Graphene and nanotube/nanowire transistor with a self-aligned gate structure on transparent substrates and method of making same
View Patent ↗Transistor devices having a self-aligned gate structure on transparent substrates and techniques for fabrication thereof are provided. In one aspect, a method of fabricating a transistor device includes the following steps. A channel material is formed on a transparent substrate. Source and drain electrodes are formed in contact with the channel material. A dielectric layer is deposited on the channel material. A photoresist is deposited on the dielectric layer and developed using UV light exposure through the transparent substrate. A gate metal(s) is deposited on the exposed portions of the dielectric layer and the undeveloped portions of the photoresist. The undeveloped portions of the photoresist are removed along with portions of the gate metal over the source and drain regions to form a gate of the device on the dielectric layer over the channel material which is self-aligned to the source and drain electrodes.
1. A method of fabricating a transistor device, comprising the steps of:
providing a transparent substrate;
forming a channel material on the substrate;
forming source and drain electrodes over, and in contact with, the channel material;
depositing a photoresist on the channel material and on the source and drain electrodes;
developing the photoresist using UV light exposure through the transparent substrate, wherein exposure of portions of the photoresist is blocked by the source and drain electrodes;
removing developed portions of the photoresist exposing portions of the channel material, wherein undeveloped portions of the photoresist remain over the source and drain electrodes;
depositing a dielectric layer on the channel material and on the undeveloped portions of the photoresist to a thickness of from about 1 nm to about 100 nm, wherein the dielectric layer is deposited after the photoresist has been developed through the substrate and after the developed portions of the photoresist have been removed;
depositing at least one gate metal on the dielectric layer; and
removing the undeveloped portions of the photoresist along with portions of the gate metal and portions of the dielectric layer over the source and drain regions, wherein a remaining portion of the gate metal between the source and drain region electrodes forms a gate of the device on the dielectric layer over the channel material which is self-aligned to the source and drain electrodes.
2. The method of claim 1 , wherein the transparent substrate comprises a glass substrate, a flexible plastic substrate or a silicon carbide wafer.
3. The method of claim 1 , wherein the channel material comprises a carbon-based material.
4. The method of claim 3 , wherein the carbon-based material comprises graphene or carbon nanotubes.
5. The method of claim 1 , wherein the channel material comprises a nanostructured material selected from the group consisting of nanowires, nanorods, nanocolumns and quantum dots.