IP Library Granted Patent US 8,772,838
Granted Patent B2
US 8,772,838 · App. 13/831,907 · Granted Jul 8, 2014

Semiconductor layout structure

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Quick Facts
Patent No.
US 8,772,838
App. No.
13/831,907
Granted
Jul 8, 2014
Kind
B2
Abstract

A semiconductor layout structure includes multiple active blocks which are disposed on a substrate, parallel with one another and extending along a first direction, multiple first shallow trench isolations which are disposed on a substrate, parallel with one another and respectively disposed on the multiple active blocks, and multiple second shallow trench isolations which are disposed on a substrate, cutting through multiple active blocks and extending along a second direction. The first direction has an angle about 1 degree to about 53 degrees to the second direction.

Claims (22)

1. A semiconductor layout structure, comprising:

a substrate;

a plurality of active blocks, disposed on said substrate, parallel with each other and extending along a first direction;

a plurality of first shallow trench isolations, disposed on said substrate, parallel with each other and respectively disposed between said plurality of active blocks; and

a plurality of second shallow trench isolations, disposed on said substrate, cutting through said plurality of active blocks and extending along a second direction, wherein said first direction and said second direction have an angle between 1 degree to 53 degrees.

2. The semiconductor layout structure of claim 1 , further comprising:

a plurality of word lines, disposed on said substrate, parallel with each other and extending along a third direction, wherein said first direction and said third direction have an angle between 30 degrees to 60 degrees.

3. The semiconductor layout structure of claim 1 , further comprising:

a plurality of bit line contacts, disposed on said substrate, parallel with each other, respectively disposed between said plurality of second shallow trench isolations and extending along said second direction, wherein said plurality of bit line contacts respectively divide said plurality of active blocks into a gate area overlapping said plurality of bit line contacts, as well as a source region and a drain region disposed at both sides of said gate region.

4. The semiconductor layout structure of claim 2 , further comprising:

a plurality of bit lines, disposed on said substrate and simultaneously parallel with each other, wherein said plurality of word lines and said plurality of bit lines are substantially perpendicular to each other.

5. The semiconductor layout structure of claim 4 , wherein said plurality of word lines and said plurality of bit lines have an angle from 85 degrees to 95 degrees.

6. A semiconductor layout structure, comprising:

a substrate;

a plurality of active blocks, disposed on said substrate, parallel with each other and extending along a first direction;

a plurality of first shallow trench isolations, disposed on said substrate, parallel with each other and respectively disposed between said plurality of active blocks;

a plurality of second shallow trench isolations, disposed on said substrate, cutting through said plurality of active blocks so that said plurality of active blocks become a plurality of active areas which are electrically insulated to each other, and extending along a second direction, wherein said first direction and said second direction have an angle between 1 degree to 53 degrees;

a plurality of word lines, disposed on said substrate, parallel with each other and extending along a third direction, wherein said first direction and said third direction have an angle between 30 degrees to 60 degrees;

a plurality of bit line contacts, disposed on said substrate, parallel with each other, respectively disposed between said plurality of second shallow trench isolations and extending along said second direction, wherein said plurality of bit line contacts respectively divide said plurality of active areas into a gate area overlapping said plurality of bit line contacts, as well as a source region and a drain region disposed at both sides of said gate region;

a plurality of bit lines, disposed on said substrate and simultaneously parallel with each other, wherein said plurality of word lines and said plurality of bit lines are substantially perpendicular to each other; and

a plurality of capacitor regions and a plurality of gaps alternately disposed in said plurality of active blocks, wherein said plurality of capacitor regions overlap said plurality of second shallow trench isolations and said plurality of word lines, and said plurality of bit line contacts overlap said plurality of gaps.

7. The semiconductor layout structure of claim 6 , wherein said plurality of word lines and said plurality of bit lines have an angle from 85 degrees to 95 degrees.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050695/0825 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 27, 2017
From: INOTERA MEMORIES, INC.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 041820/0815 →
SUPPLEMENT NO. 3 TO PATENT SECURITY AGREEMENT Recorded Feb 10, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041675/0105 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 15, 2013
From: LEE, TZUNG-HAN; LEE, CHUNG-YUAN
To: INOTERA MEMORIES, INC.
Reel/Frame 030008/0593 →