Semiconductor device and method of forming stud bumps over embedded die
View Patent ↗A semiconductor package having an embedded die and solid vertical interconnections, such as stud bump interconnections, for increased integration in the direction of the z-axis (i.e., in a direction normal to the circuit side of the die). The semiconductor package can include a die mounted in a face-up configuration (similar to a wire bond package) or in a face-down or flip chip configuration.
1. A method of making a semiconductor device, comprising:
providing a substrate;
forming a first conductive layer over a first surface of the substrate;
disposing a semiconductor die over the first surface of the substrate;
forming a plurality of first stud bumps over the first conductive layer and including a base portion extending to a sidewall of the first conductive layer and a stem portion extending from the base portion, wherein a width of the base portion is greater than a width of the first conductive layer;
forming a plurality of second stud bumps over the semiconductor die, the second stud bumps including a base portion and a stem portion extending from the base portion; and
depositing an encapsulant over the substrate, semiconductor die, first stud bumps, and second stud bumps.
2. The method of claim 1 , wherein forming the plurality of first stud bumps includes:
providing a bond wire;
rounding an end of the bond wire to form the base portion; and
trimming the bond wire to form the stem portion.
3. The method of claim 1 , further including planarizing the encapsulant and the stem portion of the first stud bumps.
4. The method of claim 1 , further including forming a second conductive layer over the encapsulant and electrically connected to the first stud bumps and second stud bumps.
5. The method of claim 1 , further including forming a second conductive layer over a second surface of the substrate opposite the first surface of the substrate.
6. A method of making a semiconductor device, comprising:
providing a semiconductor die;
forming a first conductive layer in a peripheral region around the semiconductor die;
forming a first stud bump over the first conductive layer, the first stud bump including a base portion extending to a sidewall of the first conductive layer and a stem portion extending from the base portion; and
depositing an encapsulant over the semiconductor die and first stud bump.
7. The method of claim 6 , wherein forming the first stud bump includes:
providing a bond wire;
rounding an end of the bond wire to form the base portion; and
trimming the bond wire to form the stem portion.
8. The method of claim 6 , further including planarizing the encapsulant and the stem portion of the first stud bump.
9. The method of claim 6 , further including forming a second stud bump over the semiconductor die, the second stud bump including a base portion and a stem portion extending from the base portion.
10. The method of claim 6 , further including forming a second conductive layer over the encapsulant and electrically connected to the first stud bump.
11. The method of claim 6 , further including:
providing a substrate comprising a first surface with the semiconductor die disposed over the first surface; and
forming a second conductive layer over a second surface of the substrate opposite the first surface of the substrate.
12. The method of claim 6 , further including providing a substrate that dissipates heat generated by the semiconductor die.
13. A method of making a semiconductor device, comprising:
providing a semiconductor die;
forming a first stud bump over the semiconductor die by,
(a) providing a bond wire,
(b) rounding an end of the bond wire to form a base portion of the first stud bump, and
(c) trimming the bond wire to form a stem portion of the first stud bump; and
depositing an encapsulant over the semiconductor die and first stud bump.
14. The method of claim 13 , further including planarizing the encapsulant and the stem portion of the first stud bump.
15. The method of claim 13 , further including:
providing a substrate comprising a first surface with the semiconductor die disposed over the first surface; and
forming a second stud bump over the first surface of the substrate, the second stud bump including a base portion and a stem portion extending from the base portion.
16. The method of claim 15 , further including forming a conductive layer over the first surface of the substrate prior to forming the second stud bump.
17. The method of claim 13 , further including forming a conductive layer over the encapsulant and electrically connected to the first stud bump.
18. The method of claim 13 , further including providing a substrate that dissipates heat generated by the semiconductor die.
19. A method of making a semiconductor device, comprising:
providing a semiconductor die including a conductive layer in a peripheral region around the semiconductor die;
forming a first stud bump over the conductive layer by,
(a) providing a bond wire,
(b) rounding an end of the bond wire to form a base portion of the first stud bump extending to a sidewall of the conductive layer, and
(c) trimming the bond wire to form a stem portion of the first stud bump; and
depositing an encapsulant over the semiconductor die and first stud bump.
20. The method of claim 19 , further including forming a second stud bump over the semiconductor die, the second stud bump including a base portion and a stem portion extending from the base portion.
21. The method of claim 19 , further including forming a second conductive layer over the encapsulant and electrically connected to the first stud bump.
22. The method of claim 19 , further including providing a substrate comprising a first surface with the semiconductor die disposed over the first surface of the substrate and the conductive layer formed over the first surface of the substrate prior to forming the first stud bump.
23. The method of claim 19 , further including planarizing the encapsulant and the stem portion of the first stud bump.
24. The method of claim 19 , further including:
providing a substrate comprising a first surface with the semiconductor die disposed over the first surface; and
forming a second conductive layer over a second surface of the substrate opposite the first surface of the substrate.
25. A method of making a semiconductor device, comprising:
providing a semiconductor die;
forming a first conductive layer in a peripheral region around the semiconductor die; and
forming a first stud bump over the first conductive layer, the first stud bump including a base portion and a stem portion extending from the base portion, wherein a width of the base portion is greater than a width of the first conductive layer.
26. The method of claim 25 , further including depositing an encapsulant over the semiconductor die and first stud bump.
27. The method of claim 26 , further including planarizing the encapsulant and the stem portion of the first stud bump.
28. The method of claim 26 , further including forming a second conductive layer over the encapsulant and electrically connected to the first stud bump.
29. The method of claim 25 , wherein forming the first stud bump includes:
providing a bond wire;
rounding an end of the bond wire to form the base portion; and
trimming the bond wire to form the stem portion.
30. The method of claim 25 , further including forming a second stud bump over the semiconductor die, the second stud bump including a base portion and a stem portion extending from the base portion.
31. The method of claim 25 , further including:
providing a substrate comprising a first surface with the semiconductor die disposed over the first surface; and
forming a second conductive layer over a second surface of the substrate opposite the first surface of the substrate.
32. The method of claim 25 , further including providing a substrate that dissipates heat generated by the semiconductor die.