Method of forming isolation area and structure thereof
View Patent ↗The instant disclosure relates to a method of forming an isolation area. The method includes the steps of: providing a substrate having a first type of ion dopants, where the substrate has a plurality of trenches formed on the cell areas and the isolation area between the cell areas of the substrate, with the side walls of the trenches having an oxidation layer formed thereon and the trenches are filled with a metallic structure; removing the metallic structure from the trenches of the isolation area; implanting a second type of ions into the substrate under the trenches of the isolation area; and filling all the trenches with an insulating structure, where the trenches of the isolation area are filled up fully by the insulating structure to form a non-metallic isolation area.
1. A structure of an isolation area, comprising:
a substrate having a first type of ion dopants, the substrate having a first trench and a plurality of second trenches,
wherein the substrate defines two cell areas and an isolation area between the cell areas, the first trench is formed in the isolation area, and the second trenches are respectively formed in the cell areas,
wherein the first and second trenches have the same depth, and the side wall of each of the first and second trenches has an oxidation layer formed thereon,
wherein the first trench is filled up fully with an insulating structure in forming a non-metallic isolation area, and each second trench is filled partially with a metallic structure and partially with an insulating structure,
wherein a second type of ions is implanted into the substrate under the first trench to increase the level of electrical isolation between the cell areas.
2. The structure of an isolation area according to claim 1 , wherein the substrate has a plurality of exposed polysilicon structures.