Mask free protection of work function material portions in wide replacement gate electrodes
In a replacement gate scheme, after formation of a gate dielectric layer, a work function material layer completely fills a narrow gate trench, while not filling a wide gate trench. A dielectric material layer is deposited and planarized over the work function material layer, and is subsequently recessed to form a dielectric material portion overlying a horizontal portion of the work function material layer within the wide gate trench. The work function material layer is recessed employing the dielectric material portion as a part of an etch mask to form work function material portions. A conductive material is deposited and planarized to form gate conductor portions, and a dielectric material is deposited and planarized to form gate cap dielectrics.
1. A semiconductor structure comprising a field effect transistor, said field effect transistor (FET) including a gate stack comprising a gate dielectric and a gate electrode and located on a semiconductor substrate, wherein said gate electrode comprises:
a work function material portion contacting said gate dielectric;
a dielectric material portion contacting said work function material portion; and
a conductive material portion contacting said dielectric material portion, wherein said dielectric material portion is encapsulated by said work function material portion and said conductive material portion.
2. The semiconductor structure of claim 1 , further comprising a gate cap dielectric in contact with a top surface of said gate electrode.
3. The semiconductor structure of claim 1 , wherein said gate dielectric comprises a horizontal portion underlying said dielectric material portion and vertical portions in contact with said work function material portion and said conductive material portion.
4. The semiconductor structure of claim 3 , wherein said vertical portions are laterally spaced from said dielectric material portion.
5. The semiconductor structure of claim 1 , wherein an entirety of a bottom surface of said dielectric material portion is vertically spaced from a planar top surface of said gate dielectric by a same distance.
6. The semiconductor structure of claim 1 , wherein all surfaces of said dielectric material portion are in contact with a surface of said work function material portion.
7. The semiconductor structure of claim 1 , wherein an interface between said work function material portion and said conductive material portion is in contact with, and laterally surrounds, said dielectric material portion.
8. The semiconductor structure of claim 1 , wherein said dielectric material portion comprises a material selected from silicon nitride, undoped silicon oxide, a doped silicon oxide, and a dielectric metal oxide material.
9. The semiconductor structure of claim 1 , further comprising a planarization dielectric layer located on said semiconductor substrate, said planarization dielectric layer embedding and laterally surrounding said gate electrode.
10. The semiconductor structure of claim 1 , further comprising another field effect transistor (FET) including another gate stack comprising another gate dielectric and another gate electrode and located on said semiconductor substrate, wherein said another gate electrode comprises:
another work function material portion contacting said another gate dielectric and comprising a same material as said work function material portion; and
another conductive material portion contacting said dielectric material portion and comprising a same material as said conductive material portion, wherein an entire top surface of said another work function material portion is in contact with an entire bottom surface of said another conductive material portion.
11. The semiconductor structure of claim 1 , wherein all surfaces of said dielectric material portion are in contact with a surface of said conductive material portion.
12. The semiconductor structure of claim 1 , wherein said work function material portion comprises a stack of a first titanium nitride layer, a tantalum carbide layer and a second titanium nitride layer.
13. The semiconductor structure of claim 1 , wherein said work function material portion comprises a metallic material selected from the group consisting of Hf, Ti, Zr, Cd, La, Tl, Yb, Al, Ce, Eu, Li, Pb, Tb, Bi, In, Lu, Nb, Sm, V, Zr, Ga, Mg, Gd, Y, TiAl, TaN, Pt, Rh, Ir, Ru, Cu, Os, Be, Co, Pd, Te, Cr, Ni, a stack thereof, a conductive oxide thereof, a conductive nitride thereof, an alloy thereof, and a combination thereof.
14. A semiconductor structure comprising a field effect transistor, said field effect transistor (FET) including a gate stack comprising a gate dielectric and a gate electrode and located on a semiconductor substrate, wherein said gate electrode comprises:
a work function material portion contacting said gate dielectric;
a dielectric material portion contacting said work function material portion; and
a conductive material portion contacting said dielectric material portion, wherein said dielectric material portion is encapsulated by said work function material portion and said conductive material portion and wherein said gate dielectric comprises a horizontal portion underlying said dielectric material portion and vertical portions in contact with said work function material portion and said conductive material portion and wherein said vertical portions are laterally spaced from said dielectric material portion.
15. The semiconductor structure of claim 14 , wherein said work function material portion comprises a stack of a first titanium nitride layer, a tantalum carbide layer and a second titanium nitride layer.
16. The semiconductor structure of claim 14 , wherein said work function material portion comprises a metallic material selected from the group consisting of Hf, Ti, Zr, Cd, La, Tl, Yb, Al, Ce, Eu, Li, Pb, Tb, Bi, In, Lu, Nb, Sm, V, Zr, Ga, Mg, Gd, Y, TiAl, TaN, Pt, Rh, Ir, Ru, Cu, Os, Be, Co, Pd, Te, Cr, Ni, a stack thereof, a conductive oxide thereof, a conductive nitride thereof, an alloy thereof, and a combination thereof.