further comprising forming a metallic structure coupled to the p-type gate region.

9. The method of claim 7 further comprising forming a metallic field plate coupled to at least one edge termination structure.

10. The method of claim 7 wherein at least one edge termination structure circumscribes a semiconductor device.

11. The method of claim 7 wherein the first III-nitride epitaxial layer is characterized by a second dopant concentration less than the first dopant concentration.

12. The method of claim 7 wherein forming the edge termination structures comprises forming three or more edge termination structures with predetermined spaces between each of the three or more edge termination structures, wherein:

a first spacing of the predetermined spaces is located closer to a semiconductor device than a second spacing of the predetermined spaces; and

a width of the first spacing is smaller than a width of the second spacing.

13. A semiconductor structure comprising:

a III-nitride substrate having a first side and a second side opposing the first side, wherein the III-nitride substrate is characterized by a first conductivity type and a first dopant concentration;

a III-nitride epitaxial layer of the first conductivity type coupled to the first surface of the III-nitride substrate, wherein the III-nitride epitaxial layer has a diffusion region which has a dopant of a second conductivity type, and wherein the doping concentration of the diffusion region is less than about 5×10 18 cm −3 ;

a first metallic structure electrically coupled to the second surface of the III-nitride substrate;

a III-nitride epitaxial structure of the second conductivity type formed of an etched portion of the diffusion region of the III-nitride epitaxial layer, wherein the III-nitride epitaxial structure comprises a plurality of edge termination structures and at least one gate region of a vertical junction field-effect transistor (JFET);

a dielectric between the edge termination structures;

a channel region coupled to the at least one gate region and the III-nitride epitaxial layer, wherein the channel region comprises a III-nitride epitaxial material of the first conductivity type, and wherein the channel region overlaps the gate region;

a source region coupled to the channel region, wherein the source region comprises a III-nitride epitaxial material of the first conductivity type, and wherein the source region overlaps the gate region; and

first and second ohmic metal contacts coupled to the source region and the at least one gate region, respectively, wherein the second ohmic metal contact overlaps the gate region.

14. The semiconductor structure of claim 13 further comprising a metallic field plate coupled to at least one edge termination structure.

15. The semiconductor structure of claim 13 wherein at least one edge termination structure circumscribes a semiconductor device.

16. The semiconductor structure of claim 13 wherein:

the edge termination structure comprise three or more edge termination structures with a plurality of spacings between the edge termination structures;

a first spacing is located closer to a semiconductor device than a second spacing; and

a width of the first spacing is smaller than a width of the second spacing.

Assignments (13)