Metal high-K transistor having silicon sidewalls for reduced parasitic capacitance
A method forms a metal high dielectric constant (MHK) transistor and includes: providing a MHK stack disposed on a substrate, the MHK stack including a first layer of high dielectric constant material, a second overlying layer, and a third overlying layer, selectively removing only the second and third layers, without removing the first layer, to form an upstanding portion of a MHK gate structure; forming a first sidewall layer on sidewalls of the upstanding portion of the MHK gate structure; forming a second sidewall layer on sidewalls of the first sidewall layer; removing a portion of the first layer to form exposed surfaces; forming an offset spacer layer over the second sidewall layer and over the first layer, and forming in the substrate extensions that underlie the first and second sidewall layers and that extend under a portion but not all of the upstanding portion of the MHK gate structure.
1. A metal high dielectric constant (MHK) transistor, comprising:
a substrate;
a MHK gate structure disposed on the substrate between a source region and a drain region, the MHK gate structure comprising a layer of high dielectric constant material and an overlying layer comprised of a metal, the MHK gate structure further having an overlying layer comprised of silicon, where a lateral extent of the layer of high dielectric constant material is greater than lateral extents of the overlying layer comprised of metal and the overlying layer comprised of silicon, the overlying layer comprised of metal and the overlying layer comprised of silicon forming an upstanding portion of the MBK gate structure;
a first sidewall layer comprised of silicon disposed on exposed portions of sidewalls of the MHK gate structure to cover sidewalls of the overlying layer comprised of metal and sidewalls of the overlying layer comprised of silicon, the first sidewall layer also being disposed on and in contact with part of a top surface of the layer of high dielectric constant material;
a second sidewall layer disposed on and in contact with exposed portions of the first sidewall layer and disposed on and in contact with part of the top surface of the layer of high dielectric constant material;
an offset spacer layer disposed over and physically in contact with exposed portions of the second sidewall layer and exposed portions of the layer of high dielectric constant material; and
extensions formed in the substrate that underlie the first and second sidewall layers and that extend under a portion but not all of the upstanding portion of the MHK gate structure, wherein each substrate extension overlaps the upstanding portion of the MHK gate structure by an overlap distance.
2. The MHK transistor of claim 1 , wherein the overlap distance is about 5 to 10 nanometers.
3. The MHK transistor of claim 1 , where the layer of high dielectric constant material is comprised of at least one of HfO 2 , Ta 2 O 5 , TiO 2 , Al 2 O 3 , Y 2 O 3 and La 2 O 5 .
4. The MHK transistor of claim 1 , where the overlying layer comprised of metal is comprised of at least one of TiN, Ta, TaN, TaCN, TaSiN, TaSi, AlN, W and Mo.
5. The MHK transistor of claim 1 , where the first sidewall layer is comprised of at least one of amorphous silicon or polycrystalline silicon.
6. The MHK transistor of claim 1 , where the metal high dielectric constant (MHK) transistor is a P-type field effect transistor.
7. The MHK transistor of claim 1 , where the metal high dielectric constant (MHK) transistor is an N-type field effect transistor.
8. The MHK transistor of claim 1 , further comprising a final spacer layer formed over exposed surfaces of the offset spacer layer.
9. The MHK transistor of claim 8 , further comprising the source and drain regions formed in the substrate.
10. The MHK transistor of claim 9 , wherein the extensions at least partially underlie the first sidewall layer.
11. The MHK transistor of claim 1 , wherein the first sidewall layer has a thickness in a range of about three to six nanometers.
12. The MHK transistor of claim 1 , wherein the second sidewall layer is an insulator.
13. The MHK transistor of claim 1 , wherein the second sidewall layer is conductive.
14. The MHK transistor of claim 1 , where the layer of high dielectric constant material is comprised of ZrO 2 .
15. The MHK transistor of claim 1 , where the layer of high dielectric constant material is comprised of HfSi x O y .