Overhead hoist transport system
View Patent ↗An overhead wafer transport system includes an over head transportation (OHT) rail and at least one shuttle. The OHT rail includes a main track and two lateral tracks, each having a hollow transverse cross-section, each lateral track being in corresponding connection with the main track through the two sides thereof, constituting an approximate tri-directional branch form. The shuttle has a track-interface assembly and a docking unit, the track-interface assembly being adapted to travel along the OHT rail. The track-interface assembly being arranged at the junction of the two lateral tracks and the main track, wherein the track-interface assembly is adapted to selectively travel along at least one of the main track and the lateral tracks. Therefore, the overhead wafer transport system can be applied to a clean room with higher transfer efficiency and clean room space utilization.
1. An overhead wafer transport system comprising:
an overhead transportation (OHT) rail including a main track and two lateral tracks, each having a hollow transverse cross-section, each lateral track being in corresponding connection with the main track through the two respective sides thereof; and
a shuttle having a track-interface assembly and a docking unit, wherein the track-interface assembly is adapted to travel along the OHT rail and includes a frame structure, three pairs of main wheels and four pairs of branching wheels, wherein the frame structure is substantially H-shaped and includes a vertical bar coupled between two horizontal bars;
wherein the four pairs of branching wheels are correspondingly arranged on the two horizontal bars with a predetermined distance in between;
wherein when the shuttle travels toward a junction of the two lateral tracks and the main track, the track-interface assembly is adapted to selectively travel along at least one of the main track and the lateral tracks.
2. The overhead wafer transport system according to claim 1 , wherein each of the main track and the two lateral tracks comprises a track frame, a guiding member and a track section.
3. The overhead wafer transport system according to claim 2 , wherein the connecting junction of the main track and the two lateral tracks forms an extended reinforced section.
4. The overhead wafer transport system according to claim 2 , wherein the cross-section of the track frame is substantially U-shaped.
5. The overhead wafer transport system according to claim 2 , wherein the guiding member is fixedly arranged on the upper inner surface of the track frame.
6. The overhead wafer transport system according to claim 4 , wherein the lateral sides of the track frame extend to form the track section.
7. The overhead wafer transport system according to claim 1 , wherein three pairs of wheels are adapted in the hollow portion of the tracks and configured to selectively travel along the main track and the lateral tracks on the track section thereof.